臺灣博碩士論文加值系統

　　本研究建立一套完整的偏振散射光量測系統，可對待測物進行二維和三維的散射光量測，此系統可分為三大部分:光源組件、旋轉控制機構與偵測組件，其中光源組件採用之雷射波長為405 nm, 515 nm, 671 nm搭配光圈、濾波鏡、λ /2 波板、偏振鏡、空間濾波器、擴束器進行偏振光源控制，旋轉控制機構運用四個旋轉步進馬達來控制入射光與接收端的角度，偵測組件為電荷偶合元件搭配35 mm物鏡與偏振鏡，藉由轉動偏振鏡來偵測不同偏振角度的散射光成像。為了驗證本系統的可行性，本研究選用三種待測物，分別為表面粗糙度標準片、木材和公制螺紋，其中表面粗糙度值為Ra = 1.6 μm、Ra = 0.8 μm、Ra = 0.4 μm、Ra = 0.1 μm，木材為南方松、杉木、白楊木，螺紋為公制M3和M6。經由實驗結果可知，三維偏振散射光可用來區分待測物的特徵和材質，對於未來自動光學檢測系統的發展有相當大的助益。

In this study, polarization scattering light measurement system is established. The characterization of surface measurement is investigated by using in-plane and out-of-plane polarized light-scattering measurements. This system is divided into the light source assembly, rotation control mechanism and detection component. The laser wavelengths of measurtment system are 405 nm, 515 nm and 671 nm. In order to adjust the polarized light sources, the light beam goes through the pinhole, waveplane, polarizer, space filter, and beam expander. The rotation control mechanism applies four stepper motors to control the incident angle and detection angle. The detection component is a charge couple device (CCD) camera. The polarizer and 35 mm focusing lens are set up in front of the CCD. The angle of polarizer is rotated to control the direction of polarization of the scattered light. This experiment conducts the measurements by using standard sheets of metal surface roughness, woods and ISO metric screws. The roughnesses are Ra = 1.6 μm , Ra = 0.8 μm , Ra = 0.4 μm and Ra = 0.1 μm , respectively. The woods are pine, spruce and aspen. The metric screws are ISO M6 and ISO M3. This measurement system can be used to quickly and accurately distinguish between different surfaces and properties. In the future, there is a considerable benefit at the development of automatic optical detection system.

目錄
中文摘要 I
英文摘要 II
誌謝 III
目錄 V
圖目錄 VIII
表目錄 XX
符號說明 XXI
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 3
1.2.1 散射光 3
1.2.2 光學量測技術 4
1.3 研究動機與目的 9
1.4 本文架構 10
第二章 光學理論 11
2.1 前言 11
2.2 偏振光 12
2.2.1 偏振現象 12
2.2.2 偏振理論 13
2.2.3 偏振種類 14
2.2.4 偏振影像 16
2.3 散射 18
2.3.5 散射理論 18
