臺灣博碩士論文加值系統

本研究為發展利用雷射自混頻干涉效應來進行三自由度量測，並應用於非接觸式量測，三維量測系統主要是由一個雷射二極體、一個四象限光位置感測器、分光鏡、一台電光調製器和貓眼反射鏡所構成。將貓眼反射鏡放置於奈米移動平台並置於雷射二極體正前方，雷射打入貓眼反射鏡的反射現象會使雷射光點在四象限光位置感測器上有電壓的變化量，其X軸向及Z軸向以四象限光位置感測器測得之電壓與位移訊號趨勢方程式判斷，Y軸則是以雷射自混頻干涉推得，此技術是以雷射輸出光經外部反射物反射後，部分光反饋回雷射共振腔體內，使反饋光和共振腔內的輸出光發生干涉後，利用反饋光對雷射特性的影響而獲得位移訊號。
並撰寫出正弦相位調製法的調變與解調，使本領域的發展往更微小的量測範圍發展

This research develop and utilize a laser diode self-mixing based three dimensional sensor, and apply to the contact probe for trigger signal measurement. The components of the three dimensional sensor system are including a laser diode, a quadrant photodiode, a beam splitter and a glass ball lens. The glass ball lens is combined with a contact probe mechanism, and placed at the straight front of the laser diode, and through measuring with the contact probe mechanism, the reflected laser light spot of the glass ball lens will cause voltage variation on the quadrant photodiode. The X and Z axis can be determined by the voltage and displacement signal trend equation from the quadrant photodiode. On the other hand, an amount of laser which is released from the laser diode reflected or scattered back from the glass ball lens will re-enter the laser cavity. The fraction of light will interfere with the original laser light inside the laser cavity, and by utilizing the property of how it react with the laser beams for the displacement signal, then the Y axis can be calculated.
And write the sine phase modulation method of modulation and demodulation, so that the development of the field to a smaller measurement range development.

致謝 i
摘要 ii
目錄 iv
圖目錄 vi
表目錄 viii
第一章 緒論 1
1.1 前言 1
1.1.1傳統光學干涉量測技術之發展 1
1.1.2自混頻干涉技術之研究發展 2
第二章 系統量測原理與方法 20
2.1.1 自混頻干涉理論 20
2.1.2條紋技術法 24
2.1.3條紋技術位移重建過程 26
2.2.1自混頻相位調製法 29
2.2.2提取相位 31
2.3四象限感測儀位置量測原理 33
第三章 實驗規劃與流程 35
3.1正弦相位調製技術 35
3.2相位調製模擬 35
3.2.1 位移量測原理 35
3.3實驗流程與實驗裝置 39
3.3.1實驗元件介紹 39
第四章 實驗結果與討論 50
4.1.1適度反饋強度X軸向位移量測結果分析 50
4.1.2適度反饋強度Y軸向位移量測結果分析 52
4.1.3適度反饋強度Z軸向位移量測結果分析 54
4.2.1弱反饋強度X及Z方向位移量精度分析 57
4.2.2弱反饋強度Y方向位移量精度分析 61
第五章 結論 63
5.1 結論 63
5.2 未來展望 63
參考文獻 64

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