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[1] Chan H-J, Huang B-C, Wang L-W, Liao K-H and Lo C-Y 2017 Porosity reduction in inkjet-printed copper film by progressive sintering on nanoparticles Thin Solid Films 627 33-8 [2] Lin C-Y, Wang L-W, Liao K-H and Lo C-Y 2017 Structure compensation and illumination uniformity improvement through inkjet printing in organic light-emitting diode subpixels Journal of Vacuum Science & Technology B 35 020601 [3] Wang L-W and Lo C-Y 2017 Morphology and conductivity improvement of metal mesh through roll-to-roll-compatible near-infrared sintering IET Micro & Nano Letters 12 886-90 [4] Allen M L, Aronniemi M, Mattila T, Alastalo A, Ojanperä K, Suhonen M and Seppä H 2008 Electrical sintering of nanoparticle structures Nanotechnology 19 175201 [5] Liao K-H and Lo C-Y 2014 Thermoresistive strain sensor and positioning method for roll-to-roll processes Sensors 14 8082-95 [6] Jahn S F, Engisch L, Baumann R R, Ebert S and Goedel W A 2008 Polymer microsieves manufactured by inkjet technology Langmuir 25 606-10 [7] Kim C, Nogi M, Suganuma K and Yamato Y 2012 Inkjet-printed lines with well-defined morphologies and low electrical resistance on repellent pore-structured polyimide films ACS Applied Materials & Interfaces 4 2168-73 [8] Kim Y, Jang S and Oh J H 2015 High-resolution electrohydrodynamic printing of silver nanoparticle ink via commercial hypodermic needles Applied Physics Letters 106 014103 [9] Nguyen P Q, Yeo L-P, Lok B-K and Lam Y-C 2014 Patterned surface with controllable wettability for inkjet printing of flexible printed electronics ACS Applied Materials & Interfaces 6 4011-6 [10] Zhao N, Chiesa M, Sirringhaus H, Li Y, Wu Y and Ong B 2007 Self-aligned inkjet printing of highly conducting gold electrodes with submicron resolution Journal of Applied Physics 101 064513 [11] Gogolides E, Constantoudis V, Patsis G P and Tserepi A 2006 A review of line edge roughness and surface nanotexture resulting from patterning processes Microelectronic Engineering 83 1067-72 [12] Kang B J and Oh J H 2010 Geometrical characterization of inkjet-printed conductive lines of nanosilver suspensions on a polymer substrate Thin Solid Films 518 2890-6 [13] Fukutome H, Momiyama Y, Kubo T, Tagawa Y, Aoyama T and Arimoto H 2006 Direct evaluation of gate line edge roughness impact on extension profiles in sub-50-nm n-MOSFETs IEEE Transactions on Electron Devices 53 2755-63 [14] Kim C, Nogi M and Suganuma K 2012 Electrical conductivity enhancement in inkjet-printed narrow lines through gradual heating Journal of Micromechanics and Microengineering 22 035016 [15] Öhlund T, Örtegren J, Forsberg S and Nilsson H-E 2012 Paper surfaces for metal nanoparticle inkjet printing Applied Surface Science 259 731-9 [16] Virtanen J, Bjorninen T, Ukkonen L and Sydanheimo L 2010 Passive UHF inkjet-printed narrow-line RFID tags IEEE Antennas and Wireless Propagation Letters 9 440-3 [17] Huang B-C, Chan H-J, Hong J-W and Lo C-Y 2016 Methodology for evaluating pattern transfer completeness in inkjet printing with irregular edges Journal of Micromechanics and Microengineering 26 065009 [18] Chandhok M, Datta S, Lionberger D and Vesecky S 2007 Impact of line-width roughness on Intel's 65-nm process devices. In: Advances in Resist Materials and Processing Technology XXIV: International Society for Optics and Photonics) p 65191A [19] Ban Y, Sundareswaran S and Pan D Z 2010 Electrical impact of line-edge roughness on sub-45-nm node standard cells Journal of Micro/Nanolithography, MEMS, and MOEMS 9 041206 [20] Chen C-T and Tu K-Z 2012 Morphologies of conductive looped liquid lines inkjet-printed on substrate surfaces Journal of Micromechanics and Microengineering 22 055001 [21] Kawata I, Hasegawa N and Takami S 2006 New World of CD-SEM in Utilization of Design Data Hitachi Review 55 61 [22] Yamaguchi A, Steffen R, Kawada H and Iizumi T 2006 Bias-free measurement of LER/LWR with low damage by CD-SEM. In: Metrology, Inspection, and Process Control for Microlithography XX: International Society for Optics and Photonics) p 61522D [23] Shin C 2016 Variation-Aware Advanced CMOS Devices and SRAM, (Dordrecht: Springer Netherlands) pp 19-35 [24] Dimatix F 2008 Materials Printer & Cartridge DMP-2800 Series Printer & DMC-11600 Series Cartridge FAQ. [25] Mu L, Hu Z, Zhong Z, Jiang C, Wang J, Peng J and Cao Y 2017 Inkjet-printing line film with varied droplet-spacing Organic Electronics 51 308-13 [26] Bunday B D, Bishop M, Villarrubia J S and Vladar A E 2003 CD-SEM measurement line-edge roughness test patterns for 193-nm lithography. In: Metrology, Inspection, and Process Control for Microlithography XVII: International Society for Optics and Photonics) pp 674-89 [27] Yamaguchi A, Nakagaki S R and Kawada H 2005 Cd-sem technologies for 65-nm process node Hitachi Review 54 15 [28] Basaran O A, Gao H and Bhat P P 2013 Nonstandard inkjets Annual Review of Fluid Mechanics 45 85-113 [29] Hong Y, Chen Z, Trofimov A A, Lei J, Chen J, Yuan L, Zhu W, Xiao H, Xu D and Jacobsohn L G 2017 Direct inkjet printing of miniaturized luminescent YAG: Er3+ from sol-gel precursor Optical Materials 68 11-8
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