臺灣博碩士論文加值系統

根據聯合國於2016年公布的世界毒品報告顯示，在2014年每20個成年人中就有1個人(亦即15至64歲的人中有2.5億人)使用過至少一種毒品，其中又以大麻為使用最氾濫的毒品。大麻中的主要化學成分為四氫大麻酚(Tetrahydrocannabinol, THC)，吸食者除了會產生幻覺造成公共安全的問題外，亦會對自身健康造成影響。為了提供警方快速取締吸食毒品者並加強防制毒品之濫用，本論文運用微機電技術與自我組裝單分子層技術，開發一種可檢測人體尿液中四氫大麻酚濃度之彎曲平板波(Flexural Plate-wave, FPW)生物感測器，可應用於大麻之快速篩檢。
為了改善傳統彎曲平板波元件之高插入損耗與低質量感測靈敏度的缺點，本論文導入聚焦式扇形雙極指叉轉換器(Inter-digital Transducers, IDTs)與聚焦式反射閘極之設計；另外，本研究利用兩階段非等向性濕式蝕刻來進行背面矽腔體之製作，以精準控制彎曲平板波元件感測薄膜的厚度並改善製程良率。本論文所設計之高靈敏度彎曲平板波四氫大麻酚感測器，其主要製程包含七次薄膜沉積與五次黃光微影製程。
根據量測結果顯示，在最佳化製程條件下，本論文之彎曲平板波元件具有低插入損耗(-40.24 dB)、高質量感測靈敏度(118.95 cm2/g)、高質量感測線性度(R-square=0.95)與高之製程良率(66.67%)；另一方面，四氫大麻酚彎曲平板波生物感測器於五種不同濃度之四氫大麻酚(5、10、20、40、80 ng/ml)下進行量測，其生物偵測極限為5 ng/ml、生物感測線性度R-square為0.97，未來可望進一步應用於大麻之快速篩檢。

According to the World Drugs Report 2016 released by the United Nations, It is estimated that 1 in 20 adults, or a quarter of a billion people between the ages of 15 and 64 years, used at least one drug in 2014. Cannabis remains the most commonly used drug at the global level, with an estimated 183 million people having used the drug. The main psychoactive part of cannabis is tetrahydrocannabinol (THC). Cannabis addicts often hallucinate to cause public safety issues. Cannabis will also harm their own health. In order to allow the polices to banned drug abusers, this thesis aims to develop a flexural plate-wave (FPW) based biosensor for rapidly detection of THC concentration in human urine by integrating microelectromechanical systems (MEMS) and self-assembly monolayer (SAM) technologies.
To improve the high insertion loss and increase the sensitivity, this paper proposed a FPW transducer with focus-type double electrode interdigital transducers and groove-type reflective grating structure (RGS). Furthermore, to accurately control the thickness of the silicon thin-plate and substantially improve the fabrication yield of FPW transducers, a two-step anisotropic wet etching process was also developed. The manufacturing technologies adopted in this dissertation were MEMS and SAM technologies. The main fabrication processes included seven thin films deposition and five photolithography.
According to the experimental results, the proposed FPW transducer demonstrated a low insertion loss (-40.24 dB), high mass sensitivity (118.95 cm2/g), high sensing linearity (0.95). Furthermore, the proposed FPW-based THC biosensor demonstrated a very low detection limit (5 ng/mL) and high mass-sensing linearity (0.97).

中文審定書 i
英文審定書 ii
誌謝 iii
摘要 iv
Abstract v
目錄 vi
圖目錄 viii
表目錄 x
第一章 緒論 1
1.1前言 1
1.2研究動機與論文架構 4
1.3文獻回顧 4
1.3.1生物感測器簡介及比較 5
1.3.2 聲波感測器種類與比較 8
第二章 FPW元件材料分析與理論 16
2.1 壓電效應簡介與壓電薄膜選擇 16
2.1.1 壓電效應 16
2.1.2 壓電薄膜選擇 17
2.1.3氧化鋅壓電薄膜晶格結構與特性 18
2.2氧化鋅壓電薄膜沉積方法與特性分析 20
2.2.1 氧化鋅壓電薄膜沉積方法 20
2.2.2 氧化鋅壓電薄膜沉積原理 20
2.2.3反應性射頻磁控濺鍍原理 21
2.3 X光繞射(X-Ray Diffraction, XRD)分析 23
2.4 金屬指叉轉換器之等效電路分析 25
2.5 反射閘極結構理論 29
2.5.1 反射閘極與IDT之間距離之關係 30
2.5.2 反射閘極週期 32
2.5.3反射閘極對數之原理 32
2.6 FPW質量感測之理論推導 32
2.7 FPW生物感測元件 33
2.7.1自我組裝單分子層 33
2.7.2 胱胺酸-戊二醛鍵結法 33
第三章 聚焦式雙電極結構之FPW元件設計與製作 35
3.1 聚焦式雙電極結構之FPW元件設計 35
3.2 聚焦式雙電極結構之FPW元件製作 39
3.3 生物感測方法及步驟 46
第四章 實驗結果與討論 50
4.1 氧化鋅壓電薄膜之材料特性 50
4.2 FPW元件特性量測結果與分析 52
4.2.1 反射閘極結構對數對FPW元件特性之影響 52
4.2.3 矽基板之KOH蝕刻時間對FPW元件中心頻率的影響 54
4-3 聚焦式雙電極結構之FPW固態質量感測器特性分析 55
4.4 FPW元件生物質量感測結果與分析 57
第五章 結論與未來展望 58
5.1 結論 58
5.2 未來展望 59
參考文獻 60

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