臺灣博碩士論文加值系統

本文中提出了一種具備奈米環狀諧振器的「金屬-絕緣體-金屬」（Metal-insulator-metal, MIM）電漿波導的新型光學波長解多工器。將其傳輸特性採用有限元素法（Finite element method, FEM）進行數值模擬研究，並透過理論計算環狀諧振器的特徵波長。針對本文所提出的結構，研究發現環狀諧振器的兩個不同高階模式諧振透射率峰值的比率，分別係接近1310nm及1550nm兩個通訊波長比例。因此，透過改變環狀諧振器中材料折射率及其結構的相關幾何參數，即可容易調整解多工器的相關諧振波長。研究顯示，模擬結果與環狀諧振器的諧振理論結果非常吻合，亦即本文所提出的環狀結構將可在高度整合的電漿元件裝置中具有顯著性的應用發展潛力。

In this paper, we propose a novel wavelength demultiplexer based on metal-insulator-metal plasmonic waveguides with a nanoscale ring resonator. Its transmission characteristics are numerically studied using finite element method (FEM) simulations, and the eigenwavelengths of the ring resonator are theoretically calculated. For the proposed structure, we found that the ratio of the orders of resonant transmittance peaks for two different high-order modes of the ring resonator is close to the ratio of the two communication wavelengths 1310 and 1550 nm. These resonance wavelengths of the demultiplexer are effortlessly tuned by varying the refractive index of the material in the ring resonator and the geometrical parameters of the structure. The results simulated by FEM agree well with those from the resonant theory of the ring resonator. The presented structures will have significant potential applications in highly integrated plasmonic devices.

誌謝…………………………………………………………………………………………ⅰ
摘要…………………………………………………………………………………………ii
Abstract……………………………………………………………………………………iii
目錄…………………………………………………………………………………………ⅳ
圖目錄………………………………………………………………………………………vi
表目錄………………………………………………………………………………………x
符號說明……………………………………………………………………………………xi
第一章 緒論………………………………………………………………………………1
1.1 前言…………………………………………………………………………………1
1.2 研究目的……………………………………………………………………………3
1.3 論文內容……………………………………………………………………………4
第二章 文獻探討…………………………………………………………………………5
2.1 積體光學簡介………………………………………………………………………5
2.2 電磁波方程式………………………………………………………………………7
2.3 表面電漿子介紹……………………………………………………………………9
2.4 表面電漿子共振模態………………………………………………………………15
2.5 杜德模型（Drude''s model）…………………………………………………………18
2.6 表面電漿子波導元件與裝置……………………………………………………21
2.7 「金屬-絕緣體-金屬」（Metal-insulator-metal, MIM）波導結構…………………22
2.8 各種光學波長解多工器之設計…………………………………………………28
2.9 表面電漿子技術於生物感測之應用………………………………………………34
第三章 光學波長解多工器與數值模擬…………………………………………………35
3.1數值分析與有限元素方法模擬…………………………………………………35
3.1.1建立模型……………………………………………………………………38
3.1.2指定邊界條件………………………………………………………………39
3.1.3指定圓盤與波導之折射率…………………………………………………40
3.1.4建立有限元素法之網格……………………………………………………41
3.1.5執行1550 nm波長之入射光磁場路徑軌跡………………………………42
3.1.6執行1310 nm波長之入射光磁場路徑軌跡………………………………43
3.2具帶通濾波器之環狀諧振器傳輸特性…………………………………………44
3.3三分支光學波長解多工器設計…………………………………………………48
3.4光學波長解多工器之元件特性…………………………………………………51
第四章 結果與討論………………………………………………………………………52
4.1 共振波長與光學波長解多工器之分析……………………………………………52
4.2 研究結構之消光比與插入損失…………………………………………………63
4.3光學波長解多工器結構設計與頻譜關係之分析………………………………66
4.4製程忍受度分析…………………………………………………………………68
第五章 結論與建議………………………………………………………………………72
5.1結論…………………………………………………………………………………72
5.2建議…………………………………………………………………………………72
參考文獻……………………………………………………………………………………73

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