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研究生:羅貫庭
研究生(外文):LO, GUAN-TING
論文名稱:ZnO奈米柱的光學特性與電性量測
論文名稱(外文):Optical and Electrical Properties of ZnO Nanorods
指導教授:宋皇輝
指導教授(外文):Sung,Huang-Huei
口試委員:宋皇輝范榮權林春榮
口試委員(外文):Sung,Huang-HueiFan,Jung-ChuanLin,Chun-Rong
口試日期:2017-07-28
學位類別:碩士
校院名稱:大葉大學
系所名稱:醫療器材設計與材料碩士學位學程
學門:工程學門
學類:生醫工程學類
論文種類:學術論文
論文出版年:2017
畢業學年度:105
語文別:中文
論文頁數:69
中文關鍵詞:氧化鋅奈米柱能隙光致螢光綠光發射帶
外文關鍵詞:ZnO nanorodsband gapphotoluminescencegreen
相關次數:
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  • 點閱點閱:100
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  • 下載下載:4
  • 收藏至我的研究室書目清單書目收藏:0
本研究利用濺鍍Pt催化金屬,在結合化學氣相沉積VLS機制成長ZnO奈米柱,進行光學與電性分析。分別將不同沉積層放入高溫爐以20℃/min上升速率到700℃持溫2個小時並通入氬氣及氧氣,使用Zn源成長ZnO奈米柱,改變通入氧氣時間與不同沉積層進行比較。搭配X光繞射儀器(XRD)分析其結晶方向,透過場發式掃描顯微鏡觀(FE-SEM)察ZnO的表面形貌,以van der Pauw方法進行電性量測,利用光致螢光系統(Photoluminscence,PL),分析不同條件下的能隙變化。
在Pt催化金屬加熱至700℃持溫2hr其中通入O2 1hr後關閉O2,以10℃/min下降速率冷卻至25℃,生長出的ZnO多取向奈米柱分布均勻有良好的導電性,在PL量測結果中發現添加金屬催化層的樣品有氧原子佔據鋅空缺形成,可獲的較佳的綠光發光特性,適合應用在氣體感測與光電元件上。

In this study, ZnO nanorods grow by chemical vapor deposition VLS (Vapor-Liquid-Solid) combining with or without sputtered catalytic metal Pt were analyzed the optical and electrical properties. To grow ZnO nanorods, Zn source and substrates with or without Pt layer were put into the high temperature tube furnace and heat in rising rate 20˚C/min to 700 ˚C. During the growth process, argon and oxygen were introduced to the tube in flowing rate 54 sccm and 3.1 sccm, respectively. We control the oxygen flowing time duration and high temperature dwelling time to compare the fabricated nanorods on substrates with or without catalytic layer. The fabricated samples were study the crystal structure with XRD (X-ray diffractometer), the energy gap utilizing PL (Photoluminescence), surface morphology with FE-SEM (Field-Emission Scanning Electron Microscope), and electrical properties in van der Pauw method.
According to experimental results, the optima condition to grow the multi-oriented ZnO nanorods is on the substrate with catalytic metal Pt at 700 ˚C, holding temperature 2 hour, introducing oxygen after 1 hour, then cooling down to 25 ˚C at rate 10˚C/ min. The fabricated nanorods are distributed uniformly with good conductivity. From the PL data, we found the green emission characteristic which can be the results of oxygen atoms occupying zinc vacancies. That implies the nanorods is suitable for applying in gas sensing and optoelectronic components.

封面內頁
簽名頁
中文摘要...iii
ABSTRACT...iv
誌謝...iv
目錄...v
圖目錄...ix
表目錄...xi

第一章 緒論...1
1.1 前言...1
1.2 ZnO 之應用...3
1.3 低維度材料性質...4
1.3.1 奈米結構特性...5
1.4 研究動機...8
第二章 文獻回顧...9
2.1氧化鋅特性...9
2.1.1 氧化鋅的電學特性...9
2.1.2 氧化鋅的發光特性...12
2.2 一維奈米線合成方式...16
2.2.1 化學氣象沉積(Chemical Vapor Deposition)...17
2.2.2 固-液-氣(Vapor-Liquid-Solid)...21
2.2.3 物理氣相沉積(Physical Vapor Deposition)...24
第三章 實驗方法與步驟...29
3.1 使用藥品...29
3.3.1 光致螢光光譜儀(Photoluminescence Spectrometer,PL)...31
3.3.2 ZnO奈米柱之電性分析...32
3.3.3 場發射掃描式電子顯微鏡(FE-SEM)...34
3.3.4 X光繞射儀 (X-ray diffractometer,XRD)...35
3.3.5 管狀高溫爐(Tubular furnaces)...36
3.4 實驗方法...37
3.4.1 SiO2 薄膜製備流程...37
3.4.2 實驗流程圖...38
3.4.3 矽基板清洗與製備...39
3.4.4 ZnO奈米棒製備...40
第四章 結果與討論...42
4.1 Si/SiO2基板上濺鍍Pt與ZnO薄膜進行CVD影響...42
4.1.1 有無催化層成長ZnO奈米柱其結晶性分析...42
4.1.2 有無催化層成長ZnO奈米柱表面分析...45
4.1.3 有無催化層成長ZnO奈米柱I-V電性量測...47
4.1.4 有無催化層成長ZnO奈米柱對PL光譜之影響...48
4.2 以不同時間通入O2對ZnO奈米柱的影響...50
4.2.1 不同通氧時間對ZnO奈米柱的表面分析...50
4.2.2不同通氧時間對XRD奈米柱其結晶性分析...52
4.2.3不同通氧時間對奈米柱I-V電性量測...53
4.2.4不同通氧時間生長奈米柱對PL光譜之影響...54
第五章 結論...56
參考文獻...57

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