矽光子積體電路擁有高頻寬及高速傳輸之優點，可將此應用於資料高速傳輸上，也可應用於光學雷達上，可以擁有比微波更高的感測解析度。本論文將分析並量測光通訊用的八通道分波多工器以及設計光學雷達所需的光學天線。
首先，將本實驗室透過比利時微電子研究中心所提供之矽光子製程，在絕緣層覆矽基板上製作八通道分波多工器改良版本，並進行量測及分析，探討造成實驗與模擬設計結果不同的原因，發現製程誤差會導致濾出波段之中心波長改變，我們將考慮製程所影響的誤差再重新進行計算與模擬，其所得結果之趨勢與量測相符。
此外，本論文利用台積電標準CMOS 90 nm及IMEC製程進行光學天線之模擬，成功設計透過具週期性側壁結構型波導來達到發射角0度及均勻出光的500 μm光學天線，且由FDTD模擬方法得到遠場中的發散角之半峰全寬為0.12度，並將此設計成功下線。

Silicon photonics circuits have the advantages of high-bandwidth and high-speed transmission. We can apply this technology to high-speed data transmission as well as the light detection and ranging (Lidar) can provide optical sensing with higher resolution than microwave. This thesis will investigate the eight-channel demultiplexers for optical communication and the optical phase arrays for Lidar applications.
Firstly, we analyze and measure the improved version of the eight-channel demultiplexers that were designed on the silicon-on-insulator (SOI) platform and fabricated by IMEC multi-project-wafer (MPW) services. We investigate the possible causes for the difference between the measured and simulation results. It is found that the fabrication error on the subwavelength gratings can change the center wavelength and channel spacing of the filter bands. The recalculation and simulation with the measured grating shape is consistent with the measured results.
We also design and simulate the optical phase arrays that includes optical splitting devices and an array of optical antenna based on the TSMC’s CMOS 90-nm and IMEC’s process. The designed 500-μm long optical antenna with a periodic loaded side-grating structure can achieve an emission angle of 0 degrees and uniform light output. The FWHM of the main beam is 0.12° in θ direction, and the design is taped out for fabrication successfully.

摘要 I
Abstract II
致謝 IV
目錄 V
圖目錄 VIII
表目錄 XIII
第一章 研究動機與元件介紹 1
1-1　前言 1
1-2　研究動機 2
1-3　絕緣層覆矽平台 3
1-4　標準互補式金氧半平台 4
1-5　光柵理論介紹 5
1-6　論文架構 6
第二章 元件結構介紹 7
2-1　光柵耦合器 7
2-2　八通道分波多工器 8
2-3　光學天線 10
2-4　多模干涉耦合器 12
第三章 元件模擬設計 14
3-1　模擬方法介紹 14
3-1-1　有限時域差分法 14
3-1-2　有限特徵模態法 16
3-2　光柵耦合器 17
3-3　八通道分波多工器 19
3-4　光學相控陣 22
3-4-1　光學天線 23
3-4-2　光學天線陣列 39
3-4-3　多模干涉耦合器 41
3-4-4　晶片佈局 43
第四章 元件量測結果 45
4-1　量測系統架構 45
4-2　光電積體電路後製程 47
4-3　光柵耦合器分析 50
4-4　八通道分波多工器分析 52
4-5　多模干涉耦合器分析 65
第五章 結論與未來發展 67
5-1　成果與討論 67
5-2　未來發展方向 68
參考資料 69

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