臺灣博碩士論文加值系統

本論文分別利用極性與非極性氧化鋅薄膜做為緩衝層，再藉由水熱法合成極性與非極性的氧化鋅奈米柱結構。首先我們先用電漿輔助化學氣相沉積系統在p-Si (100)基板上分別沉積極性與非極性之氧化鋅薄膜，接著以這兩種氧化鋅薄膜做為水熱法合成奈米柱結構的緩衝層，藉由表面電荷排列的不同影響其垂直與水平的排列方式，在此部分將會探討在水熱法中不同的成長溫度、水溶液濃度的變化以及成長時間對其結構之影響。從研究結果中顯示，在溫度90 OC、水溶液濃度0.05 莫爾及合成時間3小時的條件下能夠成長出垂直陣列的極性氧化鋅奈米柱；在溫度80 OC、水溶液濃度0.05 莫爾及合成時間1小時的條件下能夠成長出水平的非極性氧化鋅奈米柱。本研究使用白金與導電銀膠作為電極材料製作紫外光感測器，經由感測結果分析以白金電極所製備出的感測器有最佳的靈敏度，極性的奈米柱感測器響應時間由4.37秒縮短至1.81秒，回復時間減短至4.87秒；非極性的奈米柱感測器響應時間由0.141秒縮短至0.125秒，回復時間由0.125縮短至0.11秒，由以上的量測我們能得知奈米柱結構能提升感測器的靈敏度，其中更以非極性氧化鋅奈米柱感測器最佳，擁有良好快速的響應與恢復時間。

In this study, polar and nonpolar ZnO thin film were used to be a buffer layer to synthesize the polar and nonpolar ZnO nanaorods for UV photodetector sensing layer. First, polar and nonpolar thin films were deposited onto p-Si (100) substrate using Plasma Enhanced Chemical Vapor Deposition system. Second, the two different as-prepared thin films was used to synthesize the polar and nonpolar ZnO nanaorods as buffer layer by a simple hydrothermal method. In this part we investigated the influence of different temperature, mole concentration of aqueous solution and synthesized time. As the result, we successfully synthesized the vertical polar ZnO nanorods at 90 oC, 0.05 Mole in 3 h and horizontal nonpolar ZnO nanorods at 80 oC, 0.05 Mole in 1 h. Finally, we used two different metal materials as electrode to fabricate horizontal structures of metal-semiconductor-metal (MSM) with schottky contact behavior. The interdigital Pt electrodes were preparing by sputtering and lithography techniques, and colloidal silver electrodes were directly coating onto sample, respectively. As the result, the performance of ZnO-based photodetector with interdigital Pt electrodes is better than silver electrodes, it is showing the good reproducibility and stability after 5times switching of UV illumination. Moreover, the sensitivity was enhanced after synthesized the nanorods structure on the polar/nonpolar ZnO buffer layer. For ZnO-based photodetector with polar nanorod structure, the response time decreased from 4.37 sec to 1.81 sec and the recovery time decreased to 4.87 sec. On the other hand, in the case of ZnO-based photodetector with nonpolar nanorod structure, the response time decreased from 0.141 sec to 0.125 sec and the recovery time decreased from 0.125 sec to 0.11 sec. According to the results, the nonpolar ZnO nanorods photodetector exhibit a good sensitivity with ultra-fast response and recovery time.

