臺灣博碩士論文加值系統

電阻式磁感應器測量不同磁場會有不同電阻值，可以監測磁場的大小。然而，當距離增加時，磁場將迅速下降，因此感應器對於測量磁場變化的靈敏度是非常重要的。在本論文中，我們提出了一種新方法，嵌入FeNi50顆粒的金字塔微結構PDMS為基底做成高靈敏度磁感應器。組合幾個關鍵因素使得其有高性能的表現。首先，FeNi50奈米顆粒具有非常高的磁化率。第二，微結構PDMS具有低粘彈性和低彈性阻力的獨特特徵。第三，銀奈米線具有導電性優良的特點，能夠隨磁場變化而非常敏感。第四，這種新設計的元件可以在非常低的工作電壓下工作。因此，磁傳感器可以與太陽能電池結合，甚至可以在室內照明下工作，這對於可穿戴式元件的開發非常有用。此外，我們已經證明，我們的磁傳感器可以與發光二極體結合，又因為磁力為非接觸力，所以可以做成非觸控式面板。

Resistive magnetic sensors measure different resistance values at different magnetic fields, in which the magnitude of the magnetic field can be monitored. However, the magnetic field will decline quickly when the distance increases, so that the sensitivity of the sensor for the measurement of the change of magnetic field is greatly desirable. In this thesis, we propose a new approach by the integration of microstructured PDMS embedded with FeNi50 particles and to form a highly sensitive magnetic sensor. Several key factors combined together makes the performance possible. First, FeNi50 nanoparticles possess a very high magnetic susceptibility. Second, the microstructured PDMS has unique features of low viscoelasticity and low elastic resistance. Third, AgNWs have the characteristics of excellent conductivity, enabling to be very sensitive with the change of magnetic field. Fourth, this newly designed device can be operated under a very low operational voltage. Therefore, the magnetic sensor can be integrated with solar cells, and it even can work under room light illumination, which is very useful for the development of wearable devices. In addition, we have demonstrated that our magnetic sensor can be integrated with light emitting diodes and can be used to create touchless panel.

摘要 ......................................................................................................................... i
Abstract ................................................................................................................. ii
List of Figures ........................................................................................................ v
List of Tables ........................................................................................................ vii
Chapter 1 Introduction ......................................................................................... 1
Reference ...................................................................................................................... 5
Chapter 2 Theoretical background ....................................................................... 7
2.1 Mechanism of pressure sensor ................................................................................ 7
2.1.1 Piezoresistivity ......................................................................................................... 7
2.1.2 Capacitance .............................................................................................................. 8
2.1.3 Pizoelectricity ........................................................................................................ 10
2.2 Critical parameters of pressure sensor ................................................................. 11
Reference .................................................................................................................... 14
Chapter 3 Experimental details and Materials ................................................... 15
3.1 Material ................................................................................................................ 15
3.1.1 Polydimethylsiloxane (PDMS) .............................................................................. 15
3.1.2 FeNi50 ................................................................................................................... 16
3.1.3 Silver nanowire (AgNWs) ..................................................................................... 17
3.2 Experimental setups ............................................................................................. 19
3.2.1 Oxygen Plasma Cleaner ......................................................................................... 19
3.2.2 Spray coating ......................................................................................................... 20
3.3 Sample preparation .............................................................................................. 20
3.3.1 Pyramid mold ......................................................................................................... 20
3.3.2 High sensitive magnetic sensor .............................................................................. 21
Reference .................................................................................................................... 25
Chapter 4 Experiment results and Discussion .................................................... 26
4.1 Characterization of sensor performance .............................................................. 26
4.1.1 Sensitivity of magnetic sensor ............................................................................... 26
4.1.2 Stability and durability .......................................................................................... 28
4.1.3 Response and relaxation time ................................................................................ 30
4.1.4 Bending performance of the device ....................................................................... 32
4.2 Demonstration of magnetic sensor ........................................................................ 34
4.2.1 Integration with solar cell ...................................................................................... 34
iv
4.2.2 Integration with LED ............................................................................................. 36
4.2.3 touchless panel ....................................................................................................... 37
Reference .................................................................................................................... 40
Chapter 5 Summary and Future work ................................................................ 41

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