本研究以改進現有的CAE沉積技術和使用脈衝電流技術開發CrAlSiN薄膜，並針對CrAlSiN鍍膜的優異性能提出實驗報告。採用之陰極電弧沉積系統鍍覆CrAlSiN 薄膜在碳化鎢及304不銹鋼基材上。此種CAE鍍膜機配有兩個陰極電弧蒸發源，可以安裝直徑為6吋的金屬靶材。陰極電弧蒸發源有安裝磁鐵，具有穩定及控制電弧點、增加電弧點的移動速率的作用，先鍍CrN當介面層再鍍上CrAlSiN薄膜。設計的CrAlSiN薄膜實驗為通入反應氣體N2，改變陰極電弧蒸發源之電流輸出，分別為（一）90A對照組 、 90-120A脈衝電流、90-150A脈衝電流等三種條件及（二） 90A對照組 、 90-150A脈衝電流之脈衝週期1ms、3ms等三種條件進行離子披覆CrAlSiN薄膜，沉積時間為40 mins。CrAlSiN系統S1樣品的硬度值為3240Hv，S2的硬度值為3337Hv和S3樣品的硬度值為4145Hv，脈衝電流從90 / 120A增加到90 / 150A，CrAlSiN塗層的硬度從S2的3337Hv增加到S3樣品的4145Hv，硬度的急劇增加，且達到最大硬度值。CrAlSiN-90的Rp值為6506642、CrAlSiN-1.0的Rp值為16266053、CrAlSiN-3.0的Rp值為23118408，表示高的脈衝電流功率週期沉積的CrAlSiN具有更高的Rp值，該增加值表示在實驗中獲得的耐腐蝕性更好。實驗結果顯示，相對於微小銑刀的有效切削長度，S1刀的壽命改善增加75%、S2刀的壽命改善增加165%、S3刀的壽命改善增加117.5%。再以S1刀的壽命為基礎，S2刀的壽命改善增加51%、S3刀的壽命改善增加24%。

In order to improve the existing CAE deposition technology and use pulse current technology to develop CrAlSiN film, the paper presents an experimental report on the excellent performance of CrAlSiN coating. The cathode Arc deposition system is applied to CrAlSiN film on tungsten carbide and 304 stainless steel substrates. The CAE coating machine is equipped with a cathode arc evaporation source which can be fitted with a metal target with a diameter of 6 inches. The cathode arc evaporation source has the installation magnet, which has the function of stabilizing and controlling the arc point and increasing the movement rate of the arc point. The CrAlSiN film was designed to N2 the current of the cathode arc evaporation source, respectively (a) 90A control group, 90-120A Pulse Current, 90-150a pulse current and other three kinds of conditions and (b) 90A control group, 90-150a Pulse cycle 1ms, 3ms and other three conditions for ion coating CrAlSiN film, deposition time of 40 mins.The hardness value of the CrAlSiN system S1 sample is 3240Hv, the hardness value of the CrAlSiN system S2 sample is 3337Hv and S3 sample 4145Hv, Pulse current from 90/120A to 90/150A,cralsin coating hardness from S2 3337Hv increased to S3 sample 4145Hv, hardness increased sharply, and reached the maximum hardness value. CrAlSiN-90 of Rp is 6506642、CrAlSiN-1.0 of Rp is 16266053、CrAlSiN-3.0 of Rp is 23118408. The Cralsin with high pulse current power cycle deposition has higher RP value, which indicates that the corrosion resistance obtained in the experiment is better. The experimental results show that compared with the effective cutting length of the small milling cutter, the life of the S1 cutter increases by 75%, the life of the S2 knife increases by 165%, and the life of S3 knife increases by 117.5%. Based on the life of S1 knife, the life of S2 knife increases by 51% and the life of S3 knife increases by 24%.

