臺灣博碩士論文加值系統

本論文提出具ITO電極的電光調變鈮酸鋰微碟形共振元件，藉由碟形上方的圓形電極和與其連接的懸浮導線結構，使其同時具有高電光調變率與高品質因子的特性。其中鈮酸鋰微碟形厚度只有0.4μm，延伸至碟形外圍的漸逝場範圍很大，會造成嚴重的光吸收，使得共振光場無法產生。論文中以ITO透明導電層作為電極層，相較於使用金屬電極，藉由ITO高透光率的特性，可覆蓋在位於微碟邊緣的共振光場上方，有效增強電場強度與電場/光場的重疊積分，用以達成高效率、高品質因子的電光調變。實驗結果顯示，直徑20m微碟形元件的TE及TM共振模態，在未加上ITO電極時的本質品質因子分別為8.2×104和7.5×104，沉積20nm ITO薄膜層後TE及TM模態最大的本質品質因子分別仍有1.8×104和7.1×103，其中TE及TM共振模態的FSR從17.68nm、18.13nm 分別變化為17.82nm、18.31nm。目前文獻上最佳的電光調變微碟形元件(Opt. Express 25(1), 124-129, 2017)，僅有TE模態的電光調變，其調變率為3.41pm/V，本論文提出新型具ITO薄膜之電光調變微碟形元件，其TE及TM模態的電光調變率分別可高達 -30.19 pm/V、-24.31pm/V，TE模態電光調變率增加達8.9倍，且同時具有TE模態與TM模態的高電光調變率。

This thesis proposes an electro-optically modulated lithium niobate microdisc resonant element with ITO electrode is proposed. The circular electrode above the dish and the suspended wire structure connected to it have high electro-optic modulation rate and high quality factor. characteristic. Among them, the thickness of the lithium niobate micro-disc is only 0.4 μm, and the evanescent field extending to the periphery of the dish is large, which causes severe light absorption, so that the resonance light field cannot be generated. In the paper, the ITO transparent conductive layer is used as the electrode layer. Compared with the metal electrode, the high transmittance of ITO can cover the resonant light field at the edge of the microdisk, effectively enhancing the electric field strength and the electric field/light field. The overlap integral is used to achieve electro-optical modulation with high efficiency and high quality factor. The experimental results show that the TE and TM resonance modes of the 20m microdisk-shaped component have the essential quality factors of 8.2×104 and 7.5×104 when the ITO electrode is not added, and TE and TM after depositing the 20 nm ITO film layer. The maximum essential quality factors of the mode are still 1.8×104 and 7.1×103, respectively. The FSR of TE and TM resonance modes are changed from 17.68 nm and 18.13 nm to 17.82 nm and 18.31 nm, respectively. The best electro-optical modulation micro-disc components in the literature (Opt. Express 25(1), 124-129, 2017) have only TE mode electro-optic modulation, and the modulation rate is 3.41 pm/V. The paper proposes a novel electro-optical modulation micro-disc component with ITO film. The electro-optic modulation rate of TE and TM modes can be as high as -30.19 pm/V and -24.31 pm/V, respectively. The TE mode electro-optical modulation rate increases. 8.9 times, and has high electro-optic modulation rate of TE mode and TM mode.

目 錄

中文摘要 i
英文摘要 ii

致謝 iv

目錄 v

圖目錄 vii

表目錄 ix


第一章 緒論 1
1.1 積體光學簡介 1
1.2 鈮酸鋰晶體特性 2
1.3 微型共振腔簡介 4
1.4 ITO透明導電膜 5
1.5 文獻回顧 6
1.6 論文概述 12

第二章 微碟形共振腔理論 14
2.1 微碟形共振模態 14
2.2 耳語廊模態電磁場分佈 15
2.3 光纖耦合因子 18
2.4 品質因子與損耗來源 20
2.5 電光效應 22

第三章 具ITO薄膜之電光微碟形元件製程與量測 25
3.1 元件製程技術 25
3.1.1 晶圓切割 25
3.1.2 晶片清洗 26
3.1.3 薄膜沉積 26
3.1.4 微影製程 27
3.1.5 蝕刻製程 28
3.1.6 高溫熱處理 29
3.1.7 離子佈植 30
3.2 具ITO薄膜之電光微碟形元件製程 33
3.3 元件特性量測技術 36
3.3.1 四點探針量測 36
3.3.2 微碟形元件量測技術 38
3.4 微碟形元件特性量測架設 40
3.4.1 錐形光纖製作 40
3.4.2 元件傳輸頻譜的量測架設 41
3.4.3 電光調變傳輸頻譜的量測架設 43

第四章 實驗結果與討論 44
4.1 鈮酸鋰微碟形元件之製作與特性量測 44
4.1.1 鈮酸鋰微碟形元件之製作 44
4.1.2 具ITO薄膜之鈮酸鋰微碟形元件特性量測 46
4.2 具ITO薄膜之電光調變微碟形元件的設計與製作 47
4.2.1 具ITO薄膜之電光調變微碟形元件的設計 47
4.2.2 具ITO薄膜之電光調變微碟形元件的製作 51
4.3 電光調變微碟形元件之特性量測 54
4.3.1 環形電極開口在+y和-y方向的元件特性比較 54
4.3.2 環形電極開口在-y方向、不同電極參數的元件特性比較 56

第五章 結論 60

參考文獻 62

附件：發表於2018年OPTIC研討會之論文 65

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