臺灣博碩士論文加值系統

本研究以溶膠凝膠法製備矽鈉鈣玻璃(SNC)後添加發泡劑及磨料製成玻璃砂輪。傳統研磨材料多以樹脂及金屬作為接合劑，隨著半導體製程中拋光研磨性能之要求日益增加，因此本研究擬以玻璃作為接合劑，除了增加研磨盤及其研磨材之壽命，並提升研屑排除及散熱之效果，以提升研磨效率。本研究目的為開發出不含硼之矽鈉鈣玻璃並加入碳酸鈣作為發泡劑，探討不同的發泡溫度及發泡時間對於泡沫玻璃微結構的影響。藉由粉末燒結法製備玻璃接合材料並進行密度、熱穩定性、微結構及磨耗率分析。
根據密度、熱穩定性、微結構及磨耗率的實驗結果顯示SNC1-3 及SNC1-4 添加粒徑0.2-0.8 μm 的CaCO3 加入鑽石磨料以700 及720℃持溫一小時發泡為最佳的樣品，SNC1-3 及SNC1-4 在700℃持溫一小時密度分別為0.40 及0.45 g/cm3，在720℃持溫一小時密度分別為0.38 及0.40 g/cm3。在磨耗率方面SNC1-3 及SNC1-4 在700℃持溫一小時磨耗率分別為0.15 及0.11 mm2/N，在720℃持溫一小時磨耗率分別為0.14 及0.10 mm2/N。

Soda-lime glass (SNC) was prepared by sol-gel method with foaming agent and abrasives added in this study. The glass was used as binder to increase the life of the grinding disk and abrasive materials, instead of conventional abrasive materials like resin and metal. The glass binder could be used to eliminate grinding debris and dissipate heat to improve grinding efficiency. The purpose was to develop a boron-free soda-lime glass with calcium carbonate as foaming agent. The glass binder material was prepared by powder sintering method and investigated using XRD, SEM and abrasion rate. The effects of different foaming temperatures and foaming times on the microstructure of foam glass was discussed.
According to the results, SNC1-3 and SNC1-4 added 0.2-0.8 μm CaCO3 with diamond abrasives foaming at 700℃and 720℃ for an hour show the best performance. The density of SNC1-3 foaming at 700℃ is 0.40 g/cm3, and foaming at 720℃ is 0.38 g/cm3. The wear rate of SNC1-3 foaming at 700℃ is 0.15 mm2/N, and foaming at 720℃ is 0.14 mm2/N. The density of SNC1-4 foaming at 700℃ is 0.45 g/cm3, and foaming at 720℃ is 0.40 g/cm3. The wear rate of SNC1-4 foaming at 700℃ is 0.11 mm2/N, and foaming at 720℃ is 0.10 mm2/N.

摘要 .............................................................................................................. i
ABSTRACT ................................................................................................... ii
誌謝 .............................................................................................................. iv
目錄 .............................................................................................................. v
表目錄 .......................................................................................................... viii
圖目錄 ........................................................................................................... ix
第一章 緒論 .................................................................................................... 1
1.1 前言 .......................................................................................................... 1
1.2 研究目的 ................................................................................................... 3
第二章 基礎理論與文獻回顧 ............................................................................4
2.1 接合劑 ...................................................................................................... 4
2.1.1 玻璃作為接合劑之文獻 ............................................................................4
2.2 玻璃之概念及構造 .....................................................................................5
2.2.1 玻璃之定義 ............................................................................................ 5
2.2.2 玻璃之組成及其影響 ............................................................................. 6
2.2.3 矽酸鹽玻璃之結構 ................................................................................. 7
2.2.4 玻璃燒結機制 .........................................................................................9
2.3 發泡劑 ..................................................................................................... 10
2.3.1 以碳酸鈣作為發泡劑 ............................................................................. 10
2.3.2 發泡反應機制 ....................................................................................... 11
2.3.3 氣泡成長模型分析 ................................................................................ 13
2.4 粉末粒徑之影響 ...................................................................................... 14
第三章 實驗方法與量測 ................................................................................. 18
3.1 實驗藥品規格 ........................................................................................... 18
3.1.1 實驗用藥品資料 ..................................................................................... 18
3.1.2 黏結劑 ....................................................................................................19
3.2 系統配比 .................................................................................................. 19
3.3 實驗流程 .................................................................................................. 20
3.4 材料性質分析及檢測儀器規格 .................................................................. 22
3.4.1 雷射粒徑分析儀 ..................................................................................... 22
3.4.2 密度與孔隙率量測 ................................................................................. 23
3.4.3 相鑑定分析(XRD) .................................................................................. 23
3.4.4 顯微結構分析 ........................................................................................ 24
3.4.5 磨耗試驗分析 ........................................................................................ 25
第四章 結果與討論 ......................................................................................... 26
4.1 以溶膠-凝膠法製備玻璃粉末 ..................................................................... 26
4.1.1 玻璃粉末粒徑分析 .................................................................................. 26
4.1.2 玻璃熱性質分析 ..................................................................................... 27
4.1.3 SEM 微結構分析 .................................................................................... 29
4.2 不同熱處理溫度對玻璃微結構之影響 ........................................................ 30
4.3 加入鑽石粉末進行共燒 ............................................................................. 33
4.3.1 不同發泡溫度 ......................................................................................... 33
4.3.2 不同持溫時間 ......................................................................................... 37
4.4 不同粒徑發泡劑對泡沫玻璃之影響 ............................................................ 42
4.4.1 密度分析 ................................................................................................ 42
4.4.2 熱穩定性分析 ......................................................................................... 44
4.4.3 SEM 微結構分析 ..................................................................................... 45
4.5 不同鈉含量 ............................................................................................... 49
4.5.1 密度分析 ................................................................................................ 49
4.5.2 熱穩定性分析 ........................................................................................ 50
4.5.3 SEM 微結構分析 .................................................................................... 53
4.5.4 磨耗試驗 ................................................................................................ 62
第五章 結論 ..................................................................................................... 64
參考文獻 ......................................................................................................... 65

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