硬碟片以及用來讀取以及寫入的磁頭硬碟內部最重要的零件，隨著硬碟越做越小，硬碟片轉速越來越快，為了降低磁頭飛行的高度，近幾年，已有文獻指出，硬碟片表面的型態對於磁頭飛行高度以及穩定度有著很大的影響，對於目前的硬碟設計，我們需要去了解哪一種波長的型態對於磁頭飛行高度的影響是最大的，以此為指標來改善硬碟片表面的型態。
本實驗藉由不同拋光，退火，濺鍍以及化學侵蝕的方法來改變硬碟片表面不同波長的型態，並藉由聲發射感應器來量測當磁頭接觸到碟片表面時的電壓以及功率，以及利用光學表面分析儀(OSA)和原子力顯微鏡(AFM)來量測碟片表面的型態，最後藉由關聯性的分析，發現磁片表面細微波形造成的起伏對於磁頭飛行高度佔有極大的的影響力。

A hard disk and a read/write head are the most important parts in a hard disk drive (HDD). With the size of an HDD getting smaller and the rotation speed of a hard disk getting higher, a few studies in the last few years have indicated that the surface morphology of a hard disk has a significant impact on head flying height and stability. Thus, for designing an HDD, we need to verify which wavelength of morphology is optimum for head flying height and use it as an index to improve the surface morphology of a hard disk.
In this study, we used different conditions of polishing, annealing, sputtering and chemical etching to change the surface morphology of a hard disk. We used AE sensor (Acoustic Emission Sensor) for touch-down power measurement and optical surface analyzer (OSA) and atomic force microscopy (AFM) for measuring the surface morphology of the hard disk. Finally, we found that micro-waviness has a significant influence on the head flying height through a correlation analysis.

摘要 I
Abstract II
致謝 IV
總目錄 V
圖目錄 VII
第1章 緒論 1
1-1 研究背景 1
1-2 研究動機 1
第2章 文獻回顧 3
2-1 HDD發展簡介 3
第3章 實驗流程與分析儀器介紹 5
3-1 實驗流程圖 5
3-2 實驗描述(退火/濺鍍/浸泡) 6
3-3 量測及分析儀器介紹 6
3-3-1 KLA-Tencor光學表面分析儀(OSA) 6
3-3-2 原子力顯微鏡(AFM) 7
3-3-3 Touch down Power量測儀器 8
第4章 結果與討論 13
4-1 碟片表面分析 13
4-1-1 不同Micro-waviness的碟片製作及量測分析 13
4-1-1-1 OSA Micro-waviness量測 13
4-1-1-2 TDp(AE sensor和TD sensor)量測 14
4-1-1-3 Micro-waviness和TDp的關聯性分析 14
4-1-1-4 飛行滑塊(Slider)尺寸和TDp的關聯性分析 14
4-1-2 不同Rq的碟片製作及量測分析 15
4-1-2-1 OSA Rq量測 15
4-1-2-2 TDp量測 15
4-1-2-3 Rq和TDp的關聯性分析 15
4-1-3 不同Ra的碟片製作及量測分析 16
4-1-3-1 AFM Ra量測 16
4-1-3-2 TDp量測 16
4-1-3-3 AFM Ra和TDp的關聯性分析 16
第5章 結論 46
參考文獻 48
附錄 50

