臺灣博碩士論文加值系統

為強化能源管理的重要性，國際標準組織於2011年6月15日公佈了ISO 50001:2011 Energy management systems，基於P(規劃)-D(執行)-C(檢查)-A(行動)持續改善之循環執行，透過此能源管理系統之運作，達到協助企業改善能源使用效率，執行成果定期由驗證機構協助確認其程序。
本研究於國內某半導體封測廠透過該廠中央監控系統擷取5個月(11月至隔年3月)運轉資料，資料擷取時間1小時/筆。量測參數數據蒐集完成後，進行耗能數據整理而後代入性能基準線方程式進行迴歸分析，得到C0 至C5 係數，建立改善前外氣空調箱使用電熱蒸汽加濕器性能基準線方程式。
　　利用潔淨室外氣空調箱基準線的建立探討不同加濕方式之節能效益。結果顯示若在外氣空調箱修改為水洗加濕的下一年度繼續使用電熱加濕預估總耗電量為56,403kWh；而水洗加濕水泵由11月1日開啟一直運轉到隔年的3月31日止，實際耗電量為14,496kWh。這一年度共節省41,907kWh的電力，節省約74.3%的耗能。
　　研究結果顯示外氣空調箱配合冰水機熱回收水使用水洗加濕器的耗能遠低於外氣空調箱使用電熱蒸汽加濕的耗能，其整體的修改後的節能效益是相當顯著的，盼此研究結果可以提供未來他廠選用加濕方式或改變既有的加濕方式時參考。

To strengthen the importance of energy management, International Standards Organization announced the ISO 50001:2011 Energy management systems on June 15, 2011. Based on the continuous improvement of P ( Planning ) - D ( Executive ) - C ( Examining ) - A ( Operation ), through the operation of this energy management system, it can help enterprises to improve the efficiency of energy use, and implementation results are regularly verified by the verification agency to confirm their procedures.
　　In this study, a semi-conductor packaging and testing plant in Taiwan collected operating data from the plants central monitoring system for five months (November to March).Data acquisition time is 1 data/hour. After the measurement parameter data is collected, the energy-consuming data is organized and then it is subjected to the regression analysis of the performance baseline equation to obtain the coefficients C0 to C5. The baseline equation for improving the performance of the electric steam humidifier before use in the make-up air handling unit is established.
　　This study uses the establishment of a baseline for make-up air handling unit in cleanroom to explore the energy saving benefits of different humidification methods. The results showed that if the continuous use of electro-thermal steam humidification in the next year when the make-up air handling unit is modified to washing humidification, the total power consumption is 56,403kWh.The washing humidification pump was switched on from November 1 to March 31 of the following year. The actual power consumption was 14,496kWh.This year saves 41,907kWh of electricity, saving about 74.3% of energy consumption.
　　The results of the study showed that the energy consumption of the make-up air handling unit using the washing humidification with the heat recovery water is far lower than that of make-up air handling unit using the electro-thermal steam humidification. The modified energy efficiency is quite significant. It is hoped that the results of this study can provide a reference for the future when other plant selects the humidification method or changes the existing humidification method.

目 錄

摘　要 i
ABSTRACT ii
誌 謝 iv
表目錄 vii
圖目錄 viii
第一章 緒論 1
1.1 前言 1
1.2 研究目的 2
1.3 研究方法與研究流程 3
1.4 文獻回顧 5
第二章 外氣空調箱性能分析及應用 8
2.1 潔淨室空調系統介紹 8
2.1.1. 潔淨室的定義 8
2.1.2. 潔淨室的等級定義 8
2.1.3. 潔淨室之換氣次數 9
2.1.4. 潔淨室之氣流型態 9
2.2 濕空氣線圖 10
2.3 外氣空調箱各元件介紹 11
2.3.1. 過濾網 12
2.3.2. 風車 12
2.3.3. 冷卻除濕盤管 13
2.3.4. 加熱盤管 13
2.3.5. 加濕器 14
2.4 外氣空調箱控制邏輯說明 15
2.4.1. 外氣空調箱夏天控制邏輯及配置(不需加濕) 16
2.4.2. 外氣空調箱冬天控制邏輯及配置(需加濕) 17
第三章 外氣空調箱加濕方式簡介 18
3.1 蒸汽加濕器簡介 18
3.2 水洗式加濕簡介 19
3.3 循環水使用水質要求 20
3.3.1. 電熱加濕器水質需求 20
3.3.2. 水洗加濕器水質需求 20
3.4 本研究外氣空調箱加濕方式設計及操作條件說明 21
3.4.1. 電熱蒸汽加濕器 21
3.4.2. 水洗加濕器 22
第四章 案例系統說明及實驗方法 23
4.1 案例背景簡介及修改流程 23
4.2 預估外氣空調箱修改之節能效益 28
4.2.1. 電熱蒸汽加濕的耗能檢討(設計條件) 28
4.2.2. 水洗加濕的耗能檢討(設計條件) 29
4.2.3. 電熱加濕改為水洗加濕的節能效益預估 30
4.3 性能基準線建立方法 31
第五章 結果與討論 32
5.1 修改前外氣空調箱使用電熱蒸汽加濕器基準線方程式建立 32
5.2 修改後外氣空調箱使用水洗加濕器耗能調整 34
5.3 利用基準線方程式進行節能效益分析 35
5.4 外氣空調箱使用不同加濕方式與耗電量探討 36
第六章　 結論與建議 37
6.1 結論 37
6.2 建議 38
6.3 總結 38
參考文獻 39
符號彙編 41

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