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研究生:劉仲達
研究生(外文):Liou, Jong-Dar
論文名稱:Sol-Gel方法製備均勻二氧化矽微奈米球與物理性質分析
論文名稱(外文):Synthesis of Uniform Silica Micro-nanospheres by Sol-Gel Method and Analysis of Their Physical Properties
指導教授:吳樸偉
指導教授(外文):Wu, Pu-Wei
口試委員:陳智柯富祥
口試委員(外文):Chen, ChihKo, Fu-Hsiang
口試日期:2018-07-26
學位類別:碩士
校院名稱:國立交通大學
系所名稱:工學院半導體材料與製程設備學程
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2018
畢業學年度:106
語文別:中文
論文頁數:42
中文關鍵詞:溶膠凝膠法二氧化矽微奈米球
外文關鍵詞:Sol - GelUniform Silica Micro-nanospheresmonodisperse particles
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本論文主要目的是要利用化學合成方式製造出單一粒徑微奈米等級二氧化矽微球,我們使用溶膠凝膠法 (Sol-Gel),是現今相對簡單的方式合成二氧化矽微球。我們依據W. Stöber, A. Fink, and E. Bohn (J. Colloid Interface Sci. 26, 62 (1968))方式進行實驗,主要以矽酸四乙酯為前趨物,再加入氨水當做催化劑和乙醇來當作溶劑,調整相關實驗參數以製造出單一粒徑二氧化矽微奈米球,本實驗成功合成出直徑為 284 nm之二氧化矽微奈米球且標準差(SD)控制在5 nm以內。我們對此微奈米球進行相關物理性質分析探討,以期更清楚明暸二氧化矽微球之微觀特性。
本實驗進行主要依據過去文獻,嘗試調整各個前趨物成份濃度與溫度製程等相關參數以達到我們的合成目標,再現性實驗結果亦確認實驗參數的穩定性。
This research employs a chemical synthesis route to fabricate monosized silica microspheres by using a sol-gel method . This sol-gel approach is considered as the most economical way to produce silica micro spheres. Our process is based on a formula developed by W. Stöber, A. Fink, and E. Bohn (J. Colloid Interface Sci. 26, 62 (1968)), which used tetraethyl silicate (TEOS) as the precursor, ammonia (NH4OH) as the catalyst, and ethanol as the solvent. We adjust relevant parameters so that monosized microspheres could be successfully produced. In this work, we demostrate the formation of 284 nm silica microspheres with a standard deviation of 5 nm. Subsequently, physical characterization of the as-synthesized microspheres is conducted and discussed.
中文摘要...............................................................................................Ⅰ
英文摘要...............................................................................................Ⅱ
誌謝.......................................................................................................Ⅲ
目錄.......................................................................................................Ⅳ
圖目錄......... .........................................................................................Ⅵ
表目錄...................................................................................................Ⅶ

第一章 前言..........................................................................................1
第二章 文獻回顧與原理介紹..............................................................3
2-1 微奈米粒子製備簡介...............................................................3
2-1-1 固相法製備奈米微粒...........................................................3
2-1-2 氣相法製備奈米微粒………………………..…..….……..4
2-1-3 濕式化學合成法………………………..….………...…….5
2-2 Sol-Gel反應機制…………………….…………..…………7
2-3 膠體粒子成核與成長機制......................................................9
第三章 實驗器材與步驟....................................................................14
3-1 實驗流程.................................................................................14
3-2 實驗藥品與設備……………… ..………….………...……..15
3-3 物理特性量測儀器………………..……….………..………15
3-4 二氧化矽微球製程說明………..………….……..…………16
第四章 實驗結果與討論…………………………..……..…………19
4-1 微奈米球製作分析與討論.....................................................19
4-2 微奈米粒子物理性質分析介紹…….………....….….……..27
4-2-1 SEM表面形貌……………………..……..…..…..…..……28
4-2-2 密度儀量測..........................................................................29
4-2-3 XRD………………………...………….……….…...……..30
4-2-4 Zeta Potential量測………………….…………........……..31
4-2-5 BET………………………………..…………….…....……34
第五章 未來展望與結論…………….…………………....….……..36
第六章 參考文獻…………………….……………….…….……….39
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