臺灣博碩士論文加值系統

鎂及其合金近年來由於其優越的機械性質、回收再利用性佳，符合業界量產製程經濟效益之需求，使之成為常用之結構材料。然而鎂及其合金在大氣環境下耐蝕性較差，導致應用於室外或人體環境上的限制，其製品也因此而降低安全係數，使得於海事應用上仍有顧慮，侷限未來發展
本研究以常壓電漿噴射沉積技術(Atmospheric-Pressure Plasma Jet; APPJ)，沉積氧化矽薄膜於鎂合金AZ91D表面，且藉由電漿参數之改變來分析對於氧化矽薄膜成長結構與其表面物理對於提升耐腐蝕特性之影響與差異。例如前驅物TESO與HNDSN，載氣體種類改變(Ar & O2)，載氣體流量之變化。來探討對於氧化矽薄膜表面形貌之變化、化學結構之組成之探討與分析。藉由各種理論分析與探討薄膜物理特性與化學結構來說明常壓電漿沉積氧化矽薄膜於鎂合金之結果。
其後以電化學之動電位極化曲線以及阻抗頻譜分析之測量表明，相較於原始之鎂合金AZ91D試片，經過鍍膜後之試片其具有較高之腐蝕電位以及更低之腐蝕密度，此結果證實可利用沉積氧化矽薄膜於試片表面之方式，提升鎂合金AZ91D基材之抗腐蝕能力。最後，以在APPJ-1800製備的氧化矽薄膜，於3.5 wt%之NaCl水溶液中進行七十二小時之浸泡測試，而其結果顯示在經過七十二小時之浸泡後，所鍍薄膜試片之抗腐蝕能力仍然高於原始之鎂合金AZ91D試片，故表示本研究所鍍之氧化矽可有效的提升鎂合金AZ91D之抗腐蝕能力，為鎂合金之防腐蝕處理提供一有效且具有成本效益之方法。

Magnesium alloys are used in many industries because of their excellent mechanical properties. Their high strength/weight ratio and excellent machinability make magnesium alloys ideal construction materials. In addition, the high recyclability of magnesium makes it very cost-effective for use in industrial manufacturing. However, poor corrosion resistance restricts the applications of magnesium and its alloys in marine environments and in biological applications. The ability to increase the corrosion resistance of magnesium and its alloys is crucial to increase the range of applications.The ability to increase the corrosion resistance of magnesium and its alloys is crucial to increase the range of applications. To improve the fault, it is important to impart a high corrosion resistance without losing the superior physical and mechanical properties.
This study focused on the development of atmospheric pressure plasma jet (APPJ) deposit SiOx films on the surface of magnesium alloys with various operational conditions such two kinds of precursor, carrier gas (O2 & Ar) and carrier gas flow rate. SiOx films were characterized by a scanning electron microscopy (SEM), transmission electron microscopy (TEM), Fourier-transform infrared spectroscopy (FTIR) to study the surface morphology, and composition. In addition, the corrosion protection afforded by such thin films was investigated by electrochemicaltechniques, and relationships among composition, structure, and electrochemical properties of these films are reported.
The potentiodynamic polarization tests and electrochemical impedance spectroscopy (EIS) measurements show that both SiOx films coated on AZ91D alloys have more positive corrosion potential and lower corrosion current density than AZ91D substrates, indicating the corrosion resistance of AZ91D can be improved by depositing SiOx film on its surface. Finally, inorganic SiOx film (APPJ-1800) after immersion in 3.5 wt.% NaCl solution for 72 h showed that still batter corrosion resistance than AZ91D alloy.The SiOx film represent an interesting alternative for improving the anti-corrosion performance of various materials in a cost-effective approach.
Keywords: magnesium alloys, Atmospheric pressure plasma jet, inorganic-like silicon oxide (SiOx) thin films, anti-corrosion layers

中文摘要 I
ABSTRACT II
目錄 V
表目錄 VIII
圖目錄 X
第一章 緒論 1
1.1 前言 1
1.2 新式抗腐蝕處理--常壓電漿技術 4
1.3 研究動機 6
第二章 文獻回顧 7
2.1 鎂金屬金屬與其腐蝕特性 7
2.1.1 金屬特性 7
2.1.2 鎂合金腐蝕 9
2.1.3 金屬元素對鎂之影響 13
2.2 表面處理以提升腐蝕能力之技術 20
2.2.1電鍍與無電鍍(Electro-plating and electroless-plating) 20
2.2.2化成處理(Conversion) 20
2.2.3陽極處理(Anodizing) 21
2.2.4微弧氧化 (Micro-Arc Oxidation) 21
2.2.5氣相沉積法(Vapor Deposition) 22
2.3電漿簡介 25
2.3.1 電漿態定義與原理 25
2.3.2 電漿化學反應 29
2.3.3 常壓電漿基本特性 31
2.4.4 常壓電漿應用之相關研究 36
第三章 實驗設備與程序 42
3.1 實驗目的 42
3.2 實驗藥品與耗材 44
3.3 實驗步驟 46
3.3.1 基材準備 46
3.3.2 實驗設備系統 46
3.3.3 實驗參數 48
3.3.4 實驗分析及儀器原理 49
第四章 結果與討論 63
4.1 氧化矽薄膜成長之性質分析 63
4.1.1前驅物TESO與HNDSN 65
4.1.2 載氣體流量效應之影響 76
4.1.3 不同種類之載氣氣體影響 102
4.2 氧化矽薄之腐蝕特性研究 111
4.2.1 動電位極化曲線分析 111
4.2.2 阻抗頻譜分析 115
4.3 長時效抗腐蝕之測試 122
4.3.1 綠光干涉儀腐蝕表面粗糙度分析 122
4.3.2 長時效測試之表面形貌觀察 131
4.3.3 傅立葉紅外線光譜分析 138
4.3.4 長時效之阻抗頻譜分析 140
4.4 常壓電漿沉積氧化矽薄膜理論之探討 145
第五章 結論 149
第六章 參考文獻 151
附 錄 163

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