2.3.6 散射現象 19
2.4 雙向反射分佈函數 21
第三章 偏振散射光量測系統 22
3.1 研究方法 22
3.2 散射光量測系統架構 24
3.2.1 光源組件 26
3.2.2 控制機構 27
3.2.3 偵測組件 28
第四章 偏振散射光量測實驗 29
4.1 實驗流程 29
4.2 硬體參數設定 30
4.2.1 光源組件設定 30
4.2.2 控制機構設定 32
4.2.3 偵測組件設定 33
4.3 軟體參數設定 35
4.3.4 二維步進馬達控制介面 35
4.3.5 三維步進馬達控制介面 36
4.3.6 CCD影像擷取介面 38
4.3.7 偏振成像分析介面 39
4.4 偏振散射光量測 40
4.4.8 系統驗證 40
4.5 偏振散射光二維量測與分析 48
4.6 偏振散射光三維量測與分析 150
第五章 結論與未來展望 228
參考文獻 231

圖目錄
圖2.1線偏振器[70] 12
圖2.2光的磁場與電場方向[70] 14
圖2.3偏振狀態示意圖(a)線偏振(b)圓偏振(c)橢圓偏振[70] 15
圖2.4色素痣皮膚成像(a)正常光源成像(b)偏振成像[60] 17
圖2.5散射示意圖 19
圖2.6雙向反射分佈函數示意圖 21
圖3.1研究步驟 23
圖3.2散射光量測系統示意圖 25
圖3.3光源組件 26
圖3.4控制機構示意圖 27
圖3.5偵測組件 28
圖4.1系統設定示意圖 30
圖4.2光源組配置圖 31
圖4.3偵測組件配置圖 34
圖4.4偏振散射光系統圖 34
圖4.5二維步進馬達控制介面 35
圖4.6三維散射光座標 36
圖4.7三維步進馬達控制介面 37
圖4.8影像擷取介面 38
圖4.9程式語言分析介面 39
圖4.10矽晶圓水平偏振(PP)成像 41
圖4.11矽晶圓垂直偏振(PS)成像 42
圖4.12矽晶圓45°偏振(P45)成像 43
圖4.13矽晶圓POL成像 44
圖4.14偏振成像光強度分析(a)水平與垂直偏振強度正規化(b)橢圓偏振參數分析(c)線偏振光強度分析 47
圖4.15表面粗糙度標準試片(a)Ra = 1.6 μm(b)Ra = 0.8 μm(c)Ra = 0.4 μm(d)Ra = 0.1 μm 48
圖4.16在入射光波長671 nm下的Ra = 1.6標準試片之PP成像 49
圖4.17在入射光波長671 nm下的Ra = 1.6標準試片之PS成像 50
圖4.18在入射光波長671 nm下的Ra = 1.6標準試片之POL圖 51
圖4.19偏振參數隨入射角度變化之關係圖，Ra = 1.6(a) PP、PS正規化(b) POL正規化 52
圖4.20在入射光波長671 nm下的Ra = 0.8標準試片之PP成像 53
圖4.21在入射光波長671 nm下的Ra = 0.8標準試片之PS成像 54
圖4.22在入射光波長671 nm下的Ra = 0.8標準試片之POL圖 55
圖4.23偏振參數隨入射角度變化之關係圖，Ra = 0.8(a) PP、PS正規化(b) POL正規化 56
圖4.24在入射光波長671 nm下的Ra = 0.4標準試片之PP成像 57
圖4.25在入射光波長671 nm下的Ra = 0.4標準試片之PS成像 58
圖4.26在入射光波長671 nm下的Ra = 0.4標準試片之POL圖 59
圖4.27偏振參數隨入射角度變化之關係圖，Ra = 0.4(a) PP、PS正規化(b) POL正規化 60
圖4.28在入射光波長671 nm下的Ra = 0.1標準試片之PP成像 61
圖4.29在入射光波長671 nm下的Ra = 0.1標準試片之PS成像 62
圖4.30在入射光波長671 nm下的Ra = 0.1標準試片之POL圖 63
圖4.31偏振參數隨入射角度變化之關係圖，Ra = 0.1(a) PP、PS正規化(b) POL正規化 64
圖4.32在入射光波長515 nm下的Ra = 1.6標準試片之PP成像 65
圖4.33在入射光波長515 nm下的Ra = 1.6標準試片之PS成像 66
圖4.34在入射光波長515 nm下的Ra = 1.6標準試之片POL圖 67
圖4.35偏振參數隨入射角度變化之關係圖，Ra = 1.6(a) PP、PS正規化(b) POL正規化 68
圖4.36在入射光波長515 nm下的Ra = 0.8標準試片之PP成像 69
圖4.37在入射光波長515 nm下的Ra = 0.8標準試片之PS成像 70
圖4.38在入射光波長515 nm下的Ra = 0.8標準試片之POL圖 71
圖4.39偏振參數隨入射角度變化之關係圖，Ra = 0.8(a) PP、PS正規化(b) POL正規化 72
圖4.40在入射光波長515 nm下的Ra = 0.4標準試片之PP成像 73
圖4.41在入射光波長515 nm下的Ra = 0.4標準試片之PS成像 74
