臺灣博碩士論文加值系統

本研究係利用陰極電弧沉積(Cathodic arc deposition,CAD)系統，分別沉積TiN、TiSiN及TiN/TiSiN三種形式的薄膜於SUS304及SUS430不銹鋼上，接著鍍膜之試片進行後熱處理700℃-1h，並分析鍍膜結構及特性例如：磨耗試驗、沖蝕試驗、浸蝕試驗及鹽霧試驗，以及進行比較後熱處理對披覆膜層之SUS304及SUS430不銹鋼耐磨耗性、耐沖蝕性及耐蝕性的影響。
實驗結果顯示， TiN/TiSiN多層膜有緻密的多層結構、良好的附著性、高彈性模數和高硬度(44GPa)， 其代表多層膜能有效改善SUS304及SUS430不銹鋼之耐磨耗性、耐沖蝕性及耐時性，尤其是TiN/TiSiN多層膜披覆在SUS304不銹鋼上相較於其他鍍膜試片擁有最低之摩擦係數(0.38)。

In this study, the three coating types, TiN, TiSiN, and TiN/TiSiN were separately deposited on SUS 304 and SUS 430 stainless steel substrates by cathodic arc deposition (CAD) system. And then the coated specimens were performed heat treatment at 700 oC for 1 h. Coating structure was analyzed and some functional tests such as ball-on-disc wear tests, erosion tests, immersion tests, and salt spray tests were all conducted for exploring the effects of the post heat treatment on wear resistance, erosion resistance, and corrosion resistance of the coated SUS 304 and SUS 430 stainless steels.
The experimental results showed that the TiN/TiSiN multilayer coating had a dense multilayered structure, well adhesion, high elastic modulus, and high hardness up to 44 GPa. Such the coating could effectively improve the wear resistance, erosion resistance, and corrosion resistance of both SUS 304 and SUS 430 stainless steels. In particular, the TiN/TiSiN multilayer coated on SUS 304 stainless steel had the lowest friction coefficient (0.38) among all the coated specimens.

中文摘要 i
英文摘要 ii
目錄iii
圖目錄vii
表目錄xiii
第一章 前言1
1.1. 研究動機 1
1.2.研究目的2
第二章 文獻回顧3
2.1. 不銹鋼3
2.1.1. 不銹鋼簡介3
2.1.2. 不銹鋼種類3
2.1.3. 不銹鋼之腐蝕行為6
2.1.4. SUS 304不銹鋼7
2.1.5. SUS 430不銹鋼8
2.2. 表面處理8
2.3. 物理氣相沉積9
2.3.1. 物理氣相沉積概述9
2.3.2. 薄膜成長成核理論12
2.3.3. 膜層結構型態14
2.4. 陰極電弧沉積技術16
2.4.1. 起源與原理16
2.4.2. 真空電弧源18
2.4.3. 離子轟擊效應19
2.4.4. 微滴20
2.4.5. 陰極電弧沉積之特性20
2.5. 本研究相關鍍膜21
2.5.1. 中介層簡介21
2.5.2. 氮化鈦21
2.5.3. 氮化鈦矽22
2.5.4. 多層膜23
2.6. 鍍膜附著性檢測23
2.7. 膜層硬度量測24
2.7.1. 維氏硬度量測24
2.7.2. 奈米壓痕硬度量測25
2.8. 膜層耐磨耗性26
2.9. 膜層腐蝕機構29
2.10.鹽霧試驗30
2.12.浸泡試驗31
第三章 實驗方法與步驟32
3.1. 實驗設計與流程32
3.2. 基材準備34
3.3. 鍍膜前處理34
3.4. CAD鍍膜製程34
3.5. 鍍膜後熱處理37
3.6. 鍍膜成份、結構及形貌分析37
3.6.1. XRD結構分析37
3.6.2. EPMA成份分析38
3.6.3. FE-SEM橫截面觀察39
3.6.4. SEM表面形貌分析39
3.6.5. AFM表面形貌分析40
3.6.6. 表面粗糙度分析40
3.7. 鍍膜特性分析42
3.7.1. 附著性檢測42
3.7.2. 奈米壓痕硬度試驗42
3.7.3. 維氏硬度試驗43
3.7.4. 單顆粒沖蝕試驗44
3.7.5. 磨耗試驗44
3.7.6. 浸泡試驗45
3.7.7. 鹽霧試驗46
第四章 結果與討論47
4.1. 鍍膜成份、結構及形貌分析47
4.1.1. XRD膜層結構分析47
4.1.2. EPMA膜層成份分析49
4.1.3. FE-SEM膜層橫截面形貌分析53
4.1.4. SEM膜層表面形貌分析56
4.1.5. AFM膜層表面形貌分析59
4.1.6. 膜層表面粗糙度分析62
4.2. 鍍膜特性分析65
4.2.1. 附著性分析試驗65
4.2.2. 奈米壓痕硬度試驗分析70
4.2.3. 維氏硬度分析試驗73
4.2.4. 單顆粒沖蝕試驗分析76
4.2.5. 磨耗試驗分析79
4.2.6. 浸泡試驗分析84
4.2.7. 鹽霧試驗分析95
第五章 結論99
第六章 參考文獻101

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