臺灣博碩士論文加值系統

自2004年石墨烯被發現至今，已有許多科學家不斷研究並嘗試應用於各種領域。但在石墨烯製備技術上仍有許多困難，使石墨烯至今仍無法普遍的運用於各領域。製備石墨烯常遭遇的困難如：製程需於超高溫環境，迫使成本提高、石墨烯生產尺寸面積及膜層數量難以控制、因產量低而不便於大規模生產以及製備後需轉移等問題
。而目前在製程上最為常見的製備方法為化學氣相沉積法(Chemical Vepor Deposition, CVD)，雖然此方法可製備出高品質且大面積之石墨烯薄膜，但缺點就是需要於高溫環境，導致高成本及長時間的製備。因此，擁有低成本、製程速度快、免轉移等優點的製備方法是備受期待的。
可充電鋰離子電池作為主要的動力源，便攜式電子設備，不管是在科學或是工業領域皆備受關注。為了使鋰離子電池具有大容量、高壽命、低成本之優勢，我們使用反應式磁控濺鍍系統製備出優異的固態鋰離子電池之負極材料，朝向能商業化的研究方向前進。
本研究在低溫下製備出少層石墨烯(十層以下)，我們發現若以矽作為催化材料於下層生長3分鐘、甲烷流量3sccm、銅碳生長時間120秒、退火溫度900℃及退火持溫60分鐘能有效製備出十層以下的少層石墨烯，直接生長於銅箔上可以當作鋰電池之負極材料。

Graphene has been discovered since 2004. Numerous scientists are continuing doing research and trying to apply it in different fields because many of its features are better than those materials that have been found so far. However, there are a lot of difficulties on graphene preparation. That is why graphene still cannot be widely used in different fields today. It is quite difficult to produce graphene. For example, the process requires an ultra-high temperature environment which forced higher cost. Moreover, it is hard to control the area of graphene and numbers of film layers when it produces. Besides, due to low capacity d that, graphene can’t be mass-produced and transference still cause some problems to solve. Today, the common preparation method for graphene is Chemical Vapor Deposition(CVD). This method is able to produce high quality and large size of graphene, but the problems are related to an ultra-high temperature environment which causes higher cost and needs more process time. Therefore, we are looking forward to having the preparation method with low cost, efficient process and non-transfer.
Rechargeable lithium-ion batteries as the main power source, the portable electronic device, either or both of concern in the scientific industry. In order to make the lithium ion battery having the advantages of high capacity, high life and low cost, we use the reactive magnetron sputtering system to prepare the anode material of the excellent solid lithium-ion battery, and proceed to the commercial research direction.
In this study, few–layer graphene (below ten layers) were prepared at low temperature, we could efficiently fabricate the graphene lower then ten layers under the following conditions: Silicon as catalytic material at bottom deposited for 3 min, CH4 flow with 3 sccm, CuC process time of 120 seconds, annealing temperature at 900℃ and annealing time of 60 minutes which direct growth on copper foils can be used as anode material for lithium-ion batteries.

中文摘要 I
ABSTRACT II
誌謝 IV
目錄 V
表目錄 VIII
圖目錄 IX
第一章、緒論 1
1.1 前言 1
1.2 石墨烯於負極材料之優勢 1
1.3 石墨烯概述 2
1.4 石墨烯之結構 3
1.5 石墨烯特性 5
1.5.1 電學特性 5
1.5.2 光學特性 5
1.5.3 熱學特性 5
1.5.4 力學特性 6
1.6 研究動機 6
第二章、文獻探討 8
2.1 石墨烯製備方法 8
2.1.1 機械剝離法 8
2.1.2 氧化還原法 9
2.1.3 碳化矽磊晶成長法 10
2.1.4 化學氣相沉積法 11
2.2 石墨烯的成長機制 15
2.2.1 表面沉積 (Surface deposition) 16
2.2.2 析出 (Segregation) 17
2.3 石墨烯的分析 18
2.3.1 X射線繞射分析 (X-Ray Diffraction, XRD) 18
2.3.2 拉曼光譜分析(Raman spectrum) 19
2.4 反應式磁控濺鍍 20
2.4.1 濺鍍 (Sputtering) 20
2.4.2 電漿 (Plasma) 20
2.4.3 反應式濺鍍 (Reactive sputtering) 22
2.4.4 磁控濺鍍 (Magnetron sputtering) 22
2.5 蝕刻技術 23
第三章、實驗流程與儀器介紹 24
3.1 實驗規劃 24
3.1.1 石墨烯製備架構 24
3.1.2 實驗條件 25
3.1.3 試片製備流程 28
3.2 實驗材料 31
3.3 實驗設備與量測儀器 32
3.3.1 反應式磁控濺鍍系統 32
3.3.2 快速熱退火 34
3.3.3 X射線繞射分析儀 35
3.3.4 拉曼光譜儀 35
3.3.5 場發射掃描式電子顯微鏡 36
第四章、結果與討論 37
4-1 實驗分析 37
4.1.1 X射繞線分析 37
4.1.2 拉曼光譜分析 38
4.1.3催化材料銅與矽在不同位置時之影響 39
4.1.4 催化層材料濺鍍時間之影響 42
4.1.5 退火溫度之影響 45
4.1.6 持溫時間之影響 48
4.1.7 碳源氣體流量之影響 51
4.1.8 銅碳濺鍍時間之影響 54
五、結論與未來展望 57
5.1 結論 57
5.2 未來展望 58
參考文獻 59

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