臺灣博碩士論文加值系統

本研究以液相沉積 (Liquid Phase Deposition, LPD) 之技術，將氟化鎳 ( NiF2 ) 混和硼酸 ( H3BO3 ) 與六氟鈦酸銨 ( ( NH4 ) 2TiF6 ) 混和硼酸 ( H3BO3 )，於 n 型矽基板正面成長氧化鎳薄膜當作 p型層使用；於 n 型矽基板背面成長二氧化鈦薄膜當作電洞阻擋層使用。並以紫外光電子能譜儀 ( Ultra-violet Photoemission Spectroscopy, UPS ) 分析氧化鎳薄膜功函數，以準確畫出能帶圖，以 X 射線光電子能譜儀 ( X-ray Photoelectron Spectroscopy, XPS ) 分析 NiO/Si 的介面組成，並以 FTIR 分析氧化鎳薄膜的鍵結，以Transmission Length Method ( TLM ) 方式分析薄膜的接觸電阻與特性接觸電阻。以氧化鎳薄膜與二氧化鈦薄膜應用於異質接面太陽能電池上，在厚度 3 nm 時有最佳的光電轉換效率，其Voc：0.52 V、Jsc：26.2 mA/cm、FF：57.2 %、光電轉換效率達 7.79%。

In this thesis, carrier-selective contacts based on thin oxides of p type nickel oxide films ( front ) and hole-blocking titanium oxide ( back ) films were deposited on heterojunction silicon solar cells by liquid phase deposition with deposition solution of nickel fluorine and boric acid, ammonium hexafluoro-titanate and boric acid, respectively. We used ultra-violet photoemission spectroscopy ( UPS ) to analyze the work function and draw the band diagram. And we used x-ray photoelectron spectroscopy ( XPS ) to analyze the composition of NiO / Si interface. And use FTIR analysis to analyze the NiO thin films’ bonding. We also use Transmission Length Method ( TLM ) to analyze the contact resistance and specific contact resistance. In heterojunction silicon solar cells, nickel oxide optimal thickness is 3 nm. Therefore, the power conversion efficiency of heterojunction solar cell reached 7.79 %, open circuit voltage of 0.52 V, short circuit density of 26.2 mA/cm2, fill factor of 57.2 %.

目錄
致謝 i
摘要 ii
Abstract iii
目錄 iv
圖目錄 vii
表目錄 xi
第一章 緒論 1
1.1 前言 1
1.2. 研究動機 4
第二章 太陽能電池基礎理論與文獻回顧 6
2.1. 太陽能電池原理 6
2.2. 文獻回顧 14
2.3. 銀催化濕式蝕刻反應機制 15
第三章 實驗方法 16
3.1. 實驗材料 16
3.2. 實驗流程 17
3.2.1. 矽基板清洗 17
3.2.2. 矽奈米孔洞製作流程 18
3.2.3. LPD-TiO2 製備 19
3.2.4. LPD-NiO 製備 20
3.2.5. 鋁電極蒸鍍 21
3.2.6. PEDOT:PSS 溶液調配 21
3.2.7. 異質結構太陽電池製備 22
3.3. 實驗設計 24
3.4. 實驗設備 25
3.4.1. 超音波震盪器 25
3.4.2. 旋轉加熱平台 26
3.4.3. 微量電子天秤 27
3.4.4. 恆溫水槽 28
3.4.5. 高真空熱蒸鍍機 (High-vacuum Thermal Evaporation) 29
3.4.6. 旋轉塗佈機 ( Spin Coater ) 30
3.5. 量測及分析儀器 31
3.5.1. 太陽電池 I-V 量測系統 31
3.5.2. 太陽能電池外部量子效率量測系統 ( EQE ) 32
3.5.3. 場發射掃描式電子顯微鏡 ( Field Emission Scanning Electron Microscope, FE-SEM ) 33
3.5.4. X射線光電子能譜儀 ( X-ray Photoelectron Spectroscopy, XPS ) 34
3.5.5. 紫外光電子能譜儀 ( Ultraviolet Photoelectron 35
3.5.6. 紫外光/可見光吸收光譜儀( UV-Visible Spectroscopy ) 36
第四章 結果與討論 38
4.1. LPD-NiO 薄膜 UV-Visible 分析 41
4.2. LPD-NiO 薄膜 UPS 分析 39
4.3. 異質結構太陽電池能帶分析 43
4.4. LPD-NiO 薄膜 XPS 分析 46
4.5. LPD-NiO 薄膜 SEM 分析 52
4.6. LPD-NiO 薄膜 Transmission Length Method ( TLM ) 分析 65
4.7. LPD-NiO 薄膜 FTIR 分析 69
4.8. 異質結構太陽電池光電特性分析 71
第五章 結論 93
未來展望 95
參考文獻 96

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