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研究生:林秀媛
研究生(外文):LIN,HSIU-YUAN
論文名稱:利用PVD法電弧鍍膜TiN和TiAlCN 薄膜於AISI 420/440麻田散鐵不銹鋼之機械性質與腐蝕特性研究
論文名稱(外文):Study on the Mechanical Properties and Corrosion Characteristics of TiN and TiAlCN Films Coated by Arc PVD Process for AISI 420/440 Martensitic Stainless Steel
指導教授:王錫九陳適範陳適範引用關係
口試委員:陳振華林於隆王錫九陳適範
口試日期:2018-07-06
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:材料科學與工程研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2018
畢業學年度:106
語文別:中文
論文頁數:61
中文關鍵詞:TiAlCNTiN離子電弧PVD麻田散鐵不銹鋼
外文關鍵詞:TiAlCNTiNArc PVDMartensitic stainless steel
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麻田散鐵不銹鋼在沃斯田鐵化溫度下具有沃斯田體相,經由淬火及回火後成為回火麻田散鐵相,回火麻田散鐵相具備優異的強度與耐磨耗性,相較於沃斯田體系與肥粒田鐵系不銹鋼,擁有較佳的機械性質,使材料廣泛的應用於高應力之組件及醫療器材。近年來許多表面處理技術被應用於不銹鋼,用來提升其潤滑性、機械強度、耐磨性、耐蝕性及硬度等。
因此,本研究利用離子電弧PVD鍍膜TiN及TiAlCN於420/440不銹鋼上,分析兩種PVD鍍膜(TiN及TiAlCN)在不同基材(420及440)及基材表面品質(拋光與未拋光)之性質,以觀察不同基材與鍍膜之間的組合對於鍍膜性質的影響,另外針對基材的表面品質進行鍍膜附著性及表面粗糙度等之分析,鍍膜完成後,進行各項性質檢測與顯微結構之分析,包括壓痕測試、表面粗糙度、維氏硬度、鍍層厚度、X光繞射及極化腐蝕試驗等分析鍍膜性質,後續利用光學顯微鏡及掃描電子顯微鏡觀察鍍層結構與表面特性。
Martensitic stainless steel has austenitic phase in austenitizing temperature. Austenitic phase can transform to tempered martensitic phase after quenching and tempering. Tempered martensite has excellent strength and wear resistance, and better mechanical properties compare to that of austenitic and ferritic stainless steel. Martensitic stainless steel has been widely used for high strength components and medical devices. Recently, there are many surface treatment technologies has been applied to stainless steel which enable to increase the surface lubricity, mechanical strength, wear resistance, corrosion resistance and hardness.
This study applied Arc-PVD to coat TiN and TiAlCN films on the surface of 420/440 stainless steels and analyzed two types of PVD films (TiN and TiAlCN) surface properties (polished and unpolished) of different substrates (420 and 440) to observe the properties of coated films by various combinations of films and substrates. This study also analyzed the surface adhesion and surface roughness of different substrates surface condition. The mechanical properties, microstructures, including indentation test, surface roughness, Vickers hardness, coating thickness test, X-ray diffraction and polarization corrosion test of coated films and then applied Optical Microscope (OM) and Scanning Electron Microscope (SEM) to observe the coated layers structure and surface properties of films.
摘要 i
ABSTRACT ii
致謝 iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 緒論 1
1.1前言 1
1.2 研究動機與目的 2
第二章 文獻回顧 3
2.1 鋼的簡介 3
2.1.1 不銹鋼介紹及種類 3
2.1.2 不銹鋼發展歷史 6
2.1.3 420不銹鋼 7
2.1.4 440不銹鋼 9
2.2 熱處理 11
2.2.1 常見熱處理方法 11
2.2.2 鋼的熱處理 12
2.3 表面處理技術 14
2.3.1 物理氣相沉積法(Physical Vapor Deposition) 14
2.3.2 離子電弧PVD 18
2.3.3 氮化鈦(TiN) 19
2.3.4 碳氮化鋁鈦(TiAlCN) 20
第三章 實驗設備與研究方法 22
3.1 實驗流程與簡介 22
3.2 試片製備 23
3.3 離子電弧PVD流程 24
3.4 性質分析 26
3.4.1 鍍膜厚度量測 26
3.4.2 鍍膜表面粗糙度分析 27
3.4.3 壓痕測試 28
3.4.4 鍍膜硬度量測 29
3.4.5 X-ray繞射分析 30
3.4.6 數位顯微鏡 31
3.4.7 場發式電子顯微鏡(FESEM) 32
3.4.8 極化腐蝕試驗 32
第四章 結果與討論 34
4.1 鍍膜XRD結構分析 34
4.2 表面形貌與粗糙度之分析 37
4.3 鍍膜厚度量測 40
4.4 鍍膜附著性分析 42
4.5 鍍膜硬度量測 45
4.6 鍍膜SEM結構分析 46
4.7 電化學極化試驗分析 51
第五章 結論 57
參考文獻 59
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