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Author:葉韋德
Author (Eng.):Yeh, Wei-Te
Title:利用二階段熱氧化製備氧化銅半導體及其光電性質研究
Title (Eng.):Cupric oxide semiconductor prepared by two-step thermal oxidation and its photoelectric properties
Advisor:黃智賢黃智賢 author reflink
advisor (eng):Hwang, Jih-Shang
Oral Defense Committee:洪文誼洪魏寬
Oral Defense Committee (eng):Hung, Wen-YiHung, Wei-Kuan
oral defense date:2019-07-30
degree:Master
Institution:國立臺灣海洋大學
Department:光電科學研究所
Narrow Field:工程學門
Detailed Field:電資工程學類
Types of papers:Academic thesis/ dissertation
Publication Year:2019
Graduated Academic Year:107
language:Chinese
number of pages:34
keyword (chi):氧化銅半導體太陽能電池
keyword (eng):Cupric oxidesemiconductorsolar cell
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本論文中我們已經成功的使用兩階段氧化薄銅片的方法(第一階段:1010oC、40torr、2hr;第二階段:600oC、1atm、3或6或12小時)成功製備出高品質的氧化銅(cupric oxide),而且該樣本表面緻密沒有剝落的現象。
從XRD分析可以證明第二階段氧化的時間越久,氧化銅的品質越好,基本上,12hr熱處理便足以使銅片完全轉成氧化銅。
從吸收光譜製作出Tauc plot曲線,可以初步決定出我們所生長的氧化銅能隙約為1.25~1.28eV。光激發光頻譜分析,則顯示其能隙有可能可達1.3~1.4eV。
光電導實驗發現,在氧化六小時的樣品可得到最大的光、暗電流差,表示此樣品可製作成紅外光(<900nm)的感測器。未來,我們預期可將該樣本製作成光伏太陽能電池,如此的電池將會是地球蘊含量豐富、低成本且高效率的太陽能電池。
In this paper, we have successfully used two-step oxidized copper sheet (first stage: 1010oC, 40torr, 2hr; second stage: 600oC, 1atm, 3 or 6 or 12 hours) to successfully prepare high quality cupric oxide. (cupric oxide), and the sample surface is dense without peeling off.
From the XRD analysis, it can be proved that the longer the oxidation time of the second step, the better the quality of the cupric oxide. Basically, the 12 hr heat treatment is sufficient to completely convert the copper sheet into cupric oxide.
By making a Tauc plot curve from the absorption spectrum, we can preliminarily determine that the cupric oxide gap we grow is about 1.25~1.28eV. The spectrum analysis of the optical excitation light shows that the energy gap can reach 1.3~1.4eV.
The photoconductivity experiment found that the maximum light and dark current difference was obtained in the sample oxidized for six hours, indicating that the sample could be fabricated into an infrared light (<900 nm) sensor. In the future, we expect to make this sample into a photovoltaic solar cell, which will be a solar cell with rich, low cost and high efficiency.
圖 1.氧化亞銅和氧化銅的發展 6
圖 2. 氧化銅的歷史發展 7
圖4. 文獻中以熱氧化法製作氧化銅的XRD圖 8
圖3. CuO-Cu2O相圖。 8
圖 5.RRUFF資料庫的氧化銅表面形貌 9
圖 6.氧化銅3D分子結構 9
圖 7 半導體電子電洞對產生示意圖 11
圖 8. 光導元件示意圖 13
圖 9. 光導量測元件結構圖 13
圖 10. 高溫爐管加熱系統架構圖 13
圖 11. 射頻磁控濺鍍系統架構圖 14
圖 12. 射頻磁控濺鍍系統系統外部實際照片 15
圖 13. 射頻磁控濺鍍系統系統外部實際照片 15
圖 14. 600oC常壓4h所燒結的氧化銅碎片。 16
圖 15. 氧化銅-氧化氧銅的溫度及氧氣壓力相圖 16
圖 16. 二階段氧化所製備氧化銅樣品俯視照 17
圖 17. 氧化銅的XRD圖 17
圖 18. 氧化銅JCPD資料庫 17
圖 19. (A )3小時,(B)6小時,12小時,(D)文獻參考 18
圖 20. 拉曼光譜的半高寬圖 19
圖 21. 氧化3小時的吸收光譜圖及Tauc plot圖 19
圖 22. 氧化6小時的吸收光譜圖及Tauc plot圖 20
圖 23. 氧化12小時的吸收光譜圖及Tauc plot圖 20
圖 24. 氧化3小時的PL圖 21
圖 25. 氧化6小時的PL圖 21
圖 26. 氧化12小時的PL圖 21
圖 27. 氧化不同時間的PL半高寬圖 21
圖 28. 不同氧化時間之光暗電流I-V圖(a) 3小時 (b) 6小時 (c) 12小時 23
圖 29. 不同時間的光暗電流圖 24
圖 30. 光學特性,偏壓10V 24
圖 31. ΔI/Dark圖 24
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16. Stephen Reynolds, et al, in Springer Handbook of Electronic and Photonic Materials, edited by Safa Kasap and Peter Capper (Springer International Publishing, Cham, 2017), pp. 1.
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