圖4.42在入射光波長515 nm下的Ra = 0.4標準試片之POL圖 75
圖4.43偏振參數隨入射角度變化之關係圖，Ra = 0.4(a) PP、PS正規化(b) POL正規化 76
圖4.44在入射光波長515 nm下的Ra = 0.1標準試片之PP成像 77
圖4.45在入射光波長515 nm下的Ra = 0.1標準試片之PS成像 78
圖4.46在入射光波長515 nm下的Ra = 0.1標準試片之POL圖 79
圖4.47偏振參數隨入射角度變化之關係圖，Ra = 0.1(a) PP、PS正規化(b) POL正規化 80
圖4.48在入射光波長515 nm下的Ra = 1.6標準試片之PP成像 81
圖4.49在入射光波長515 nm下的Ra = 1.6標準試片之PS成像 82
圖4.50在入射光波長405 nm下的Ra = 1.6標準試片之POL圖 83
圖4.51偏振參數隨入射角度變化之關係圖，Ra = 1.6(a) PP、PS正規化(b) POL正規化 84
圖4.52在入射光波長405 nm下的Ra = 0.8標準試片之PP成像 85
圖4.53 Ra = 0.8、Ra = 0.4、Ra = 0.1的垂直偏振散射光成像 86
圖4.54在入射光波長405 nm下的Ra = 0.8標準試片之POL圖 87
圖4.55偏振參數隨入射角度變化之關係圖，Ra = 0.8(a) PP、PS正規化(b) POL正規化 88
圖4.56在入射光波長405 nm下的Ra = 0.4標準試片之PP成像 89
圖4.57在入射光波長405 nm下的Ra = 0.4標準試片之POL圖 90
圖4.58偏振參數隨入射角度變化之關係圖，Ra = 0.4(a) PP、PS正規化(b) POL正規化 91
圖4.59在入射光波長405 nm下的Ra = 0.1標準試片之PP成像 92
圖4.60在入射光波長405 nm下的Ra = 0.1標準試片之POL圖 93
圖4.61偏振參數隨入射角度變化之關係圖，Ra = 0.1(a) PP、PS正規化(b) POL正規化 94
圖4.62 PP、PS正規化偏振參數隨入射角度變化之關係圖(a)光波長671 nm(b)光波長515 nm(c)光波長405 nm 96
圖4.63 POL正規化偏振參數隨入射角度變化之關係圖(a)光波長671 nm(b)光波長515 nm(c)光波長405 nm 97
圖4.64木材樣品(南方松、杉木、白楊木) 99
圖4.65在入射光波長671 nm下的南方松之PP成像 100
圖4.66在入射光波長671 nm下的南方松之PS成像 101
圖4.67在入射光波長671 nm下的南方松之POL圖 102
圖4.68偏振參數隨入射角度變化之關係圖，南方松(a) PP、PS正規化(b) POL 103
圖4.69在入射光波長671 nm下的杉木之PP成像 104
圖4.70在入射光波長671 nm下的杉木之PS成像 105
圖4.71在入射光波長671 nm下的杉木之POL圖 106
圖4.72偏振參數隨入射角度變化之關係圖，杉木(a) PP、PS正規化(b) POL 107
圖4.73在入射光波長671 nm下的白楊木之PP成像 108
圖4.74在入射光波長671 nm下的白楊木之PS成像 109
圖4.75在入射光波長671 nm下的白楊木之POL圖 110
圖4.76偏振參數隨入射角度變化之關係圖，白楊木(a) PP、PS正規化(b) POL 111
圖4.77在入射光波長515 nm下的南方松之PP成像 112
圖4.78在入射光波長515 nm下的南方松之PS成像 113
圖4.79在入射光波長515 nm下的南方松之POL圖 114
圖4.80偏振參數隨入射角度變化之關係圖，南方松(a) PP、PS正規化(b) POL 115
圖4.81在入射光波長515 nm下的杉木之PP成像 116
圖4.82在入射光波長515 nm下的杉木之PS成像 117
圖4.83在入射光波長515 nm下的杉木之POL圖 118
圖4.84偏振參數隨入射角度變化之關係圖，杉木(a) PP、PS正規化(b) POL 119
圖4.85在入射光波長515 nm下的白楊木之PP成像 120
圖4.86在入射光波長515 nm下的白楊木之PS成像 121
圖4.87在入射光波長515 nm下的白楊木之POL圖 122
圖4.88偏振參數隨入射角度變化之關係圖，白楊木(a) PP、PS正規化(b) POL 123
圖4.89在入射光波長405 nm下的南方松之PP成像 124
圖4.90在入射光波長405 nm下的南方松之PS成像 125
圖4.91在入射光波長405 nm下的南方松之POL圖 126
圖4.92偏振參數隨入射角度變化之關係圖，南方松(a) PP、PS正規化(b) POL 127
圖4.93在入射光波長405 nm下的杉木之POL圖 130