目錄
中文摘要 i
ABSTRACT ii
致謝 iv
第一章 緒論 1
1.1前言 1
1.2研究動機 2
1.3研究目的 3
第二章 文獻回顧與基礎理論 5
2.1 氧化鋅介紹 5
2.1.1 氧化鋅晶體結構與特性 6
2.1.2 氧化鋅之極性面 7
2.1.3 氧化鋅之非極性面 8
2.2 氧化鋅相圖 14
2.3 氧化鋅之導電性 15
2.4 氧化鋅缺陷 16
2.5 氧化鋅發光機制 19
2.6 奈米材料 25
2.6.1 量子侷限效應(quantum confinement effect) 26
2.6.2 表面效應(surface effect) 26
2.6.3 尺寸效應(size effect) 26
2.7 一維奈米結構之成長機制 28
2.8 水熱法合成一維奈米結構 30
2.9 電漿輔助式化學氣相沉積系統 34
2.10 氧化鋅奈米感測元件之應用 35
2.10.1 紫外光感測器響應機制 35
第三章 實驗方法及步驟 38
3.1 實驗流程設計與設備介紹 38
3.1.1 實驗大綱 38
3.2 實驗設備 39
3.2.1 電漿輔助化學氣相沉積法(Plasma Enhanced Chemical Vapor deposition, PECVD) 39
3.3 實驗材料與藥品 41
3.3.1 反應氣體 41
3.3.2 實驗藥品 41
3.3.3 基板原料 41
3.4 電漿輔助化學氣相沉積法製備氧化鋅薄膜緩衝層 41
3.4.1基板準備 41
3.4.2鍍膜參數及步驟 42
3.5 水熱法一維氧化鋅奈米柱製備 43
3.6 特性分析儀器介紹 44
3.6.1 X-ray繞射晶體結構分析儀(X-ray Diffractometer, XRD) 44
3.6.2 場發射掃描式電子顯微鏡(FE-SEM) 46
3.6.3 光致螢光光譜儀(PL) 48
3.6.4 穿透式電子顯微鏡分析 (Transmission Electron Microscope, TEM) 50
3.7電極製作 51
3.7.1 銀膠電極製作 51
3.7.2 白金電極製作 51
3.7.3 ZnO/Si 結構上製作指叉狀電極 53
3.8 紫外光檢測器的光源與量測 57
3.8.1 紫外光光源 57
3.8.2 電性量測 57
第四章 實驗結果與討論 58
4.1 溫度對於極性與非極性氧化鋅薄膜沉積之影響 58
4.1.1 極性與非極性氧化鋅薄膜之沉積參數 58
4.1.2 XRD繞射分析 59
4.1.3 SEM表面形貌分析 61
4.1.4極性與非極性氧化鋅薄膜之PL光學分析 63
4.2一維極性氧化鋅奈米柱結構之合成 65
4.2.1 溫度對於極性氧化鋅奈米柱之影響 65
4.2.2 XRD繞射分析 66
4.2.3 SEM表面分析 68
4.2.4 極性氧化鋅奈米線之深寬比分析 70
4.2.5 極性氧化鋅奈米結構之PL圖 72
4.2.6 濃度對於極性氧化鋅奈米柱之影響 74
4.2.7 XRD晶體結構分析 74
4.2.8 SEM表面形貌分析 76
4.2.9 極性氧化鋅奈米柱之PL圖 79
4.2.10 成長時間對氧化鋅奈米柱之影響 81
4.2.11 XRD晶體結構分析 81
4.2.12 SEM表面分析 83
4.2.13 極性氧化鋅奈米柱之PL圖 86
4.3 非極性氧化鋅奈米柱合成 87
4.3.1溫度對於非極性氧化鋅奈米柱之影響 87
4.3.2 XRD晶體結構分析 88
4.3.3 SEM表面分析 90
4.3.4非極性氧化鋅奈米柱之PL圖 92
4.3.5 濃度對於非極性氧化鋅奈米柱之影響 93
4.3.6 XRD晶體結構分析 93
4.3.7 SEM表面分析 95
4.3.8非極性氧化鋅奈米柱之PL圖 98
4.4 極性與非極性氧化鋅奈米柱晶體成長 99
4.5 紫外光感測特性分析 101
4.5.1白金電極於氧化鋅奈米柱之影響 102
4.5.2極性與非極性氧化鋅奈米柱感測器之影響 105
4.5.3導電銀膠對於氧化鋅奈米柱之影響 109
4.5.4極性與非極性氧化鋅奈米柱感測器之影響 111
第五章 結論 114
參考文獻 115
作者簡介 131

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