臺灣博碩士論文加值系統

本研究探討Ag-Al-Sb及Ag-Al-Zn三元系統在500℃之等溫橫截面相圖，可以用來作為半導體封裝製程中新型銀合金打線開發的參考依據。實驗主要利用熱壓擴散偶進行界面相平衡的研究，並以特定合金單點試片的相平衡結果來輔助，利用電子微探儀（EPMA）進行擴散介面影像的擷取及各相成分分析，實驗結果加以統整後可得到整體相平衡的關係來完成此兩個三元系統等溫橫截面相圖。 根據實驗結果可以成功接合此二個三元系統的擴散偶，並再配置特定成分合金試片經過30天500℃的時效熱處理，可以確認且修正以上擴散偶的結果；Ag-Sb-Al 三元系統在500℃等溫橫截面相圖共計有6個三相區為Al/Ag2Al/AlSb 、Ag7Sb/Ag13Sb3/AlSb、Ag/Ag2Al/AlSb、Ag/Ag7Sb/AlSb、Ag13Sb3/L/AlSb及L/AlSb/Sb；而Ag-Zn-Al三元系統在500℃等溫橫截面相圖共計有2個三相區為Ag/AgZn/ε及AgZn/Ag5Zn8/ε，並量測出以往量測中所缺少的富銀區資訊，即Ag、AgZn相的固溶範圍，ε相固溶範圍也與文獻相似，但隨著相平衡溫度提高其固溶範圍往富銀端移動。

The 500oC isothermal cross-sectional phase diagrams of Ag-Al-Sb and Ag-Al-Zn ternary systems are determined in this study, which can provide the phase stability information for development of new silver wirebonding in semiconductor packaging process. The interfacial phase equilibrium is generated by the hot pressed diffusion couple method, and the phase equilibrium data of the specific alloy samples can comfirm and complete whole phase diagram regions. The equilibrium phases are examined by using electron probe micro-analyzer(EPMA). According to the experimental results, the diffusion couple of these two ternary systems can be successfully produced and the specific composition alloy specimen can be confirmed and fixed by the aging heat treatment at 500 ℃ for 30 days. There are six three-phase regions in the 500℃ isothermal diagram of Ag-Sb-Al ternary system, which are Al/Ag2Al/AlSb, Ag7Sb/Ag13Sb3/AlSb, Ag/Ag2Al/AlSb, Ag/Ag7Sb/AlSb, Ag13Sb3/L/AlSb and L/AlSb/Sb. There are two three-phase regions in the 500℃ isothermal diagram of Ag-Zn-Al ternary system,which are Ag/AgZn/ε and AgZn/Ag5Zn8/ε. Finally, the solid solution range of Ag and AgZn phases can be delimit, which is lacking in previous measurement.

論文審定書…………………………………………………………………..i
致謝 ................................................................................................................ ii
摘要 ............................................................................................................... iii
Abstract .......................................................................................................... iv
目錄 ................................................................................................................ v
表目錄 ......................................................................................................... viii
圖目錄 ............................................................................................................ x
壹、 前言 ................................................................................................... 1
1-1 研究背景 ............................................................................................... 1
1-2 研究動機 ........................................................................................... 2
貳、 文獻回顧 ........................................................................................... 4
2-1 相圖 ................................................................................................... 4
2-2 Ag-Al二元系統相平衡圖 ................................................................ 5
2-3 Ag-Sb二元系統相平衡圖 ................................................................ 6
2-4 Ag-Zn二元系統相平衡圖 ................................................................ 7
2-5 Al-Sb二元系統相平衡圖 ................................................................. 8
2-6 Al-Zn二元系統相平衡圖................................................................. 8
2-7 Ag-Al-Zn三元系統 .......................................................................... 9
2-8 界面反應與擴散偶的擴散路徑 ..................................................... 10
2-9 擴散偶的擴散路徑 ......................................................................... 12
參、 實驗步驟 ......................................................................................... 13
3-1 試片製作 ......................................................................................... 13
3-1-1 合金配製 ................................................................................. 14
3-1-2 合金熔煉 ................................................................................. 14
3-1-3 擴散偶製作及等溫熱處理 ..................................................... 15
3-1-4 特定成分單點試片製作 ......................................................... 17
3-1-5 金相樣品製備 ......................................................................... 17
3-2 電子微探儀分析 ............................................................................. 18
3-3 XRD粉末繞射儀分析 .................................................................... 18
肆、 實驗結果 ......................................................................................... 19
4-1 Ag-Al-Sb 500℃平衡相圖研究....................................................... 19
4-1-1 Al-Ag97Sb3 500℃擴散偶相平衡研究 ........................................ 19
4-1-2 Al-Ag94Sb6 500℃擴散偶相平衡研究 ........................................ 20
4-1-3 Ag7Sb/Ag13Sb3/AlSb 三相區 ..................................................... 20
4-1-4 Ag/AlSb/Ag2Al三相區............................................................... 20
4-1-5 Al/AlSb/Ag2Al三相區 ............................................................... 21
4-1-6 AlSb/Ag/Ag7Sb三相區 .............................................................. 21
4-1-7 AlSb/Ag2Al兩相區..................................................................... 22
4-1-8 Ag/AlSb 兩相區 ......................................................................... 22
4-2 Ag-Al-Zn 500℃平衡相圖研究 ...................................................... 23
4-2-1 Al-Ag80Zn20 500℃擴散偶相平衡研究 ................................... 23
4-2-2 Al-Ag65Zn35 500℃擴散偶相平衡研究 ................................... 24
4-2-3 Al-Ag39Zn61 500℃擴散偶相平衡研究 ................................... 24
4-2-4 Al-Ag25Zn75 500℃擴散偶相平衡研究 ................................... 25
4-2-5 Al-Ag53Zn47 600℃擴散偶相平衡研究 ................................... 25
4-2-6 Ag固溶Al、Zn的單相區 ......................................................... 26
4-2-7 AgZn/ε兩相區 ............................................................................ 26
4-2-8 AgZn固溶Al之單相區 ............................................................. 26
4-2-9 Ag/AgZn兩相區 ......................................................................... 27
4-2-10 Ag5Zn8固溶Al之單相區 ...................................................... 27
4-2-11 Ag2Al與AgZn3互溶之單相區 ............................................. 27
4-2-12 Al/ε兩相區 ............................................................................. 28
4-2-13 液相區與其相關相區 ............................................................. 28
4-2-14 ε單相晶格常數分析 .............................................................. 28
伍、 討論 ................................................................................................. 30
5-1 Ag-Al-Sb系統 ............................................................................ 30
5-2 Ag-Al-Zn系統 ................................................................................ 31
陸、 結論 ................................................................................................. 33
柒、 參考文獻 .......................................................................................... 34

