參考文獻
[1]Mansuripur, M., The Physical Principles of Magneto-optical Recording, Cambridge U. Press, Cambridge, 1995.
[2]Terris, B. D., Mamin, H. j., Rugar, D., Studenmund, W. R. and Kino, G. S., “Near-field optical data storage using a solid immersion lens,” Applied Physics Letters, Vol. 65, no. 4, pp. 388-390, 1994.
[3]Mansfield, S. M., Studenmund, G. S. and Osato, K., “High-Numerical-Aperture lens system for optical storage,” Optics Letters, Vol. 18, no. 4, pp. 305-307, 1993.
[4]Kim, S. H., Yee, Y., Choi, J., Kwon, H., Ha, M. H., Oh, C., and Bu, J. U., “A micro optical flying head for a pcmcia-sized optical data storage,” IEEE Micro Electro Mechanical Systems, pp. 85-88, 2004.
[5]Abbe, E., “On the On the estimation of aperture in the microscope,” J. Roy. Microsc. Soc., Vol. 1, no. 3, pp. 388-423, 1881.
[6]Ippolito, S. B., Thorne, S. A., Eraslan, M. G., Goldberg, B. B., Unlu, M. S. and Leblebici, Y., “High spatial resolution subsurface thermal emission microscopy,” Applied Physics Letters, Vol. 84, no.22 pp. 4529-4531, 2004.
[7]Itani, T., Wakamiya, W., Cashmore, J. and Gower, M., “157-nm Lithography with high numerical aperture lens for sub-70 nm node,” Microelectronic Engineering, Vol. 67-68, pp. 22-25, 2003.
[8]Smith, B., Immersion techniques carry 193-nm lithography beyond the 65-nm node, SPIE’s oemagazine, 2004.
[9]Popovic, Z. D., Sprague, R. A., Neville Connell, G. A., “Technique for monolithic fabrication of microlens arrays,” Applied Optics, Vol. 27, Issue: 7, pp. 1281-1284, 1988.
[10]Pan, C. T. and Su, C. Y., “Study of micro-lens array by reflow process,” Journal of Modern Optics, Vol. 17, Issue: 2, pp. 2843-2856, 2008.
[11]Voigt, A., Ostrzinski, U., Pfeiffer, K., Kim, J. Y., Fakhfouri, V., Brugger, J. and Gruetzner, G., "New inks for the direct drop-on-demand fabrication of polymer lenses," Microelectronic Engineering, Vol. 88, Issue: 8, pp. 2174-2179, 2011.
[12]Oppliger, Y., Sixt, P., Stauffer, J. M., Mayor, J. M., Regnault, P. and Voirin, G., "One-step 3D shaping using a gray-tone mask for optical and microelectronic applications," Microelectronic Engineering, Vol. 23, Issue: 1-4, pp. 449-454, 1994.
[13]Naessens, K., Ottevaere, H., Van Daele, P. and Baets, R.,"Flexible fabrication of microlenses in polymer layers with excimer laser ablation," Applied Surface Science, Vol. 208-209, pp. 159-164, 2003.
[14]Chang, S. I. and Yoon, J. B., "Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method," Optics Express, Vol. 12, Issue 25, pp. 6366-6371, 2004.
[15]Lee, J. H., Choi, W. S., Lee, K. H. and Yoon, J. B., "A simple and effective fabrication method for various 3D microstructures: backside 3D diffuser lithography," Journal of Micromechanics and Microengineering, Vol. 12, pp. 6366-6371, 2004.
[16]Yamada, M., Miura, T., Sakabkibara, H., Aoki, S., Kanazawa, T. and Eatanabe, T., “A novel microminiaturized aspherical lens with a high numerical aperture,” Japanese Journal of Applied Physics, vol. 42, pp. 895-897, 2002.
[17]Luo, Y., Wang, L., Ding, Y., Wei, H., Hao, X., Wang, D., Dai, Y. and Shi, J., “Direct farbrication of microlens arrays with high numerical aperture by ink-jetting on nanotextures surface,” Applied Surface Science, vol. 279, pp. 36-40, 2013.
[18]Zhu, X., Zhu, L., Chen, H., Li, Z. and Zhang, W., "Fabrication of curved microlens array using a drop-on-demand droplet generator and polydimethylsiloxane replica mold," Optics & Laser Technology, Vol. 53, Issue: 11, pp. 23-27, 2015.
[19]Park, M., Lee, H., Park, J., Kim, M., Bae, J., Mahmud, I. and Kim, H., “Design and Fabrication of multi-focusing microlens array with different numerical apertures by using thermal reflow method,” Journal of the Optical Society of Korea, vol. 18, no. 1, pp. 71-77, 2014.
[20]Kim, M., Scharf, T., Nguyen, D., Keeler, E., Rydberg, S., Nakagawa, W., Osowiecki, G., Voelkel, R. and Herzig, H. P., “Light confinement effect of nonspherical nanoscale solid immersion lenses,” Journal of Micro/Nanolithography, MEMS and MOMES, Vol. 12, no. 2, pp. 230151-230156, 2013.
[21]Zheng, G., Zhang, R., Li, S., He, P., Zhou, H. and Shi, Y., “A Hyperlens-Embedded Solid Immersion Lens for beam focusing beyond the diffraction limit,” IEEE photonics technology letters, vol. 23, no. 17, pp. 1234-1236, 2011.
[22]徐姍姍, 以近接式曝光法製作微環狀結構陣列之新式製程設計探討, 國立中興大學精密工程研究所碩士論文, 2004.[23]Lin, T. H., Chao, C. K. and Hung, S. Y., "A novel fabrication method of micro-needle mold by using the micro-lens mask through contact printing," Microsystem Technologies, Vol. 21, Issue: 9, pp. 1843-1848, 2015.
[24]Greivenkamp, J. E., Field Guide to Geometrical Optics, SPIE Field Guides vol, FG01. SPIE. ISBN 0-8194-5294-7, 2004.
[25]張凱榮, 熱熔法製作之微透鏡基材對數值孔徑影響之探討, 中興大學機械工程研究所碩士論文, 2005.[26]莊達人,VLSI製造技術,高立圖書有限公司,2002。