在微量分子檢測上，傳統檢測技術不僅成本昂貴，測試時間久且需要專業的人員進行操作，不利於現場立即檢測。本論文提出改進電沉積壓電高分子製程，進而設計出高精密度且可全整合於晶片之聲波微收發傳感器並探討其感測特性，最後將此晶片應用於食品安全動物用藥殘留之檢測。
本論文設計出不同面積比例的壓電薄膜，延續過去學長的液滴電沉積方式，探討參數包含沉積時間、液滴體積、沉積電壓與金電極表面相對濕度預處理之最佳參數。在聲波測試方面，新開發之聲波收發元件在輸出功率上可達86.31 μW (10 kHz)，相較過去研究，在訊號強度上提升了62 % (10 kHz)；功率輸出上提升了37 %，能量轉換效能也提升了2.2 倍。而在聲波微收發器的性能可藉由預振預處理，可將每組晶片的訊號變異係數從17.79 % 降低至0.38 %。
其次，將其最佳化製程與預振預處理後的聲波微收發器應用於動物用藥殘留檢測。綜合聲波性能量測的結果，檢測頻率為10 kHz，檢測藥品為Ractopamine、Benzylpenicillin、Doxycycline，於60 μm微流道中之反應時間(流體擾動時間與穩定時間)為80 秒，穩態訊號SNR最高可達29.03 dB，線性檢測區間為0 ~ 100 ppb，對於純藥物檢測靈敏度最高可達2.4 mV/ppb，最低檢測極限為2.06 ppb (3 dB)。最後本論文將所開發之聲波微收發器結合分子拓印薄膜，整合於微流道晶片上，並將其應用於20 ppb 豬肉肉汁樣本實測，檢測結果可達 23.7±1.15 ppb，整體檢測時間(包含流體操控時間與訊號量測時間)共4分鐘。
本研究中所提出之高靈敏壓電式聲波微收發器檢測晶片，除了減少成本外，也簡化了操作的步驟、縮小體積易於與其他系統進行整合，未來除了應用在藥品殘留之外亦可用於其他微量生醫感測器中。

In recent years, people pay more attention to food safety. Traditional detection technology is expensive, complicated and time-consuming, so that it is impossible to do the real-time and on-site detection for the irregular additives in food samples. This study further investigate and improve the droplet-based piezoelectric polymer deposition. In addition, the deposited piezoelectric polymer deivces are integrated on a biochip for rapid detection of drug residue in foods.
First, we changed the wire width of electrode to design and choose different area ratio of P(VDF-TrFE). In the electrodeposition process, we discussed the optimization parameter, including electrodeposition time, volume of droplet, supplying voltage, and the pre-treatment of relative humidity. In the examination of acoustic property, the maximum output power was 86.31 μW (10 kHz). Compare of past study, the signal strengthen was enhanced by 62 % (10 kHz), the output power was enhanced by 37 %, the efficiency was enhanced by 220 %. In the property of acoustic transceiver, the signal coefficient of variation was reduced to 0.38 % from 17.79 % by the pre-tunable treatment.
The developed acoustic transceiver was applied to the detection of animal drugs residue in meat samples after the optimization process and pre-tunable treatment. The detection frequency was 10 kHz, and the target drugs were ractopamine、benzylpenicillin、doxycycline. The response, including fluid disturbance and steady tim) was 80 sec, and the SNR of steady signal was up to 29.03 dB. Linear range was 0 ~ 100 ppb, and sensitivity was up to 2.4 mV/ppb and the detection limit was 2.06 ppb (3 dB). Finally, the acoustic transceiver was integrated with MIP films on microfluidic chip, and 20 ppb pork sample was applied to our chip for drugs residue detection. The detection result was up to 23.7±1.15 ppb. The detection time was 4 min, including fluid operation and dynamic signal measurement.
In this study, the developed high-sensitivity piezoelectric acoustic transceiver presented the advantages of low cost, simple steps and high integration. Besides the drugs residue detection, it also was applied as others biosensor in the future.

摘要 i
Abstract ii
目錄 iv
表目錄 xi
第一章 緒論 1
1.1 食品安全檢測 1
1.2 傳統檢測技術 2
1.2.1 液相層析技術 3
1.2.2 質譜儀檢測技術 7
1.2.3 酵素免疫檢測技術 9
1.3 生醫感測器 10
1.3.1 光學生醫感測器 11
1.3.2 電化學生醫感測器 14
1.3.3 電阻抗生醫感測器 15
1.3.4 壓電石英晶體生醫感測器 17
1.4 超音波傳感器 18
1.4.1 超音波傳感器之發展與應用 19
1.4.2 電容式超音波微傳感器 20
1.4.3 壓電式超音波微傳感器 22
1.4.4 壓電式超音波微收發器 25
1.5 研究動機 28
1.6 研究目的與方法 30
1.7 論文研究架構 31
第二章 聲波檢測原理及聲波微電極設計 33
2.1 聲波傳遞理論 33
2.1.1 波動方程式 33
2.1.2 格林函數 35
2.1.3 屏障活塞 36
2.1.4 平面波與空間解析度 37
2.2 聲波微收發器設計 38
2.3表面吸附分子感測之物性與化性原理 40
2.3.1壓電式聲波檢測原理 40
2.3.2表面鍵結與分子吸附原理 42
第三章 壓電高分子製程與聲波性能量測 44
3.1 壓電高分子材料 44
3.2 壓電高分子製程 46
3.3 壓電高分子電沉積製程開發改善 52
3.3.1沉積時間與沉積厚度關係探討 53
3.3.2微液滴量與壓電高分子薄膜厚度實驗 54
3.3.3電壓參數與壓電高分子薄膜厚度實驗 57
3.3.4濕度預處理與壓電薄膜沉積效果最佳化 60
3.3.5壓電力顯微鏡(PFM)壓電薄膜極化量測 61
3.3.6熱極化處理對於聚合後壓電薄膜性能之影響 68
3.3.7最佳製程參數與討論 69
3.4 波微收發器性能量測 69
3.4.1聲波微收發器實驗與動物用藥動態檢測實驗架構 69
3.4.2聲波微收發器面積與壓電薄膜電極響應結果 72
3.4.3聲波微收發器面積與頻率功率及轉換效率測試圖 73
3.4.4聲波微收發器致動(驅動)次數影響與以預振調整性能 75
3.4.5聲波微收發器動態訊號分析 78
3.4.6聲波微收發器動態訊號處理 94
3.4.7預振前處理對於藥物檢測精準度比較 97
3.4.8聲波微收發器存放安定性測試 99
3.5 結論 100
第四章 聲波微收發器應用於食品藥物殘留快篩檢測 101
4.1 感測器於食品安全之應用 101
4.2 動物用藥殘留檢測項目 103
4.3結合分子拓印薄之聲波微收發器應用於動物用藥殘留晶片 105
4.4 動物用藥藥品檢量線檢測結果 109
4.5 動物用藥殘留檢測之肉類樣本備製 119
4.6結合分子拓印薄膜應用於動物用藥殘留檢測 119
4.6 結論 124
第五章 總結與研究成果 125
5.1 總結 125
5.2 研究成果 126
5.3研究創新 129
5.4 學術貢獻 131
5.4 未來研究建議 138
附錄 142
參考資料 164
作者簡介 174
著作發表 176

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