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研究生:蘇峻廷
研究生(外文):SU, JUN-TING
論文名稱:以無壓燒結製備氮化鋁陶瓷之性質研究
論文名稱(外文):Study on Properties of Aluminum Nitride Ceramics Using Pressureless Sintering
指導教授:蘇程裕蘇程裕引用關係
指導教授(外文):SU, CHERNG-YUH
口試委員:蘇程裕陳柏均林中魁
口試委員(外文):SU, CHERNG-YUHCHEN, BO-JUNLIN, ZHONG-KUI
口試日期:2019-07-31
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:製造科技研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2019
畢業學年度:107
語文別:中文
論文頁數:52
中文關鍵詞:氮化鋁無壓燒結氧化釔
外文關鍵詞:aluminum nitridepressureless sinteryttrium oxide
相關次數:
  • 被引用被引用:1
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  • 下載下載:66
  • 收藏至我的研究室書目清單書目收藏:1
本研究探討使用無壓燒結製備氮化鋁陶瓷,添加氧化釔作為助燒結劑,透過冷壓成型與刮刀塗佈製作生胚,再將生胚脫脂後進行無壓燒結,設定燒結溫度為1850°C,持溫時間皆為2 小時,並針對刮塗漿料黏度、微觀結構、機械性質及熱性質進行探討。由掃描式電子顯微鏡觀察燒結狀況,發現氧化釔在晶粒之間會產生晶界並形成三重晶界點,相對密度、晶界數量與氧化釔添加量成正比,進一步使用X-ray 繞射分析與穿透式電子顯微鏡分析,確認為氧化釔與氮化鋁之共晶相;透過維克式硬度試驗與熱傳導率試驗,發現最高硬度與最佳熱傳導率在添加氧化釔含量為3wt%時,其硬度值為12GP 與熱傳率為174.7 W/m-K。
The purpose of this study is to investigate the aluminum nitride ceramics prepared by the pressureless sintering and using yttrium oxide as an additive. The method is based on the cold press and tape casting to form the green body, then pressureless sintering at 1850°C for 2 hours. Slurry viscosity, microstructure, mechanical properties, and thermal conductivity were inspected. The result of the SEM image showed that yttrium oxide generated grain boundaries between the crystal grains and form the grain boundary triple junctions, also found that the relative density, grain boundaries increased with increasing content of yttrium oxide. Through the X-ray diffraction and TEM analysis, it can be verified that a eutectic phase forms in the system of yttrium oxide and aluminum nitride. Finally, through the Vickers hardness and the thermal conductivity test, it is found that the highest hardness and the optimum thermal conductivity were 12 GPa and 174.7 W/m-K with the yttrium oxide content was 3 wt%
目錄

摘要 i
ABSTRACT ii
誌謝 iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 緒論 1
1.1前言 1
1.2研究動機與目的 2
第二章 文獻回顧 3
2.1 氮化鋁晶體結構及特性 3
2.1.1 氮化鋁晶體結構 3
2.1.2氮化鋁熱傳性質 4
2.2燒結技術 5
2.2.1燒結理論 5
2.2.2燒結驅動力 6
2.2.3燒結機制 7
2.2.4燒結製備氮化鋁陶瓷技術 9
2.3液相燒結 10
2.3.1液相燒結機制 10
2.3.2氮化鋁助燒結劑文獻回顧 11
2.3.3 Y2O3與CaO為主要添加劑 13
2.3.4液相助燒結劑選擇 16
2.4氮化鋁基板成型技術 19
第三章 實驗步驟與方法 21
3.1 實驗流程 21
3.2 氮化鋁粉體 22
3.3漿料調配 23
3.4刮刀塗佈成型 24
3.5冷壓成型 25
3.6脫脂製程 25
3.7燒結製程 27
3.8實驗儀器及原理 28
3.8.1 X-ray繞射儀(XRD) 28
3.8.2 熱重分析(TGA) 29
3.8.3場發射掃描式電子顯微鏡(FESEM) 29
3.8.4 緻密度-阿基米德法 29
3.8.5維克式硬度機 30
3.8.6 聚焦離子束顯微系統(FIB) 30
3.8.7 穿透式電子顯微鏡(TEM) 31
3.8.8熱傳導係數測量儀 31
第四章 結果與討論 33
4.1刮刀製程設計 33
4.2熱脫脂參數設計 35
4.3燒結參數設計 36
4.4氮化鋁陶瓷之微結構觀察與分析 37
4.4.1刮刀塗佈微結構觀察與分析 38
4.4.2氮化鋁陶瓷之X-射線繞射分析 40
4.4.3穿透式電子顯微鏡微結構觀察與分析 42
4.5維克式硬度分析 44
4.6熱傳導分析 45
第四章 結論 47
參考文獻 48
[1]G. A. Slack, R. A. Tanzilli, R. O. Pohl, and J. W. Vandersande, "The intrinsic thermal conductivity of AIN," Journal of Physics and Chemistry of Solids, 1987, vol. 48, pp.641-647.
