Mach-Zehnder光纖干涉儀感測器具有體積小、靈敏度高、抗電磁干擾等優點，而利用塌陷熔接製作的Mach-Zehnder光纖干涉儀不但製作簡單且元件結構較為堅固，因此在近幾年來已有各式各樣的結構被發表。在本論文中，我們將空芯光纖塌陷熔接於兩段單模光纖之間形成單Mach-Zehnder光纖干涉儀，接著對空芯光纖中間區域進行放電塌陷使元件成為雙Mach-Zehnder光纖干涉儀。相較於單Mach-Zehnder光纖干涉儀，雙Mach-Zehnder光纖干涉儀輸出頻譜的干涉條紋有著更大的自由頻譜範圍與消光比，使雙Mach-Zehnder光纖干涉儀更加適合被應用在環境感測方面。
我們將製作出的雙Mach-Zehnder光纖干涉儀應用於感測環境折射率、環境溫度、軸向應變及推進距離等，並得出雙Mach-Zehnder光纖干涉儀對於折射率靈敏度為218.84 nm/RIU、溫度靈敏度為14.32 pm/℃、軸向應變靈敏度為5.143×10-4 dB/με、推進距離靈敏度為-0.214 dB/mm，而實驗結果也顯示出Mach-Zehnder光纖干涉儀在經過中間區域塌陷成為雙Mach-Zehnder光纖干涉儀後，其對於環境折射率及環境溫度變化的感測靈敏度皆會大幅提升，因此可以提高元件在環境感測方面的可量測範圍及準確度。

Optical Mach-Zehnder interferometer (MZI) fiber sensors have several advantages, such as small size, high sensitivity, and immunity to electromagnetic interference. Several kinds of MZI-based fiber sensors formed by the collapse splicing have been proposed in recent year due to their simple fabrication process and strong structures. We can get a single-MZI-based fiber sensor by collapse splicing a section of HCF between two SMFs. The double-MZI-based fiber sensor we propose is fabricated by collapsed the middle region of the single-MZI-based fiber sensor by a suitable fusion parameter. Compared to the interference spectrum of single-MZI-based fiber sensors, double MZI-based fiber sensors have larger FSR and deeper extinction ratio.
The double-MZI-based fiber sensors we proposed have been applied to environment sensing. The experiment results show the sensitivities of refractive index, temperature, strain, and pushing distance of the double-MZI-based fiber sensor are 218.84 nm/RIU, 14.32 pm/℃, 5.143×10-4 dB/με, and -0.214 dB/mm, respectively. According to the experiment results, the double-MZI-based fiber sensor which fabricated by collapsed the middle region of the single-MZI-based fiber sensor has higher sensitivity in RI and temperature sensing. Otherwise, the double-MZI-based fiber sensor can also improve the measurement range and accuracy.

學位論文審定書 i
誌謝 ii
中文摘要 iii
Abstract v
目錄 vi
圖目錄 viii
表目錄 xii
第一章 緒論 1
1-1光纖的發展 1
1-2 光纖干涉儀 3
1-2.1 法布立-培若光纖干涉儀(Fabry-Pѐrot fiber interferometer) 4
1-2.2 邁克生光纖干涉儀(Michelson fiber interferometer) 7
1-2.3 馬赫-桑德光纖干涉儀(Mach-Zehnder fiber interferometer) 10
1-3研究動機 12
第二章 Mach-Zehnder光纖干涉儀 13
2-1 Mach-Zehnder光纖干涉儀 13
2-2 雙Mach-Zehnder光纖干涉儀 18
第三章 雙Mach-Zehnder光纖干涉儀的製作 21
3-1元件設計 22
3-2製作元件的材料 24
3-3元件製作方法 24
第四章 雙Mach-Zehnder光纖干涉儀的干涉特性 31
4-1元件量測架設 31
4-2元件中間區域塌陷前後之比較 33
4-3元件中間塌陷區域長度之比較 35
4-4結構不對稱對於元件之影響 37
4-2感測環境溫度變化 40
第五章 Mach-Zehnder光纖干涉儀的環境感測特性 41
5-1感測環境折射率變化 41
5-2感測環境溫度變化 46
5-3感測軸向應變 51
5-4感測推進距離之變化 54
第六章 結論 57
參考文獻 58

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