最近使用奈米結構針對圓偏振光的響應已經成為近年來熱門的研究領域。在本論文中，我們彙整所有圓偏振光正向入射的反射器和吸收器的光學現象，並進行分析和了解其設計的原理。此外，對於具有選擇性手性的超穎介面，我們藉由相位疊加的概念，提出了一種簡單的設計方法，可以有效助於快速設計和分析。在實驗上，我們成功的製作出具有選擇性手性的樣品，光學頻譜的量測上可達到95%左圓偏振光的吸收，右圓偏振光入射則呈現高反射的現象，並且與模擬的結果有很高的一致性。

Metasurface has been applied to control the phase of light lately, including beam steering, focusing, generating optical angular momentum, and chirality, etc. Here, we report the complete studies of metasurfaces in reflectors and absorbers which could display the various optical phenomena under circularly polarized light at normal incidence. For the proposed chiral selective metasurface, the circular dichroism in reflection is about 0.4 which could be experimentally observed in the visible wavelengths. The experimental results also show high reflectance in right-handed circular polarization with preserved handedness and strongly absorption in left-handed circular polarization at chiroptical resonant wavelengths. By combining the nanobricks and the wire gratings, we propose a new method of the phase superposition in the same plane of metasurfaces. The method is helpful to further design the chiral selective metasurface effectively, and could advance in the development of ultracompact optical components in future.

摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 VII
表目錄 XIV
第 1 章 簡介 1
1.1 文獻回顧 1
1.2 電漿子 5
1.2.1 表面電漿極化子 6
1.2.2 表面電漿的耦合機制 13
1.2.3 局域性表面電漿子 16
1.3 手性 19
1.3.1 圆偏振光 20
1.3.2 圓二色性 25
1.3.2 自然界的光學響應 27
1.4 研究動機 29
第 2 章 超穎反射鏡的手性響應 31
2.1 一般的反射鏡 32
2.2 手性選擇吸收的反射鏡 33
2.3 不具有手性分辨率的窄頻吸收器 36
2.4 手性維持的反射鏡 37
2.5 手性維持且選擇吸收的反射鏡 38
第 3 章 數值模擬和設定 39
3.1 圓偏振光的設定 41
3.1 網格設定 42
第 4 章 製程與實驗架構 45
4.1 樣品的製作流程 45
4.1.1 水平顯影 47
4.2 量測架構 49
4.2.1 四分之一波片 50
4.2.2 非偏振分光鏡 (S-pol : P-pol = 1 : 1) 52
4.3 儀器介紹 53
4.3.1 超音波震洗機 53
4.3.2 磁控濺鍍機台 54
4.3.3 表面粗度儀 56
4.3.4 旋轉塗佈儀 57
4.3.5 電子束微影系統 58
4.3.6 電子束蒸鍍機 61
第 5 章 結果與討論 63
5.1 模擬的結果 63
5.1.1 非鏡像對稱 64
5.1.2 相位的設計 65
5.1.3 破壞性干涉的條件 69
5.1.4 遠場分析 70
5.1.5 近場分析 71
5.2 實驗的結果 74
5.2.1 量測結果 75
5.2 比較 79
第 6 章 結論 81
第 7 章 未來研究 82
參考文獻 85

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