[2]L. M. Sheppard, "Aluminum Nitride-A Versatile but Challenging Material," American Ceramic Society Bulletin, 1990, vol. 69, pp. 1801-1812.
[3]汪建民, "陶瓷技術手冊," 中華民國科技發展協進會, 1994.
[4]馬鄒清, "氮化鋁的研究進展," 化學研究與應用, 2004, vol. 16(1), pp. 11-14.
[5]K. watari, F. Tsuchiya, "Phonon scattering and thermal conduction mechanisms of sintered aluminum nitride ceramics," Journal of materials science, 1993, vol. 28, pp. 3709-3714.
[6]黃坤祥 , "粉末冶金學 ," 中華民國粉末冶金協會 , 2014, pp. 219-231.
[7]徐仁輝 , "粉末冶金概論 ," 新文京開發出版有限公司 , 2002.
[8]伍祖聰 , 黃錦鐘 , "粉末冶金 ," 台北市高立圖書館 , 2000, pp. 171-232.
[9]R. Goodall, J. F. Despois and A. Mortensen, "Sintering of NaCl powder: Mechanisms and first stage kinetics," Journal of the European Ceramic Society, 2006, vol. 26, pp. 3487-3497.
[10]R. L. Coble, "Sintering Crystalline Solids : II, Experimental Test of Diffusion Models in Powder Compacts," Journal of Applied Physical, 1961, vol. 32(5), pp. 793-799.
[11]L. F. Francis, "Chapter 5 - Powder Processes," Materials Processing, Boston: Academic Press, 2016, pp. 343-414.
[12]J. M. Torralba, "3.11 - Improvement of Mechanical and Physical Properties in Powder Metallurgy," Comprehensive Materials Processing, 2014, pp. 281-294.
[13]E. T. Thostenson and T. W. Chou, "Microwave processing: fundamentals and applications," Composites Part A: Applied Science and Manufacturing, 1999, vol. 30, no. 9, pp. 1055-1071.
[14]A. G. Merzhanov, "Thermal explosion and ignition as a method for formal kinetic studies of exothermic reactions in the condensed phase," Combustion and Flame, 1967, vol. 11, no. 3, pp. 201–211.
[15]A. Sytschev, A. S. Rogahev, and A. G. Merzhanov, "Self-propagating high-temperature synthesis: First space experiments," Doklady Physical Chemistry, vol.362, 1999, pp. 299.
[16]H. Zheng Yongting, H. Jiecai, D. Shanyi and H. Xiaodong, "self-propagating hightemperature synthesis of AlN ceramic," Center for composite Material, 1999, vol. 12, pp. 770-773..
[17]R. M. German, "Liquid Phase Sintering: Metals," Encyclopedia of Materials: Science and Technology, 2001, pp. 4601-4603.
