臺灣博碩士論文加值系統

在液晶顯示器的結構中，透明導電薄膜扮演著重要的角色，導電性與穿透率是評估性能的最重要指標，現在技術最成熟的透明導電薄膜為銦錫氧化物，簡稱ITO，無論是製程的成熟度、導電性或是透光率都有良好的表現，但是銦的稀有性與市場上不斷上升的需求量導致了價格上漲與供應量的問題，特別是供應來源過於單一，使其成為進一步發展的障礙，因此我們尋求非ITO透明導電薄膜，研究應用不同透明電極之液晶元件的製備與特性。
在論文中，我們選擇了兩類不同材質的透明導電薄膜，一則是氧化物/金屬/氧化物結構的多層透明導電薄膜，另一類是氧化鋅類透明導電薄膜，來代替ITO玻璃透明電極，進行反向平行液晶晶胞的製程與特性分析。我們試驗其光電調制特性，另外嘗試以無塗佈配向層的摻雜鋁氧化鋅薄膜製作液晶晶胞，探討單以金屬氧化物作為配向層的可能性。文章中，首先，我們解釋液晶晶胞的驅動機制以及實驗的數據分析過程，然後說明液晶晶胞的製作步驟，接著介紹各種透明導電薄膜之製備方法，並利用光譜儀與四點探針量測穿透率與片電阻來驗證其性能，證實我們所選的透明導電薄膜足以取代ITO玻璃，接著架設量測系統，對液晶晶胞進行光電調制特性，以及反應時間的測量，藉由其特性分析，說明這兩種透明導電薄膜作為ITO-free液晶光電元件之特性。

In a liquid crystal display, transparent conductive film plays an important role for driving the pixels. Conductivity and transmittance are the most important criterions to evaluate its performance. Nowadays, ITO is the most mature transparent conductive film for different applications. However, the rising price of Indium become an obstacle of further applications. Therefore, finding an alternative materials to form ITO-free device is necessary.
In this thesis, we report our fabrication and characterization of liquid crystal devices using different transparent conductive electrode, including three layer thin film with oxide-metal-oxide sandwich structure as well as zinc oxide type thin film. In the first part of the thesis, we will introduce the working principle of a nematic liquid crystal cell and the design of experimental set-up to characterize those devices. In the second part, we will describe the fabrication of our nematic liquid crystal cell with different transparent conductive films. In addition, transmittance and sheet resistance of each substrate are measured with spectrophotometer and four-point probe testbed. We describe set up the system to measure the phase retardation and response time of our nematic liquid crystal cell. The results will be useful to evaluate those thin films for further development on optoelectronic devices.

目錄
第一章 緒論 1
1.1 背景與研究動機 1
1.2 液晶與晶胞簡介 3
1.3 透明導電薄膜簡介 6
1.4 論文章節簡述 7
第二章 理論與實驗 8
2.1 反向平行對準向列式液晶晶胞的操作原理 8
2.2 樣品製作步驟 12
2.3 實驗步驟與分析 16
2.3.1 透明導電薄膜之光學與電學特性的測量與分析 16
2.3.2 反向平行液晶晶胞電光調制特性量測 19
第三章 多層透明導電薄膜研製晶胞之研究 22
3.1 多層透明導電薄膜製備與特性 22
3.1.1 多層透明導電薄膜製備 22
3.1.2 多層透明導電薄膜特性 24
3.2 多層透明導電薄膜製作液晶晶胞的特性分析 28
第四章 氧化鋅類透明導電薄膜 36
4.1 氧化鋅類透明導電薄膜製備及特性 37
4.1.1 氧化鋅類透明導電薄膜製備 37
4.1.2 氧化鋅類透明導電薄膜特性 38
4.2 氧化鋅類透明導電薄膜製作液晶晶胞的特性分析 41
第五章 結論 48
參考文獻 50
附錄 52
附錄1 E7液晶各項參數 52
附錄2 液晶晶胞反應時間機制 54

1. Fréedericksz, V. and A. Repiewa, Theoretisches und Experimentelles zur Frage nach der Natur der anisotropen Flüssigkeiten. Zeitschrift Für Physik, 1927. 42(7): p. 532-546.
2. Brody, T.P., The birth and early childhood of active matrix—A personal memoir. Journal of the society for information display, 1996. 4(3): p. 113-127.
3. 洪文進, et al., ITO 透明導電薄膜: 從發展與應用到製備與分析. 化學, 2005. 63(3): p. 409-418.
4. Minami, T., Transparent conducting oxide semiconductors for transparent electrodes. Semiconductor science and technology, 2005. 20(4): p. S35.
5. 黃天昱, 陽極氧化鋁薄膜及溝槽對液晶分子的傾角調變之研究, in 電子物理系所. 2008, 國立交通大學: 新竹市. p. 78.
6. Kasap, S. and P. Capper, Springer Handbook of Electronic and Photonic Materials. 2017: Springer.
7. Dhar, A. and T.L. Alford, High quality transparent TiO2/Ag/TiO2 composite electrode films deposited on flexible substrate at room temperature by sputtering. APL Materials, 2013. 1(1): p. 012102.
8. 楊明輝 and 物理學, 透明導電膜. 2012: 藝軒.
9. Yeh, P. and C. Gu, Optics of liquid crystal displays. Vol. 67. 2010: John Wiley & Sons.
10. Efron, U., Spatial light modulator technology: materials, devices, and applications. Vol. 47. 1994: CRC press.
11. Kopp, V.I., et al., Low-threshold lasing at the edge of a photonic stop band in cholesteric liquid crystals. Optics letters, 1998. 23(21): p. 1707-1709.
12. Dawar, A.L. and J.C. Joshi, Semiconducting transparent thin films: their properties and applications. Journal of Materials Science, 1984. 19(1): p. 1-23.
13. Yu, S., et al., High quality transparent conductive SnO2/Ag/SnO2 tri-layer films deposited at room temperature by magnetron sputtering. Materials Letters, 2012. 85: p. 68-70.
14. Novoselov, K.S., et al., Electric field effect in atomically thin carbon films. Science, 2004. 306(5696): p. 666-669.
15. Kuzmenko, A.B., et al., Universal Optical Conductance of Graphite. Physical Review Letters, 2008. 100(11): p. 117401.
16. Geim, A.K. and K.S. Novoselov, The rise of graphene. Nature Materials, 2007. 6: p. 183.
17. Saleh, B.E., M.C. Teich, and B.E. Saleh, Fundamentals of photonics. Vol. 22. 1991: Wiley New York.
18. Haacke, G., New figure of merit for transparent conductors. Journal of Applied Physics, 1976. 47(9): p. 4086-4089.
19. Dikov, H., et al., Optical and electrical properties of nanolaminate dielectric structures. 19th International Summer School on Vacuum, Electron and Ion Technologies (Veit2015), 2016. 700.
20. Park, H.G., et al., Electro-optical properties of liquid crystal displays based on the transparent zinc oxide films treated by using a rubbing method. Optical Materials, 2018. 75: p. 252-257.
21. Hu, J.W., S.H. Yang, and S.C. Jeng, UV-treated ZnO films for liquid crystal alignment. Rsc Advances, 2016. 6(57): p. 52095-52100.
22. George, S.M., Atomic Layer Deposition: An Overview. Chemical Reviews, 2010. 110(1): p. 111-131.
23. Blagoev, B., et al. Electron transport in Al-doped ZnO nanolayers obtained by atomic layer deposition. in Journal of Physics: Conference Series. 2016. IOP Publishing