臺灣博碩士論文加值系統

本研究不僅運用焦耳熱效應選擇性沉積鈀金屬 (Palladium) 於極薄矽奈米帶元件上做為氫氣感測器使用；也成功地利用焦耳熱效應進行極薄矽奈米帶自我加熱 (self-heating)，並同時在此狀況下即時地測量不同濃度的氫氣。透過厚度為10 nm的極薄矽奈米帶元件設計以及高低濃度摻雜 (n+/n-/n+)的設計，可以精準的控制焦耳熱放熱區域 (低摻雜區)，也可以使對閘極電位變化靈敏的低濃度摻雜區域對感測氣體的能力得到更進一步提升。接著應用 COMSOL多重物理偶合模擬 self-heating時極薄矽奈米帶的表面溫度分布，與供給不同電壓下，聚甲基丙烯酸甲酯 (Polymethylmethacrylate，簡稱PMMA)光阻燒除的情形相互驗證。將製備好的元件置於利用聚二甲基矽氧烷 (Polydimethylsiloxane，簡稱PDMS)製作的小腔體中進行氫氣感測，比較不同厚度的氮化矽水氣阻擋層對氫氣的感測影響，比較不同厚度的鈀金屬偵測氫氣的效率，也比較不同操作電壓下所產生的self-heating效應對氫氣感測的影響，篩選出最佳的氫氣感測器製備條件以及操作條件，使其在大氣中可以靈敏地偵測到濃度為1 ppm的氫氣。我們相信結合極薄矽奈米帶元件以及高低濃度摻雜的這兩項設計，可大幅提升元件對氣體的感測能力，而利用焦耳熱效應技術製備的氫氣感測器可以提升元件在室溫下的應用以及氣體偵測的準確性，並預期此技術對臨床即時人體呼吸氫氣測試以及工業危險氣體洩漏安全檢測有重大的幫助。

In this study, we report the experimental results of selective deposition of Palladium (Pd) via localized Joule heating (JH) on C-Si ultra-thin nanobelt devices as real-time hydrogen sensors. The thickness of ultra-thin nanobelt devices were scaled down to 10 nm, which makes device very sensitive to the surface potential change. The active channels of ultra-thin nanobelt devices were consisted of n+/n-/n+ structure, and localized joule heating is occurred mainly at local high resistance n- region such that a PMMA (Polymethylmethacrylate) nanotemplate can be formed via JH. The surface temperature was estimated by COMSOL simulations at various biases. AFM was used to investigate the morphology of n- region where the PMMA is ablated at various conditions. Devices with selective deposition of Pd at the n- region were then placed in a small PDMS (Polydimethylsiloxane)chamber for hydrogen detection. The impact of different thicknesses of Si3N4 atop device channel was compared on hydrogen sensing so that a optimized thickness was adopted to prevent attack from humidity. The thickness of Pd was also investigated via hydrogen sensing. Furthermore, several self-heating voltages were compared for the best response in hydrogen sensing. The detection limit under atmosphere is about 1 ppm.

中文摘要...........................................I
ABSTRACT..........................................II
目錄..............................................IV
圖目錄.............................................VI
表目錄.............................................Ⅸ
公式目錄...........................................Ⅹ
第一章.............................................1
1-1 前言...........................................1
1-2 電子鼻簡介......................................3
1-3 氫氣特性簡介....................................5
1-4 氫氣檢測........................................6
1-5 氫氣感測器簡介...................................8
1-5-1 電阻式氣體感測器 (Resistance-Based)............9
1-5-2 公函數式氣體感測器 (Work Function-Based)......11
1-5-3 光學式氣體感測器 (Optical Sensor).............12
1-5-4 聲學式氣體感測器 (Acoustic Sensors)...........13
1-6 電晶體式氣體感測器..............................14
1-7 矽奈米線場效電晶體感測器.........................17
1-8 利用焦耳熱做選擇性修飾...........................18
1-9 利用焦耳熱作選擇性修飾之生醫感測應用..............20
1-10 焦耳熱模擬相關研究..............................23
1-11 實驗動機與架構.................................25
第二章.............................................26
2-1 電阻式奈米單晶矽NANOBELT元件製作流程.............26
2-2 感測區氮化矽加厚沉積降低水氣對電阻式NANOBELT矽奈米元件的影響 ...................................................30
2-3 焦耳熱效應模擬..................................32
2-3-1 COMSOL模擬...................................32
2-3-2 電阻式 Nanobelt 矽奈米元件外部加熱之溫度模擬....33
2-3-3 COMSOL模擬與外部加熱模擬之比較................34
2-4 焦耳熱效應輔助選擇性沉積鈀金屬薄膜................36
2-5 濺鍍鈀金屬......................................37
2-6 矽奈米元件量測..................................37
2-6-1電性量測系統...................................37
2-6-2 PDMS小腔體製作................................38
第三章..............................................40
3-1 焦耳熱效應模擬之驗證.............................40
3-2 選擇性沉積鈀金屬薄膜及其驗證......................41
3-3 本研究使用之元件優勢.............................43
3-4 感測機制........................................45
3-4-1 感測機制之能帶解釋.............................45
3-4-2 感測機制之電子耦合效應解釋......................47
3-5 以鈀金屬為感測材料之氣體感測器對氫氣之電性量測......48
3-5-1 比較未修飾鈀金屬之元件對氫氣感測特性 (I-t curve).48
3-5-2 比較氮化矽沉積厚度不同對氫氣感測特性的影響........50
3-5-3 比較鈀金屬 (Pd)沉積厚度不同對氫氣感測特性的影響...51
3-5-4 比較焦耳熱效應對氫氣感測特性的影響...............53
3-5-5 偵測不同濃度的氫氣..............................55
3-5-6 修飾鈀金屬之氣體感測器比較.......................58
第四章...............................................59
4-1 結論.............................................59
4-2 未來展望.........................................59
參考文獻.............................................61

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