氣體偵測器、生物感測器是近幾年熱門的論文題目，石墨烯在這幾年也被拿來做這些應用的材料，石墨烯/氧化鋅/P型矽基板的異質結構作為電性量測的主要結構，在石墨烯上修飾尿酸酶，使得在不同濃度下的尿酸碰到尿酸酶時，產生化學反應的速度與量的不同，使得載子在石墨烯上被吸收，而導致費米能階的改變，進而影響異質結構能帶的彎曲，不同濃度導致產生的載子數目不同，因此偵測到不同電信訊號。再來第二部分研究著重於在石墨烯上挖洞，藉以改變酵素所能吸收的效率，探究挖洞大小與感測的靈敏度或反應時間的關聯性。

Gas sensors and biosensors are hot topics in research in recent years. Graphene/ZnO/p-type silicon multiple heterojunctions is the main structure used in this work to serve as biosensors. By decorating uricase on graphene, uricase would conduct chemical reaction. Different concentration of uric acid would produce different number of chemical products with different reaction rate. The Fermi level would be changed when carriers were doped in graphene, which would result in band bending, and the measured electrical signal would be changed. Second part of this research is about patterned graphene heterojunctions. When uricase attaches on patterned graphene, we try to find out the relationship between different size of holes and sensitivity on the detection of uric acid.

口試委員審定書..................................i
致謝...........................................ii
中文摘要........................................iii
ABSTRACT.......................................iv
CONTENTS.......................................v
LIST OF FIGURES................................vii
LIST OF TABLES.................................viii
Chapter 1 Introduction...................1
Chapter 2 Theoretical Background.........3
2.1 Uric Acid Sensor.......................3
2.2 Graphene, 2D material..................4
2.3 Schottky barrier diodes................4
2.4 Photolithography.......................5
Chapter 3 Experimental Details...........7
3.1 Current-Voltage (I-V) measurement......7
3.2 Uric acid measurement system...........7
3.3 Radio-Frequency (RF) sputtering........8
3.4 Thermal evaporation....................9
3.5 Chemical Vapor Deposition System.......10
3.6 Photolithography.......................13
3.7 Patterned Graphene.....................13
3.8 The performance of patterned graphene..15
3.8.1 Adhesion of Uricase....................15
3.8.2 Adhesion of O2.........................16
3.9 Sample Preparation.....................17
Chapter 4 Results and Discussion.........19
Chapter 5 Conclusion.....................29
REFERENCE......................................30

Chapter 1
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Chapter 2
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Chapter 3
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Chapter 4
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