臺灣博碩士論文加值系統

本研究中以製程簡單、成本低廉的熔膠凝膠法製備氧化鋅還原氧化石墨烯複合薄膜，並比較溶膠凝膠法製備的氧化鋅薄膜元件應用，針對氧化鋅還原氧化石墨烯複合薄膜做材料分析，可以得知還原氧化石墨烯粉末成功複合。另外利用水熱合成法於氧化鋅薄膜垂直成長氧化鋅奈米線。在上述的樣品表面以奇異筆做為光阻劑作用，塗畫出I字形狀圖案，達到試片圖案化的目的，因為以銀膠作為電極，圖案化具有改善電極間距及材料與電極之間接觸面積的問題，後續進一步在試片表面進行雷射雕刻(10640nm)，對於元件應用具有表面修飾的效果。最後將樣品進行材料晶體分析，包含SEM、EDS、XRD、XPS、PL、Raman及TEM。
在元件應用方面，以複合薄膜及奈米線結構，對其進行光感測(Green、Blue & UV-LED)、氣體感測(EtOH、IPA、DMK、MeOH & Tol)及濕度感測(RH 35%~95%)。結果顯示氧化鋅薄膜經圖案化，可以達到提高光感測響應值的作用；複合薄膜相比氧化鋅薄膜，則具有增加光感測、氣體感測及濕度感測響應值等趨勢；以氧化鋅奈米線對其圖案化且雷射雕刻後，圖案化可以增加光感測性質，雷射雕刻則可以改善材料中缺陷比，進而增加氣體感測及濕度感測的效果。

In this study, the zinc oxide-reduced graphene oxide (ZnO-rGO) nanocomposite thin film was prepared by a sol-gel method with simple process and low cost, and the zinc oxide film component prepared by the sol-gel method was compared. According to the material analysis of the ZnO-rGO thin film, it can be known that the rGO powder is successfully compounded. In addition, the hydrothermal synthesis method is used to vertically grow a ZnO nanowire on the ZnO thin film. On the surface of the above sample, a marker pen is used as a photoresist to paint an I-shaped pattern to achieve the purpose of patterning the test piece. Because colloidal silver is used as an electrode, patterning has problems of improving the electrode spacing and the contact area between the material and the electrode. Further laser engraving (10640 nm) on the surface of the material has the effect of surface modification for component applications. Finally, the samples were subjected to material crystal analysis including SEM, EDS, XRD, XPS, PL, Raman and TEM.
For component applications, photo-sensing (Green, Blue & UV-LED), gas sensing (ethanol, isopropanol, acetone, methanol & Toluene) and humidity sensing (RH 35%~95%) with composite thin film and nanowire structure. The results show that the ZnO film can be patterned to improve the light sensing response value. Compared with the ZnO film, the composite film has the trend of increasing light sensing, gas sensing and humidity sensing response. After the nanowire is patterned and laser-engraved, patterning can increase the light sensing property, and laser engraving can improve the defect ratio in the material, thereby increasing the effect of gas sensing and humidity sensing.

目錄
中文摘要 i
Abstract ii
誌謝 iii
目錄 iv
表目錄 viii
圖目錄 x
第一章 序論 1
1.1 前言 1
1.2 氧化鋅(ZnO)材料介紹 2
1.2.1 氧化鋅介紹 2
1.2.2 氧化鋅製備 3
1.2.3 氧化鋅之發光機制 4
1.2.4 氧化鋅材料複合之影響 5
1.3 還原氧化石墨烯(Reduced Graphene Oxide)材料 6
1.4 半導體感測器簡介 7
1.4.1 金屬氧化物半導體(MOS)氣體感測器之發展 7
1.4.2 半導體材料表面氣體吸附機制 8
1.4.3 半導體材料氧化鋅表面氧氣吸附作用 10
1.4.4 半導體材料氧化鋅光感測器 13
第二章 文獻回顧 16
2.1 一維奈米材料製程方法 16
2.1.1 氣-固法(Vapor-Solid, VS) 16
2.1.2 氣-液-固法(Vapor-Liquid-Solid, VLS) 17
2.1.3 化學氣相沉積法(Chemical Vapor Deposition) 18
2.1.4 水熱合成法(Hydrothermail method) 19
2.2 溶膠-凝膠法(Sol-Gel) 21
2.2.1 旋轉塗佈法(Spin Coating) 23
第三章 儀器簡介 24
3.1 分析儀器 24
3.1.1 掃描式電子顯微鏡 (Scanning electrons microscope) 24
3.1.2 X光繞射分析儀 (XRD) 27
3.1.3 微光激發光譜儀 (Micro-PL Spectrometer) 28
3.1.4 高解析場發射掃描穿透式電子顯微鏡 (HR-TEM) 30
3.1.5 化學分析電子光譜儀(ESCA)-XPS 31
3.2 製程儀器 32
3.2.1 雷射雕刻機 32
3.3 量測儀器 33
3.3.1 Keithley-4200參數分析儀 33
第四章 實驗方法與步驟 34
4.1 實驗流程與架構 34
4.2 實驗藥品介紹 35
4.2.1 溶膠-凝膠法(Sol-Gel)製備薄膜之材料 35
4.2.2 水熱合成法製備氧化鋅奈米線之材料 35
4.3 製程方法 36
4.3.1 基板準備 36
4.3.2 溶膠-凝膠法(Sol-Gel)製備薄膜 36
4.3.3 水熱法成長氧化鋅奈米線 38
4.3.4 製備試片圖案化(pattern) 39
4.3.5 雷射雕刻薄膜 41
第五章 材料特性分析 42
5.1 SEM表面形貌分析 42
5.1.1 氧化鋅薄膜(ZnO film) 42
5.1.2 氧化鋅還原氧化石墨烯複合薄膜(ZnO-rGO film) 44
5.1.3 氧化鋅奈米線(ZnO NWs) 46
5.2 XRD材料晶向分析 51
5.2.1 氧化鋅薄膜(ZnO film) 51
5.2.2 氧化鋅還原氧化石墨烯複合薄膜(ZnO-rGO film) 52
5.2.1 氧化鋅奈米線(ZnO NWs)圖案化(pattern)之雷射雕刻 53
5.3 Raman分析 55
5.4 PL光學性值分析 57
5.4.1 氧化鋅奈米線(ZnO NWs)圖案化(pattern)之雷射雕刻 57
5.5 TEM分析 59
5.5.1 氧化鋅奈米線(ZnO NWs) 59
5.5.2 氧化鋅奈米線(ZnO NWs)圖案化(pattern)之雷射雕刻 61
第六章 元件特性量測 63
6.1 光感測器(Photo detector) 63
6.1.1 氧化鋅薄膜(ZnO film) 65
6.1.2 氧化鋅還原氧化石墨烯複合薄膜(ZnO-rGO film) 73
6.1.3 氧化鋅奈米線(ZnO NWs) 77
6.2 氣體感測器(Gas sensor) 80
6.2.1 氧化鋅奈米線(ZnO NWs)圖案化(pattern)工作溫度 81
6.2.2 氧化鋅還原氧化石墨烯複合薄膜(ZnO-rGO film) 91
6.3 濕度感測器(Humidity sensor) 93
6.3.1 氧化鋅奈米線(ZnO NWs)圖案化(pattern)濕度感測 94
6.3.2 氧化鋅還原氧化石墨烯複合薄膜(ZnO-rGO film) 96
第七章 結論與未來展望 97
7.1 結論 97
7.2 未來展望 99
參考文獻 100

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