[18]R. M. German, P. Suri, and S. J. Park, "Review: liquid phase sintering," Journal of Materials Science, 2009, vol. 44, no. 1, pp. 1-39.
[19]K. Komeya, A. Tsuge, "Effects of Various Addatives on the Sintering of AlN," Journal of the Ceramic Society of Japan, 1981, vol. 89, p. 330.
[20]T. B. Jackson, A. V. Virkar, K. L. More, R. B. Dinwiddie Jr and R. A. Cutler, "High- Thermal-Conductivity Aluminum Nitride Ceramics: The Effect of Thermodynamic, Kinetic, and Microstructural Factors," Journal of the American Ceramic Society, 1997, vol. 80, pp. 1421-1435.
[21]R. Terao, J. Tatami, T. Meguro and K. Komeya, "Fracture Behaviour of AlN Ceramics With Rare Earth Oxides," Journal of the European Ceramic Society, vol.22, no. 7, 2002, pp. 1051-1059.
[22]T. B. Troczynski and P. S. Nicholson, "Effect of Additives on the Pressureless Sintering of Aluminum Nitride between 1500 and 1800°C," 2005, pp. 1488-1491.
[23]Y. Kurokawa, K. Utsumi and H. Takamizawa, "Development and microstructural characterization of high-thermal-conductivity aluminum nitride ceramics," J. Am. Ceram. Soc., 1988, vol. 71.
[24]R. Lee, "Development of High Thermal Conductivity Aluminum Nitride Ceramic," Journal of the American Ceramic Society, 1991, vol. 74, pp. 2242-2249.
[25]K. Watari, M. Cecilia Valecillos, M. Brito, M. Toriyama and S. Kanzaki, "Densification and thermal conductivity of AIN doped with Y2O3, CaO and Li2O," Journal of the American Ceramic Society, vol.79, 2005, pp. 3103- 3108.
[26]N. S. Raghavan, "Pressureless sintering of aluminium nitride: effect of concentration of additives and sintering conditions on properties," Materials Science and Engineering: A, 1991, vol. 148, pp. 307-317.
[27]A. L. Molisani, H. N. Yoshimura, and H. Goldenstein, "Sintering mechanisms in aluminum nitride with Y or Ca-containing additive," Journal of Materials Science: Materials in Electronics, 2009, vol. 20, pp. 1-8.
[28]A. L. Molisani, H. Goldenstein and H. N. Yoshimura, "The role of CaO additive on sintering of aluminum nitride ceramics," Ceramics International, 2017, vol. 43, no. 18, pp. 16972-16979..
[29]H. M. Lee and D. K. Kim, "High-strength AlN ceramics by low-temperature sintering with CaZrO3–Y2O3 co-additives," Journal of the European Ceramic Society, 2014, vol. 34, no. 15, pp. 3627-3633.
[30]S. Kume, M. Yasuoka, N. Omura, and K. Watari, "Effects of MgO addition on the density and dielectric loss of AlN ceramics sintered in presence of Y2O3," Journal of the European Ceramic Society, 2005, vol. 25, no. 12, pp. 2791-2794..
[31]Y. Xiong, H. Wang and Z. Fu, "Transient liquid-phase sintering of AlN ceramics with CaF2 additive," Journal of the European Ceramic Society, 2013, vol. 33, no. 11, pp. 2199-2205..
[32]H. S. Choi, H. N. Im, Y. M. Kim, A. Chavan, and S. J. Song, "Structural, thermal and mechanical properties of aluminum nitride ceramics with CeO2 as a sintering aid," Ceramics International, 2016, vol. 42, no. 10, pp. 11519-11524.
[33]H. Jiang, X. H. Wang, W. Lei, G. F. Fan and W.-Z. Lu, "Effects of two-step sintering on thermal and mechanical properties of aluminum nitride ceramics by impedance spectroscopy analysis," Journal of the European Ceramic Society, 2019, vol. 39, no. 2, pp. 249-254.
