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研究生:陳敬傑
研究生(外文):Jing-Jie Chen
論文名稱:斜波紋微流道混合器的開發與其在濃度產生器上之應用
論文名稱(外文):Development of a skew corrugated microfluidic mixer and its application on concentration generator
指導教授:許聿翔
指導教授(外文):Yu-Hsiang Hsu
口試日期:2017-07-24
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:應用力學研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2017
畢業學年度:105
語文別:中文
論文頁數:114
中文關鍵詞:微機電製程晶片實驗室生物晶片塑膠製程熱壓成型微流體混合有限元素模擬
外文關鍵詞:micro-electromechanical system(MEMS)Lab-on-a-chipplastic processhot embossingmicrofluidic mixingfnite element simulation
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在本研究中,提出一創新且具有效率的微流體混合器,並開發一套快速熱翻印製成來製作微流道。利用改變流道的幾何結構,加上微流體的流體特性來設計混合器,透過此混合器來達到快速混合的目標,以達到濃度稀釋、樣本的比例調配等功能。本研究所開發的被動式混合器是在流道內設計斜坡紋檔塊,將斜波紋檔塊置於流道的底部,透過這樣的設計能夠擠壓流體並增加流體的橫向擾動和垂直向擾動,進而提升混合效能,此設計的優勢在於不需外接管路及龐大的驅動來源以進行試劑的混合,且只需進行一次翻模製程,製程簡單且不需進行對位,最後此設計只需要單一驅動幫浦,即可達到微流體的濃度控制功能。為了確認設計的微流道混合結構具有足夠的混合效率,本研究採用有限元素模擬軟體,來模擬微流體在此設計的混合結構是否能高效率的混合,並提出一套系統化的設計和模擬驗證。本研究也提出一套快速熱壓印的製程方式,利用此製程可以快速翻印超薄型微流道,整體微流道晶片流道厚度可到達100微米以下,此可運用在微流體生物晶片上面,結合它低成本和大量製造,且無需外接多餘管線等優勢,能成為微流體生物晶片中的混合單元,以推向市場化形成產業的助力。
In this paper, we present our study on a new type of passive micromixer based on a skew corrugated configuration. Periodic geometrical barriers like washboard were built inside a microfluidic channel that alters the flow patterns transversely and vertically. The advantages of this type of mixer is its mixing barriers are at the bottom of the microfluidic channel, and it does not need a complex 2-D or 3-D configurations to perform mixing process. This micromixer can easily be fabricated by one step SU-8 photolithographic process and one molding process. Solutions to be squeezed vertically and laterally while encounter the periodic barriers. Thus, the laminar flow pattern is distorted to create mixing process. To study the mixing mechanism of the skew corrugated micromixer, we studied 4 different design parameters to optimize the mixing efficiency. Finite element simulation was conducted to study the mixing pattern and efficiency. This study also proposes a rapid hot embossing process that allows rapid reprinting of thin-film microfluidic device, which can reach 100 microns thickness. The developed technology could enable the feasibility to use the presented micromixer and thin-film plastic chip for commercialization.
致謝 i
中文摘要 ii
Abstract iii
目錄 iv
圖目錄 viii
表目錄 xii
Chapter 1 緒論 1
1.1 前言 1
1.1.1 微晶片實驗室(Lab-on-a-chip) …1
1.1.2 微製程技術(MEMS)微流體系統(Microfluidics system) 2
1.1.3 微流道混合技術(Microfluidics mixing) ………..4
1.2 研究動機與目的 5
1.3 論文架構 5
Chapter 2 微流體混合技術 7
2.1 微流體混合 7
2.1.1 擴散過程及渾沌流場 7
2.2 主動式微流道混合器 8
2.2.1 壓力驅動的主動式混合器 9
2.2.2 磁力攪拌裝置的主動式混合器 12
2.2.3 介電力干擾的主動式混合器 12
2.2.4 Zeta電位的主動式混合器 13
2.2.5 磁力擾動的主動式混合器 14
2.2.6 聲流擾動的主動式混合器 16
2.3 被動式微流道混合器 20
2.3.1 叉型流道 20
2.3.2 多入口端設計 21
2.3.3 雙層結構上下混合 22
2.3.4 圓陣列障礙物設計 23
2.3.5 三維結構混合器設計 24
2.2.6 C 型結構混合器之討論 25
2.2.7 鲱骨式混合器 27
Chapter 3 實驗微流道混合器設計 30
3.1 斜波紋微流道混合器的設計理念 30
3.2 斜波紋微流道混合器的設計結構 32
3.3 微流道混合器結構參數對混合的影響 35
Chapter 4 微流道的製程 40
4.1 微流道混合器製程 40
4.2 微流道混合器晶圓的製作 41
4.2.1 底片式光罩繪製及製作 41
4.2.2 黃光微影製程 42
4.3 微流道混合器的製作 49
4.3.1 PDMS微流道混合器的製作方式 49
4.3.2 PDMS微流道混合器的測量 50
4.3.3 微流道量測的結果 51
4.3.4 接合技術 54
Chapter 5 熱壓成型 55
5.1 熱壓成型的基本原理 55
5.2 熱壓成型的材料 55
5.2.1 熱塑性聚合物 56
5.2.2 實驗材料的選用 57
5.3 熱壓模具的設計 57
5.4 熱壓製程 58
5.4.1 熱壓系統的架設 59
5.5 熱壓實驗的參數與結果 60
Chapter 6 實驗模擬 63
6.1 COMSOL Muitiphysics 63
6.1.1 COMSOL Muitiphysics 特點 63
6.2 實驗模擬選用的模組 64
6.3 實驗混合器模擬的步驟 65
Chapter 7 模擬和實驗結果分析與討論 69
7.1 斜波紋微流道混合器模擬結果的討論 69
7.1.1 斜波紋檔塊角度對混合的影響 70
7.1.2 斜波紋檔塊長度對混合的影響 73
7.1.3 斜波紋檔塊間隙對混合的影響 76
7.1.4 斜波紋檔塊寬度對混合的影響 78
7.2 斜波紋微流道混合器實驗結果的討論 81
7.2.1 實驗架設 81
7.2.2 斜波紋微流道混合實驗 82
7.2.3 混合實驗結果量化分析 86
7.2.4 混合實驗結果分析與討論 87
Chapter 8 結論與未來展望 100
8.1 結論 100
8.2 未來展望 100

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