臺灣博碩士論文加值系統

本研究利用射頻磁控共濺鍍系統(RF magnetron co-sputtering system) 在矽基板上沉積不同沉積速率之銀薄膜以及在固定沉積速率下沉積不同厚度之銀薄膜，並使用快速熱退火爐在氮氣環境下1分鐘熱處理溫度500℃使其薄膜提升粗糙度，再經由電漿增強化學氣相沉積系統(Plasma-Enhanced Chemical Vapor Deposition；PECVD)沉積以四甲基矽烷為源材料製備有機矽基疏水薄膜(~100nm)。進一步探討其薄膜對水滴角之影響找尋最佳化水滴角參數，並以紫外光-可見光光譜儀(UV-Vis Spectrum)、場發射掃描式電子顯微鏡(FE-SEM)、原子力顯微鏡(AFM)等儀器進行量測及分析薄膜材料特性，最後再以電漿四氟化碳(CF4)乾式蝕刻方式對表面進行改質，來提升表面疏油之效果，以達到同時具備疏水-疏油薄膜之特性，能抗油汙、自清潔效果等效果。
研究結果顯示，銀薄膜熱退火前沉積於矽基板上之表面形貌為顆粒狀結構，退火後因銀的團聚特性，表面形成奈米銀粒子使其增加粗糙度。隨著銀薄膜的厚度增加，奈米銀粒子的大小也會隨之增加。有機矽基疏水薄膜其水滴接觸角約100°，當有奈米銀粒子之粗糙結構沉積有機矽基薄膜後，其最大水滴接觸角可達128°，但以上兩者皆為親油特性。根據Wenzel’s equation 表面粗糙度對疏水特性是有所影響的，但研究結果發現並不是粗糙值越大，疏水效果就一定越好。最佳化銀/有機矽基薄膜經電漿四氟化碳(CF4)乾式蝕刻後，因表面被氟化而改變了原有的表面特性，使薄膜對油滴具有排斥效果，最佳油滴接觸角約61°，且經表面氟化後對水滴的疏水效果又更優化，使其最佳水滴接觸角約138°。

In this study, the silver films have been prepared on Si substrates by different deposition rate and thickness. Both of them have used of high-temperature furnace for subsequent heat treatment at 500℃ in nitrogen ambient, and then deposition of Organosilicon film on them. In order to achieve the hydrophobic-oleophobic property. Finally, the bilayer films have used plasma (CF4) etching treatment on surface.
The nanoparticle size of the silver films after annealing is larger by thickening, and the roughness is getting rough. The single Organosilicon film compared to bilayer films, and the water contact angle is higher than single Organosilicon film that the best angle is 128°.The hexadecane contact angle both of them are Non-oleophobic property. But not the best rough will have the best hydrophobic property. According to the literature can be found that the height is as important as the roughness. The surface of bilayer films found fluorination after the plasma (CF4) etching treatment. Fluorination changes the surface properties so that the film has an oleophobic effect on the hexadecane solution, and the best hexadecane contact angle and water contact angle are 61° and 138°.

摘要---------------------------------------------------i
Abstract----------------------------------------------ii
誌謝--------------------------------------------------iii
目錄--------------------------------------------------iv
表目錄------------------------------------------------vi
圖目錄------------------------------------------------vii
第一章 緒論---------------------------------------------1
1.1前言-------------------------------------------------1
1.2 文獻回顧--------------------------------------------1
1.3 研究動機--------------------------------------------2
第二章 理論基礎------------------------------------------5
2.1電漿成分及原理----------------------------------------5
2.2化學氣相沉積薄膜之成長機制-----------------------------6
2.3化學氣相沉積法之種類----------------------------------6
2.4薄膜成長原理------------------------------------------7
2.5射頻磁控濺鍍原理--------------------------------------8
2.6濕潤性原理-------------------------------------------8
第三章 實驗方法及步驟------------------------------------15
3.1實驗流程---------------------------------------------15
3.2實驗系統---------------------------------------------15
3.2.1電漿增強化學氣相沉積系統----------------------------15
3.2.2共濺鍍系統-----------------------------------------16
3.2.3熱退火系統-----------------------------------------17
3.3薄膜量測分析-----------------------------------------17
3.3.1原子力顯微鏡(Atomic force microscope；AFM)---------17
3.3.2場發射掃描式電子顯微鏡（Field Emission-Scanning Electron Microscope；FE-SEM）--------------------------17
3.3.3 α-step表面輪廓儀----------------------------------18
3.3.4 紫外光-可見光光譜儀（UV-Vis Spectrum）-------------18
3.3.5 傅立葉轉換紅外線吸收光光譜儀(Fourier transform infrared spectroscopy；FTIR)---------------------------18
3.3.6 X光光電子能譜儀 ( X-ray Photoelectron Spectroscopy；XPS )--------------------------------------------------18
3.3.7 接觸角量測儀--------------------------------------19
第四章 結果與討論---------------------------------------25
4.1銀薄膜製作與特性分析----------------------------------25
4.1.1不同沉積速率之的銀薄膜熱退火後的奈米銀粒子特性分析----25
4.1.2不同沉積時間之銀薄膜熱退火後的奈米銀粒子特性分析------26
4.2有機矽基薄膜沉積於奈米銀粒子薄膜表面之製作與特性分析-----28
4.2.1有機矽基薄膜沉積於不同沉積速率奈米銀粒子薄膜表面之製作與分析---------------------------------------------------28
4.2.2 有機矽基薄膜沉積於不同沉積時間奈米銀粒子薄膜表面之製作與分析---------------------------------------------------30
4.3表面改質銀/有機矽基薄膜結構製作與特性分析--------------32
4.3.1表面氟化改質銀/有機矽基薄膜疏水-疏油表面特性分析------32
4.3.2表面氟化改質銀/有機矽基薄膜疏水-疏油材料特性分析------33
第五章 結論與未來工作------------------------------------63
參考文獻------------------------------------------------66
Extended Abstract--------------------------------------70
簡歷(CV)-----------------------------------------------75

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