臺灣博碩士論文加值系統

本研究透過斜向沉積技術結合直流（DC）磁控反應濺鍍，並控制沉積期間氮氣流
量與基板溫度，成功的製鍍出氮化鈦奈米結構。通過在沉積過程中控制基板方向生長
傾斜的奈米結構陣列，討論隨著通入氮氣和氬氣中氮氣比例的增加、工作壓力和基板
加熱對沉積過程的影響，透過X 光繞射分析(XRD)分析氮化鈦的結晶向。氮化鈦奈米結
構應用於表面增強拉曼光譜之染料分子探測，利用羅丹明6G (R6G)分子溶液於基板上
並藉由532nm 激發波長，量測其表面增強拉曼散射(Surface Enhance Raman
Scattering, SERS)訊號。探討奈米柱狀結構的長度和相應的電阻率對SERS 訊號強度
的影響。為了研究耐用度，比較氮化鈦和銀奈米柱陣列隨時間其SERS 訊號強度的變
化。

Titanium nitride (TiN) nanostructures were fabricated by glancing angle deposition(GLAD) in direct current (DC) magnetron reactive sputtering. Slanted nanorods arrays (NRAs)was grown by controlling the substrate orientation during deposition. The impact of nitrogen flow rate relative to that of argon during deposition, and the deposition substrate temperatures of TiN were discussed. The TiN NRAs were analyzed by X-ray diffraction (XRD). The surface enhance Raman scattering (SERS) signals from Rhodamine 6G (R6G) of dropped on the substrates were detected by excited wavelength at 532nm. The influence of the length of TiN nanorods and corresponding resistivity on SERS peak intensities was investigated. In order to
study the durability, the difference of variation of SERS intensity between TiN and Ag deposited
NRAs with time was proposed here.

中文摘要…………………………………………………………………………………ⅰ
英文摘要…………………………………………………………………………………ⅱ
誌謝………………………………………………………………………………………ⅲ
目錄………………………………………………………………………………………iv
表目錄……………………………………………………………………………………ⅶ
圖目錄……………………………………………………………………………………ⅷ
第一章 緒論與文獻回顧……………………………………………………………………………………1
1.1 前言……………………………………………………………………………………1
1.2 文獻回顧……………………………………………………………………………………2
1.2.1 傳統表面增強拉曼散射基板之介紹 …………………………………………2
1.2.2 傳統SERS基板所遇到之問題與解決方法……………………………………4
1.2.3 替代電漿子材料-過度金屬氮化物……………………………………………7
1.2.4 氮化鈦作為表面增強拉曼散射基板……………………………………………………………………………………7
1.2.5 調控氮氬比對氮化鈦薄膜的影響……………………………………………………………………………………9
1.2.6不同的氮化鈦製備方式應用於表面增強拉曼散射……………………………………………………………………………10
1.2.7氮化鈦SERS基板之耐用度……………………………………………………………………………………16
1.3 研究動機……………………………………………………………………………………22
第二章 實驗原理……………………………………………………………………………………23
2.1 表面增強拉曼散射……………………………………………………………………………………23
2.1.1 拉曼散射與拉曼散射光譜……………………………………………………………………………………23
2.1.2 表面增強拉曼散射(Surface Enhanced Raman Scattering)……………………………………………25
2.1.3 增強因子(Enhancement Factor, EF)……………………………………………………………………………………26
2.2 斜向沉積技術……………………………………………………………………………………28
第三章 實驗架構與量測系統……………………………………………………………………………………30
3.1 鍍膜系統……………………………………………………………………………………30
3.2 實驗流程……………………………………………………………………………………32
3.3 奈米斜柱陣列製鍍方式……………………………………………………………………………………34
3.4 量測儀器……………………………………………………………………………………34
3.4.1 光譜量測系統……………………………………………………………………………………34
3.4.2 橢圓偏光儀(Ellipsometry)……………………………………………………………………………………35
3.4.3 化學分析電子光譜(ESCA)……………………………………………………………………………………37
3.4.4 低角度X-射線繞射儀(GIXRD)……………………………………………………………………………………38
3.4.5 高解析熱場發射掃描式電子顯微鏡(Thermal FE-SEM)………………………………………………………………39
3.4.6 拉曼光譜儀……………………………………………………………………………………40
第四章 實驗結果與分析討論……………………………………………………………………………………42
4.1 氮化鈦之薄膜特性……………………………………………………………………………………42
4.1.1 氮化鈦薄膜之微觀結構分析……………………………………………………………………………………42
4.1.2 氮化鈦薄膜之電阻率分析……………………………………………………………………………………44
4.1.3 氮化鈦薄膜XRD晶向分析……………………………………………………………………………………45
4.1.4 氮化鈦薄膜光譜圖……………………………………………………………………………………47
4.1.5 氮化鈦薄膜之介電常數比較…………………………………………………49
4.2 氮化鈦奈米柱狀結構……………………………………………………………………………………51
4.2.1 改變通入氮氣量對氮化鈦SERS基板之影響……………………………………………………………………………………51
4.2.2 基板加熱對氮化鈦SERS基板之影響……………………………………………………………………………………70
4.2.3 不同奈米柱長之氮化鈦對SERS基板之影響……………………………………………………………………………………79
4.2.4 不同孔隙率之氮化鈦對SERS基板之影響……………………………………………………………………………………84
4.3 氮化鈦SERS基板之時間性耐用度測試……………………………………………………………………………………89
第五章 結論……………………………………………………………………………………93
參考文獻……………………………………………………………………………………94

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