[34]H. Nakano, K. Watari, H. Hayashi and K. Urabe, "Microstructural Characterization of High-Thermal-Conductivity Aluminum Nitride Ceramic," Journal of the American Ceramic Society, 2002, vol. 85, no. 12, pp. 3093-3095.
[35]R. Kobayashi, K. Ohishi, R. Tu and T. Goto, "Sintering behavior, microstructure, and thermal conductivity of dense AlN ceramics processed by spark plasma sintering with Y2O3–CaO–B additives," Ceramics International, 2015, vol. 41, no. 1, Part B, pp. 1897- 1901.
[36]J. Y. Qiu, Y. Hotta, K. Watari, K. Mitsuishi and M. Yamazaki, "Low-temperature sintering behavior of the nano-sized AlN powder achieved by super-fine grinding mill with Y2O3 and CaO additives," Journal of the European Ceramic Society, 2006, vol. 26, no. 4, pp. 385-390.
[37]N. Kuramoto, H. Taniguchi and I. Aso, "Sintering and Properties of High-Purity AlN Ceramics," Ceramic Substrates and Packages for Electronic Applications, 1989, pp. 107-119.
[38]N. Hashimoto, H. Yoden, and S. Deki, "Sintering Behavior of Fine Aluminum Nitride Powder Synthesized from Aluminum Polynuclear Complexes," Journal of the American Ceramic Society, 1992, vol. 75, no. 8, pp. 2098-2106.
[39]X. L. Li, "Low-temperature sintering of high-density aluminium nitride ceramics without additives at high pressure," Scripta Materialia, 2007, vol. 56, no. 12, pp. 1015- 1018.
[40]A. Witek, "Synthesis of oxygen-free aluminium nitride ceramics," Journal of materials science, 1998, vol. 33, no. 13, pp. 3321-3324.
[41]K. Watari, H. J. Hwang, M. Toriyama and S. Kanzaki, "Low-Temperature Sintering and High Thermal Conductivity of YLiO2 Doped AlN Ceramics," Journal of the American Ceramic Society, 2005, pp. 1979-1981.
[42]J. H. Harris, "Sintered aluminum nitride ceramics for high-power electronic applications," Journal of Metals, 1998, vol. 50, no. 6, pp. 56-60.
[43]V. A. Izhevskyi, L. Genova, A. Bressiani, and J. Bressiani, "Liquid-Phase Sintered SiC Processing and Transformation Controlled Microstructure Tailoring," Materials Research, 2000, vol. 3.
[44]K. Watari, H. J. Hwang, M. Toriyama and S. Kanzaki, "Effective Sintering Aids for Low-temperature Sintering of AlN Ceramics," Journal of Materials Research, 1999, vol.14, no. 4, pp. 1409-1417.
[45]R. E. Mistler and E. R. Twiname, "Tape casting : Theory and practice. Westerville," OH: The American Ceramic Society, 2000.
[46]J. Gurauskis, A. J. Sánchez-Herencia and C. Baudín, "Joining green ceramic tapes made from water-based slurries by applying low pressures at ambient temperature," Journal of the European Ceramic Society, 2005, vol. 25, no. 15, pp. 3403-3411.
[47]M. L. Qin, X. Qu, J. Lin, P. G. Xiao, B. J. Zhu and C. F. Tang, "Progress in Research and Development of Aluminum Nitride (AlN) Ceramics," Rare Metal Materials and Engeering, 2002, pp. 8-12.
[48]Y. Yang, C. S. Hsi, K. T. Lai, "Aluminum nitride ceramic tape fabricated by tape casting process and the properties of green films," The Bulletin of the Chinese Institute of Mining & Metallurgical Engineers, 2015, vol. 59(4), pp. 90-97.