[1] 李俊霖, 應用擴散偶量測Au-Al-Cu及Au-Al-Pd相圖、擴散路徑與擴散係數, 國立中山大學材料與光電科學研究所博士論文, (2014)
[2] 陳俊毅, Ag-Al-Pd三元系統平衡相圖研究, 國立中山大學材料與光電科學研究所碩士論文, (2013)
[3] H. G. Xu, Y. Du, Y. C. Zhou, Z. P. Jin, Rare Metals, Vol. 25, No. 5, pp.427-430, (2006)
[4] S. Shafiee, E. Topal, Resources Policy, Vol. 35, No. 3, pp.178-189, (2010)
[5] Z. W. Zhong, Microelectronic International, Vol. 26, No. 1, pp.10-16
[6] M. R. Choi, H. G. Kim, T. W. Lee, Y. J. Jeon, Y. K. Ahn, K. W. Koo, Y. C. Jang, S. Y. Park, J. K. Yee, N. K. Cho, I. T. Kang, S. Kim, S. Z. Han, S. H. Lim, Microelectronics Reliability, Vol. 55, No. 11, pp.2306-2315, (2015)
[7] J. K. Liao, L. Y. Hung, L. W. Wu, M. Y. Chiang, D. S. Jiang, C. M. Huang, Y. P. Wang, IEEE, pp.1163-1168, (2012)
[8] C. H. Tsai, C. H. Chuang, H. H. Tsai, J. D. Lee,D. Chang, H. J. Lin, and T. H. Chuang, IEEE, Vol. 6, No. 2, pp.298-305, (2016).
[9] G. I. Petrenko, Z. Anorg, Chemistry, Vol. 46, pp. 49-59, (1905).
[10] M. Hillert, B. L. Averbach, M. Cohen, Acta Met, Vol. 4, pp. 31-36, (1956).
[11] A. J. McAlister, Binary Alloy Phase Diagrams, Vol. 1, pp.8, (1979).
[12] M. Hansen, K. Anderko, Constitution of Binary Alloys, Vol. 1, pp.20, (1958).
[13] H. Okamoto, Ag-Sb (Silver-Antimony), J. Phase Equilibria, Vol. 14, No. 4, pp. 531-532, (1993).
[14]S. Hassam, Z. Bahari, and B. Legendre, J. Alloys Compounds, Vol. 315, pp.211-217, (2001).
[15] H. Okamoto, Journal of Phase Equilibria and Diffusion, Vol. 28, No. 4, pp.403, (2007).
[16] T. B. Massalski, H. Okamoto, P. R. Subramanian and K. Linda, Binary alloy phase diagrams, Vol.3, ASM International, pp.117-118, (1990).
[17] T. Gómez-Acebo, Calphad, Vol.22, No. 2, pp.203-220, (1998).
[18]A. J. McAlister, Bull. Alloy Phase Diagrams, Vol.5, No. 5, pp.462-465, (1984).
[19] A. Zajaczkowski and J. Botor, Z. Metallkd, Vol.86, No.9, pp.590-596, (1995).
[20] H. Okamoto, Journal of Phase Equilibria, Vol. 18 No. 2, pp.217, (1997).
[21] J. L. Murray, Bulletin of Alloy Phase Diagrams, Vol. 4, No. 1, pp.55-73, (1983).
[22] G. Petzow and G. Effenberg, Tenery Alloys, Comprehensive Compendium of Evaluated Constitutional Data and Phase Diagram, Vol.1, pp.89-95.
[23] S. Ueno, Equi. Diagram, Vol. 3, No. 13, pp.91-100, (1930).
[24] E. Gebbardt, Equi. Diagram, Vol. 7, No.32, pp.407-441, (1940).
[25] O. Lyon, J. J. Hoyt, R. Pro, Equi. Diagram, Vol. 17, No. 18, pp.480-486, (1985).
[26] W. Koster, R. Muller, J. Seelhorst, Equi. Diagram, Vol. 4, No. 55, pp.589-596, (1964).
[27]A. A. Kodentsov, G. F. Bastin, F.J.J. Van Loo, Journal of Alloys and Compounds, Vol. 320, pp.207-217, (2001).
[28]J. S. Kirkaldy, L. C. Brown, Canadian Metallurgical Quarterly, Vol. 2, pp.89-117, (1963).
[29] B. D. Cullity, S. R. Stock, Element of X-ray Diffraction 3rd Edition, Capter 3, pp.101-103, (2001).