臺灣博碩士論文加值系統

本研究利用具凸透反射鏡之全像干涉曝光系統，在基板上形成連續漸變週期光柵結構，最終將該結構應用於波導模態共振及啁啾布拉格光柵兩種光學元件上。波導模態共振元件是在連續漸變週期光柵上蒸鍍上一層Ta2O5材料形成波導光柵結構，當入射光波長滿足相位匹配條件時便會產生高反射的現象，為了滿足漸變週期光柵在各個位置的相位匹配條件，我們利用金屬遮罩輔助電子束蒸鍍，成功在波導模態共振元件上形成厚度連續漸變的Ta2O5薄膜並幾乎滿足各個位置的相位匹配條件，最終實現波長範圍500 ~ 700 nm的窄線寬濾波器，在垂直極化及水平極化下線寬僅有4.2及0.78 nm，且連續漸變的結構使得該元件同時具備光譜重現的特性，作為光譜儀亦有相當好的特性。
此外，本研究也將連續漸變週期光柵結構應用於啁啾布拉格光柵上，由於波導上各處的光柵週期不同，因此反射的布拉格波長具有群體延遲的特性，這使得該元件具有色散補償或脈衝壓縮的效果。在該項目中光柵材料為氧化石墨烯，光柵週期在1 cm的長度下僅有8.29 nm的變化，而後利用基板轉移技術將週期變化緩慢的光柵結構覆蓋在矽波導上，形成啁啾布拉格光柵元件，在O band的工作波段內有超過20 nm的反射頻寬，最高E/R值約為20 dB，未來若將該技術應用於C band的工作範圍上，應能實現相當有效的色散補償器。

In this work, continuously-chirped grating structures are formed on the substrate by utilizing the laser interference lithography system equipped with a convex mirror. As-formed chirped grating structures are applied to implement guided mode resonance (GMR) filters and the on-chip chirped Bragg gratings. The GMR filter is formed by depositing a high-refractive-index Ta2O5 film atop continuously-chirped gratings. To fulfill the phase-matching condition of the grating at each position, we utilized metal-mask to assist e-beam evaporation and successfully form a continuously-gradient Ta2O5 film on the GMR filter. As a result, we successfully demonstrated narrow bandwidth filters with an operating wavelength range of 500~700 nm. The bandwidth of the transmission dips is 4.2 and 0.78 nm for vertical and horizontal polarization direction, respectively. The proposed chirped GMR filter can serve as a dispersive element for on-chip spectroscopy with superior resolution.
In this study we also implement chirped waveguide Bragg gratings using continuously gradient-period grating structures. Chirped gratings provide spatially varied grating period that enables linear group delay response, thus enables applications in dispersion compensation or pulse compression. Gradient-period graphene oxide (GO) gratings (ΔP = 8.29 nm/cm) are implemented for the following transfer onto a silicon strip waveguide using PMMA-assisted transfer process. The resulting device provides a broad reflection bandwidth of over 20 nm and an extinction ratio of up to 20 dB for 1-cm-long GO/silicon hybrid chirped gratings in the O band wavelengths.

中文審定書. i
英文審定書 ii
致謝 iii
中文摘要. iv
Abstract v
圖目錄. ix
表目錄 xiii
第一章 緒論 1
1-1 研究背景 . 1
1-2 研究動機 . 2
第二章 漸變週期光柵 7
2-1 文獻回顧 . 7
2-2 次波長光柵製程 . 10
2-2.1 平坦化光場全像干涉系統 . 10
3-1.2 漸變週期光柵曝光系統 . 12
2-3 光柵檢測系統 . 14
2-3.1 掃描式電子束顯微鏡(Scanning electron microscope, SEM) 14
2-3.2 原子力顯微鏡(Atomic force microscope, AFM) . 15
2-3.3 光柵繞射系統(Diffraction system) . 17
第三章 波導模態共振元件 24
3-1 文獻回顧 . 24
3-1.1 高對比折射率光柵 . 24
3-1.2 漸變式波導模態共振濾波器 . 26
3-1.3 波導模態共振頻譜儀 . 28
3-2 波導模態共振原理 29
3-3 波導模態共振原理之特性 31
3-3.1 極化選擇性 . 31
3-3.2 共振線寬 . 31
3-4 嚴格耦合波分析 33
3-4.1 嚴格耦合波分析原理 . 33
3-4.2 弱調制波導光柵 . 36
3-5 波導模態共振濾波器模擬 38
3-6 波導模態共振濾波器製程 41
3-6.1 漸變週期光柵製程 . 41
3-6.2 波導模態共振濾波器製程 . 42
3-7 波導模態共振元件製程結果 45
3-7.1 漸變週期光柵檢測 . 45
3-7.2 Ta2O5 漸變厚度 46
3-8 波導模態共振元件量測 47
3-8.1 量測系統 . 47
3-8.2 可見光濾波器量測 . 48
3-8.3 單波長雷射濾波器量測 . 50
3-8.4 光譜重建 . 52
第四章 啁啾布拉格光柵 54
4-1 文獻回顧 . 54
4-2 布拉格光柵原理 54
4-3 數值分析 58
4-3.1 轉移矩陣法 . 58
4-3.2 特徵模態展開法 . 61
4-4 啁啾布拉格光柵製程 62
4-4.1 氧化石墨烯介紹 . 62
4-4.2 氧化石墨烯製備 . 63
4-4.3 氧化石墨烯光柵製程 . 64
4-4.4 光柵基板轉移技術 . 65
4-5 氧化石墨烯光柵檢測 66
4-5.1 拉曼光譜學 . 66
4-5.2 大面積氧化石墨烯微結構製程 . 68
4-6 啁啾布拉格光柵製程結果 70
4-7 啁啾布拉格光柵量測 72
4-7.1 矽波導晶片量測系統 . 72
4-7.2 啁啾布拉格光柵量測 . 73
第五章 結論及未來工作 74
5-1 結論 74
5-1.1 波導模態共振元件 . 74
5-1.2 啁啾布拉格光柵 . 75
5-2 未來工作 76
5-2.1 二維波導模態共振元件 . 76
5-2.2 全頻譜波導模態共振元件 . 77
5-2.3 優化啁啾布拉格光柵 . 77
第六章 參考文獻 79

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