[49]S. Qiushun, Z. Wang, J. Li, G. Zhou, H. Zhang, and S. Wang, "Gel-tape-casting of aluminum nitride ceramics," Journal of Advanced Ceramics, 2017.
[50]J. G. Gutierrez, G. Stringari and I. Emri, "Powder Injection Molding of Metal and Ceramic Parts," Some Critical Issues for Injection Molding, 2012, pp. 65-90.
[51]V. A. Lysenko and G. F. Voronin, "Optimization of thermodynamic properties and phase equilibria of aluminium and yttrium oxides," Vestnik Moskovskogo Universiteta, Seriya 2. Khimiya, 1990, vol. 31, no. 1, pp. 30-34.
[52]T. Yagi, K. Shinozaki, N. Mizutani, M. Kato and A. Tsuge, "Thermal diffusivity of SiO2 and Y2O3 added AIN ceramics," Journal of Materials Science, 1989, vol. 24, no. 4, pp. 1332-1336.
[53]K. Kōmoto, L. Sheppard, and H. Matsubara, "Mass and charge transport in ceramics," Amer Ceramic Society, 1997, pp.300-307.
[54]M. Tajika, W. Rafaniello and K. Niihara, "Sintering behavior of direct nitrided AlN powder," Materials Letters, 2000, vol. 46, no. 2, pp. 98-104.
[55]G. Long, "Crystal phases in the system Al2O3-AlN," J. Am. Ceram. Soc., 1961, vol. 44, pp. 255-258.
[56]X. Li, J. Luo and Y. Zhou, "Spark plasma sintering behavior of AlON ceramics doped with different concentrations of Y2O3," Journal of the European Ceramic Society, 2015, vol. 35, no. 7, pp. 2027-2032.
[57]X. Y. Yuan, F. Zhang, X. J. Liu, Z. Zhang and S. W. Wang, "Fabrication of Transparent AlON Ceramics by Solid-State Reaction Sintering," Journal of Inorganic Materials, 2011, vol. 26, pp. 499-502.
[58]X. Yuan, X. Liu, F. Zhang and S. Wang, "Synthesis of γ-AlON Powders by a Combinational Method of Carbothermal Reduction and Solid-State Reaction," Journal of the American Ceramic Society, 2010, vol. 93, no. 1, pp. 22-24.
[59]J. Cheng, D. Agrawal, Y. Zhang and R. Roy, "Microwave Reactive Sintering to Fully Transparent Aluminum Oxynitride (AlON) Ceramics," Journal of Materials Science Letters, 2001, vol. 20, pp. 77-79.
[60]L. Qiao, H. Zhou, H. Xue and S. Wang, "Effect of Y2O3 on low temperature sintering and thermal conductivity of AlN ceramics," Journal of the European Ceramic Society, 2003, vol. 23, no. 1, pp. 61-67.
[61]H. Nakano, K. Watari and K. Urabe, "Grain boundary phase in AlN ceramics fired under reducing N2 atmosphere with carbon," Journal of the European Ceramic Society, 2003, vol. 23, no. 10, pp. 1761-1768.
[62]I. L. Tangen, Y. Yu, T. Grande, R. Høier, and M. A. Einarsrud, "Phase Relations and Microstructural Development of Aluminum Nitride–Aluminum Nitride Polytypoid Composites in the Aluminum Nitride–Alumina–Yttria System," Journal of the American Ceramic Society, 2004, vol. 87, no. 9, pp. 1734-1740.
[63]F. J. Paneto, "Effect of porosity on hardness of Al2O3–Y3Al5O12 ceramic composite," International Journal of Refractory Metals and Hard Materials, 2015, vol. 48, pp. 365- 368.
[64]F. F. Mao, X. H. Wang, Q. Zheng, F. Q. Zhang, Z. Q. Zhang and H. Gu, "Grain Boundary Phase Analysis for Y2O3-Doped AlN Ceramics," Key Engineering Materials, 2013, vol. 544, pp. 162-166.
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