圖4.94偏振參數隨入射角度變化之關係圖，杉木(a) PP、PS正規化(b) POL 131
圖4.95在入射光波長405 nm下的白楊木之PP成像 132
圖4.96在入射光波長405 nm下的白楊木之PS成像 133
圖4.97在入射光波長405 nm下的白楊木之POL圖 134
圖4.98偏振參數隨入射角度變化之關係圖，白楊木(a) PP、PS正規化(b) POL 135
圖4.99 PP、PS正規化偏振參數隨入射角度變化之關係圖(a)光波長671 nm(b)光波長515 nm(c)光波長405 nm 137
圖4.100 POL正規化偏振參數隨入射角度變化之關係圖 (a)光波長為671 nm(b)光波長為515 nm(c)光波長為405 nm 138
圖4.101 ISO公制螺紋 139
圖4.102在入射光波長515 nm下的M6螺紋之PP成像 140
圖4.103在入射光波長515 nm下的M6螺紋之PS成像 141
圖4.104在入射光波長515 nm下的M6螺紋之POL圖 142
圖4.105偏振參數隨入射角度變化之關係圖，M6螺紋(a) PP、PS正規化(b) POL 143
圖4.106在入射光波長515 nm下的M3螺紋之PP成像 144
圖4.107在入射光波長515 nm下的M3螺紋之PS成像 145
圖4.108在入射光波長515 nm下的M3螺紋之POL圖 146
圖4.109偏振參數隨入射角度變化之關係圖，M3螺紋(a) PP、PS正規化(b) POL 147
圖4.110 M6、M3之PP和PS正規化偏振參數隨入射角度變化之關係圖 149
圖4.111 M6、M3之POL正規化偏振參數隨入射角度變化之關係圖 149
圖4.112 Ra = 1.6散射光成像(a)PP(b)PS(c)P45(d)POL圖 152
圖4.113在入射光波長671 nm下的Ra = 1.6數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 153
圖4.114 Ra = 0.8散射光成像(a)PP(b)PS(c)P45(d)POL圖 155
圖4.115在入射光波長671 nm下的Ra = 0.8數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 156
圖4.116 Ra = 0.4散射光成像(a)PP(b)PS(c)P45(d)POL圖 158
圖4.117在入射光波長671 nm下的Ra = 0.4數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 159
圖4.118 Ra = 0.1散射光成像(a)PP(b)PS(c)P45(d)POL圖 161
圖4.119在入射光波長671 nm下的Ra = 0.1數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 162
圖4.120 Ra = 1.6散射光成像(a)PP(b)PS(c)P45(d)POL圖 164
圖4.121在入射光波長515 nm下的Ra = 1.6數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 165
圖4.122 Ra = 0.8散射光成像(a)PP(b)PS(c)P45(d)POL圖 167
圖4.123在入射光波長515 nm下的Ra = 0.8數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 168
圖4.124 Ra = 0.4散射光成像(a)PP(b)PS(c)P45(d)POL圖 170
圖4.125在入射光波長515 nm下的Ra = 0.4數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 171
圖4.126 Ra = 0.1散射光成像(a)PP(b)PS(c)P45(d)POL圖 173
圖4.127在入射光波長515 nm下的Ra = 0.1數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 174
圖4.128 Ra = 1.6散射光成像(a)PP(b)PS(c)P45(d)POL圖 176
圖4.129在入射光波長405 nm下的Ra = 1.6數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 177
圖4.130 Ra = 0.8散射光成像(a)PP(b)PS(c)P45(d)POL圖 179
圖4.131在入射光波長405 nm下的Ra = 0.8數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 180
