臺灣博碩士論文加值系統

本研究使用ANSYS有限元素模擬軟體探討微機電高度計之設計。由於壓阻式壓力計之設計具有製程簡單、可承受壓力範圍大且靈敏度高之優點。提出一新型態壓力感測器靈敏度比傳統設計大54%，經由調變薄膜應力集中區域可得到較佳之元件設計，因此驗證了新型態壓力感測器之元件設計可行性。做為高度計之設計，根據模擬結果可解析到36Pa之壓力變化，此新型高度計設計可解析樓層高度之變化。

This study presents a piezoresistive pressure sensor as altimeter with low pressure application. The sensing range is defined below 100kPa for detecting lower pressure change (about 100Pa) and containing a reference pressure membrane with stress concentration region to increase sensitivity. In application, the altimeter have been designed and implemented by using easy fabrication process.
The simulation results shows the sensitivity of piezoresistive pressure sensor is 0.275mV/kPa (improved 54% than reference design). Moreover, the resolution can achieved 36Pa.

目錄
第一章 緒論 8
1-1 前言 8
1-2 文獻回顧 8
1-2.1 壓力感測機制 9
1-2.2 壓力感測器封裝型式 11
1-3 研究目標 12
第二章 壓阻式壓力計原理 19
2.1 矽的壓阻特性 19
2.2 元件設計 21
第三章 ANSYS有限元素分析 28
3-1 壓阻式壓力計之設計 28
3-2 壓力計製程規劃 29
第四章 模擬結果與分析 35
4-1 模擬結果分析 35
4-2 高度計應用 36
第五章 結論與建議 44
5-1 結論 44
5-2 未來展望與未來工作 44
參考文獻 45


圖目錄

圖 1-1 壓電式壓力感測器結構示意圖………………………………... 15
圖 1-2 電容式壓力計結構剖面示意圖………………………………... 15
圖 1-3 壓阻式壓力計之發展過程……………………………………... 16
圖1- 4 壓力計之薄膜形式(a)黏貼金屬片(b)一體成形矽基材 [9]…… 16
圖 1-5 電化學蝕刻實驗示意圖 [10]…………………………………... 17
圖1- 6 利用面型微加工所製造的壓力計 [11]………………………... 17
圖 1-7 各種壓阻擺設方式[12]………………………………………… 18
圖 1-8 壓差型及絕對壓力型示意圖[8]……………………………….. 18
圖 2-1 輸入壓力與輸出電壓的轉換關係 …………………..................25
圖2-2 電阻變化與應力方向的關係 …………………...…..................25
圖2-3 感測器壓阻之配置 (a) 惠司同電橋全橋式電路(b)分佈示意圖.26
圖2-4 均勻壓力施加在四邊固定薄板上…………………………..…..26
圖2-5 壓阻式感測器的結構示意圖…………………………………....27
圖3-1 壓阻式壓力感測器設計以惠司同電橋架構配置………………31
圖3-2 壓阻式壓力感測器設計概念(a)傳統式壓力感測器，(b)新型態壓力感測器。………………………………………………………......31
圖3-3 壓阻式壓力感測器受壓力(100KPa)作用後位移分佈圖(a)傳統感測器設計位移量(b)新型態壓力感測器位移量位移比傳統設計大29%，(c)傳統感測器設計受力後應力分佈圖，(d)新型態壓力感測器受力後應力分佈圖其壓阻受應力大小比傳統設計多58%………………...…32
圖3-4 傳統改良型壓力感測器的製程流程………………………...….33
圖3-5 新型壓力感測器的製程流程………………………………..…..34
圖4-1 壓力感測器(a)薄膜尺寸改變與(b)薄膜厚度改變，其變形量與惠司同電橋輸出電壓訊號之比較………………………………..……39
圖4-2 新型壓力感測器設計深反應離子蝕刻深度比較………………40
圖4-3 傳統與新型壓力感測器設計 (a)薄膜變形量比較(b)惠司同電橋輸出電壓訊號之比較……………………………………………..……41
圖4-4 微機電壓力計除高度計應用外，亦有許多應用 [23]…...…….42
圖4-5 微機電壓力計在高度計之應用……………………………...….42

表目錄

表1-1 壓力感測器感測方式之比較……………………………………14
表2-1 矽在常溫下的壓阻係數[9]………………………………..…….24
表4-1. 傳統與新型壓力計設計規格比較整理……………………..….38

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