[1] E. D. Daniel, C. D. Mee, and M. H. Clark, Magnetic recording: the first 100 years: John Wiley & Sons publisher, 1999.
[2] 賴志煌 ,廖又儀 ,大衛奧康 ,林夢嫺., "垂直記錄媒體"專利(台灣:I309411), 2015.
[3] Y. Shiroishi, K. Fukuda, I. Tagawa, H. Iwasaki, S. Takenoiri, H. Tanaka, et al., "Future options for HDD storage," IEEE Transactions on Magnetics, vol. 45, pp. 3816-3822, 2009.
[4] L. Bo, "Head-disk interface technology: Challenges and approaches," JSME International Journal Series C Mechanical Systems, Machine Elements and Manufacturing, vol. 48, pp. 325-328, 2005.
[5] H. Tanaka, S. Yonemura, and H. Tokisue, "Slider dynamics during continuous contact with textured and smooth disks in ultra low flying height," IEEE Transactions on Magnetics, vol. 37, pp. 906-911, 2001.
[6] D. W. Meyer, P. E. Kupinski, and J. C. Liu, "Slider with temperature responsive transducer positioning," ed: Google Patents, 1999.
[7] P. Machtle, R. Berger, A. Dietzel, M. Despont, W. Haberle, R. Stutz, et al., "Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives," in Micro Electro Mechanical Systems. The 14th IEEE International Conference on, pp. 196-199, 2001.
[8] A. Dietzel, R. Berger, P. Mächtle, M. Despont, W. Häberle, R. Stutz, et al., "In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations," Sensors and Actuators A: Physical, vol. 100, pp. 123-130, 2002.
[9] Q. Zeng, C.-H. Yang, S. Ka, and E. Cha, "An experimental and simulation study of touchdown dynamics," IEEE Transactions on Magnetics, vol. 47, pp. 3433-3436, 2011.
[10] B. H. Thornton and D. B. Bogy, "Head-disk interface dynamic instability due to intermolecular forces," IEEE Transactions on Magnetics, vol. 39, pp. 2420-2422, 2003.
[11] B. Knigge and F. E. Talke, "Nonlinear dynamic effects at the head-disk interface," IEEE Transactions on Magnetics, vol. 37, pp. 900-905, 2001.
[12] K. W. Ng, Z. Yuan, S. Hu, R. Xian, and B. Liu, "Disk surface waviness and its influence on the flying stability at sub-10-nm flying height," in Magnetic Recording Conference. Digest of the Asia-Pacific, 2002, pp. TU-TU.
[13] J. Xu1, J. D. Kiely2, Y. Hsia2 and F. E.Talke1, Effect of Disk Waviness on Slider Dynamics, Center for Magnetic Recording Research, University of California, San Diego, La Jolla, CA, USA; 2. Seagate Technology, Pittsburgh, PA, USA.
[14] P. Yim, P. Wang, Z. Li, T. Danen, S. Choa, and H. J. Lee, "The role of disk surface waviness on baseline instability of MR head," IEEE Transactions on Magnetics, vol. 35, pp. 758-763, 1999.
[15] L. Su, Y. Hu, E. L. Lam, P. Li, R. W. Ng, D. Liang, et al., "Tribological and dynamic study of head disk interface at sub-1-nm clearance," IEEE Transactions on Magnetics, vol. 47, pp. 111-116, 2011.
[16] T. d. Kita, K. Kogure, Y. Mitsuya, and T. Nakanishi, "New method of detecting contact between floating-head and disk," IEEE Transactions on Magnetics, vol. 16, pp. 873-875, 1980.
[17] T. d. Kita, K. Kogure, Y. Mitsuya, and T. Nakanishi, "New method of detecting contact between floating-head and disk," IEEE Transactions on Magnetics, vol. 16, pp. 873-875, 1980.
[18] Z. Deng, L. Su, E. Lam, and M. Kubota, "Observation of head touch down using AE sensor," Asia-Pacific Magnetic Recording Conference, pp. 1-2, 2009.
[19] C. Sodsri and S. Choomchuay, "Hdi detection by using an ae technique," 13th International Symposium Communications and Information Technologies (ISCIT), pp. 585-588, 2013.
[20] Y. Shimizu, J. Xu, H. Kohira, M. Kurita, T. Shiramatsu, and M. Furukawa, "Nano-scale defect mapping on a magnetic disk surface using a contact sensor," IEEE Transactions on Magnetics, vol. 47, pp. 3426-3432, 2011.
[21] J. Xu, Y. Shimizu, J. Liu, T. Shiramatsu, M. Furukawa, J. Li, et al., "Pit detection using a contact sensor," IEEE Transactions on Magnetics, vol. 49, pp. 2715-2718, 2013.
[22] J. Xu, Y. Shimizu, M. Furukawa, J. Li, Y. Sano, T. Shiramatsu, et al., "Contact/clearance sensor for HDI subnanometer regime," IEEE Transactions on Magnetics, vol. 50, pp. 114-118, 2014.