圖4.132 Ra = 0.4散射光成像(a)PP(b)PS(c)P45(d)POL圖 182
圖4.133在入射光波長405 nm下的Ra = 0.4數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 183
圖4.134 Ra = 0.1散射光成像(a)PP(b)PS(c)P45(d)POL圖 185
圖4.135在入射光波長405 nm下的Ra = 0.1數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 186
圖4.136不同表面粗糙度標準試片的雙軸向橢圓偏振參數變化(a)光波長671 nm(b)光波長515 nm(c)光波長405 nm 188
圖4.137不同表面粗糙度標準試片的線偏振強度變化(a)光波長671 nm(b)光波長515 nm(c)光波長405 nm 189
圖4.138南方松散射光成像(a)PP(b)PS(c)P45(d)POL圖 191
圖4.139在入射光波長670 nm的南方松數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 192
圖4.140杉木散射光成像(a)PP(b)PS(c)P45(d)POL圖 194
圖4.141在入射光波長670 nm的杉木數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 195
圖4.142白楊木散射光成像(a)PP(b)PS(c)P45(d)POL圖 197
圖4.143在入射光波長670 nm的白楊木數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 198
圖4.144南方松散射光成像(a)PP(b)PS(c)P45(d)POL圖 200
圖4.145在入射光波長515 nm下的南方松數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 201
圖4.146杉木0°~155°散射成像(a)PP(b)PS(c)P45(d)POL圖 203
圖4.147在入射光波長515 nm下的杉木數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 204
圖4.148白楊木0°~155°散射成像(a)PP(b)PS(c)P45(d)POL圖 206
圖4.149在入射光波長515 nm下的白楊木數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 207
圖4.150南方松散射光成像(a)PP(b)PS(c)P45(d)POL圖 209
圖4.151在入射光波長405 nm下的南方松數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 210
圖4.152杉木散射光成像(a)PP(b)PS(c)P45(d)POL圖 212
圖4.153在入射光波長405 nm下的杉木數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 213
圖4.154白楊木散射光成像(a)PP(b)PS(c)P45(d)POL圖 215
圖4.155在入射光波長405 nm下的白楊木數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 216
圖4.156不同波長下的雙軸向橢圓偏振參數(a)光波長671 nm(b)光波長515 nm(c)光波長405 nm 218
圖4.157不同波長下的線偏振光強度(a)光波長671 nm(b)光波長515 nm(c)光波長405 nm 219
圖4.158 M6螺紋0°~155°散射成像(a)PP(b)PS(c)P45(d)POL圖 221
圖4.159在入射光波長515 nm下的M6螺紋數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 222
圖4.160 M3螺紋散射光成像(a)PP(b)PS(c)P45(d)POL圖 224
圖4.161在入射光波長515 nm下的M3螺紋數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 225
圖4.162在入射光波長515 nm下的M6與M3數值分析曲線圖(a) η雙軸向橢圓偏振參數值(b) PL線偏振光強度 227

表目錄
表3.1散射光量測系統組件表 25
表4.1雷射光規格表 31
表4.2五相步進電機規格表 32
表4.3電荷耦合元件(CCD)規格表 33
表4.4木材規格 99

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