摘要 I
Abstract III
誌 謝 V
表目錄 VIII
圖目錄 XIII
第一章 前言 1
1.1. 研究動機 1
1.2. 研究目的 3
第二章 文獻回顧 4
2.1. 脈衝陰極電弧蒸鍍的發展 4
2.2. 沉積後的熱處理對鍍膜影響 13
2.3. CrAlSiN 鍍膜的特徵 16
2.4. TiSiN鍍層的特性 20
第三章 實驗方法與步驟 22
3.1.實驗設計與流程 22
3.2.基材準備 25
3.3.鍍膜前處理 27
3.4.CAE鍍膜處理 28
3.5鍍膜結構及形貌分析 31
3.5.1. XRD結構分析(X-Ray diffraction，XRD) 31
3.5.2. 膜厚量測 31
3.5.3. 表面形貌及粗糙度分析 32
3.6.鍍膜特性分析 36
3.6.1附著性試驗 36
3.6.2維氏硬度試驗 36
3.6.3磨耗試驗 38
3.6.4電化學腐蝕試驗 39
3.6.5熱分析 41
第四章 脈衝電弧電流對 CrAlSiN 鍍層特性的影響 43
4.1. 陰極電弧蒸鍍源的電流輸出之選擇 43
4.2. CrAlSiN鍍層膜厚分析 44
4.3. CrAlSiN鍍層系統表面及斷面形貌分析 46
4.4. CrAlSiN鍍層系統表面粗糙度量測分析 50
4.5 CrAlSiN鍍層系統結構分析 51
4.6. CrAlSiN鍍層系統表面硬度分析 52
4.7. CrAlSiN鍍層系統耐磨耗分析 53
4.9. CrAlSiN鍍層耐腐蝕性分析 56
4.10. CrAlSiN鍍層熱行為分析 59
第五章 脈衝電流輸入週期改變對CrAlSiN鍍層的影響 63
5.1 CrAlSiN 鍍膜的陰極電弧蒸發技術 63
5.2 CrAlSiN 鍍膜的陰極電弧蒸發週期參數設定 65
5.3 CrAlSiN 鍍膜的結構分析 66
5.3.1 XRD結構分析 66
5.3.2 CrAlSiN鍍膜的厚度和粗糙度量測 67
5.3.3 TGA / DSC對CrAlSiN薄膜的熱行為分析 69
5.3.4 腐蝕行為分析 72
第六章 CrAlSiN 薄膜應用在微小銑刀的切削特性分析 75
6.1 CrAlSiN 薄膜在微小銑刀的製程 75
6.2 CrAlSiN 薄膜應用在電路板的切削距離比較 79
6.3 CrAlSiN 薄膜應用在電路板切削距離的迴歸分析 84
第七章 CrAlSiN 薄膜的製程與特性比較 89
第八章 結論 92

1.http://www.bccresearch.com/
2.G.S. Fox-Rabinovich, A.I. Kovalev, M.H. Aguirre, B.D. Beake, K. Yamamoto, S.C. Veldhuis, J.L. Endrino, D.L. Wainstein, A.Y. Rashkovskiy, “Design and performance of AlTiN and TiAlCrN PVD coatings for machining of hard to cut materials”, Surface & Coatings Technology 204 (2009) 489–496.
3.J. Soldán, J. Neidhardt, B. Sartory, R. Kaindl, R. Čerstvý, P.H. Mayrhofer, R. Tessadri, P. Polcik, M. Lechthaler, C. Mitterer, “Structure–property relations of arc-evaporated Al–Cr–Si–N coatings”, Surface & Coatings Technology 202 (2008) 3555–3562.
4.J.L. Endrino, G.S. Fox-Rabinovich, C. Gey, “Hard AlTiN, AlCrN PVD coatings for machining of austenitic stainless steel”, Surface & Coatings Technology 200 (2006) 6840–6845.
5.B.D. Beake, Li Ning, Ch. Gey, S.C. Veldhuis, A. Komarov, A. Weaver, M. Khanna, G.S. Fox-Rabinovich, “Wear performance of different PVD coatings during hardwet endmilling of H13 tool steel”, Surface & Coatings Technology 279 (2015) 118–125.
6.Yucel Birol, Behiye Yuksel, “Performance of gas nitrided and AlTiN coated AISI H13 hot work tool steel in aluminium extrusion”, Surface & Coatings Technology 207 (2012) 461–466.
7.platingB. Yang, C.X. Tian, Q. Wan, S.J. Yan, H.D. Liu, R.Y. Wang, Z.G. Li, Y.M. Chen, D.J. Fu, “Synthesis and characterization of AlTiSiN/CrSiN multilayer coatings coatingsby cathodic arc ion-plating”, Applied Surface Science 314 (2014) 581–585.
8.M. Panjan, M. Klanjšek Gunde, P. Panjan, M. Čekada, Designing the color of AlTiN hard coating through interference effect”, Surface & Coatings Technology 254 (2014) 65–72.
9.Yun Chen, Hao Du, Ming Chen, Jun Yang, Ji Xiong, Haibo Zhao, “Structure and wear behavior of AlCrSiN-based coatings”, Applied Surface Science 370 (2016) 176–183.
10.Weiwei Wu, Wanglin Chen, Shubao Yang, Yue Lin, Shihong Zhang, Tong-Yul Cho, G.H. Lee, Sik-Chol Kwon, “Design of AlCrSiN multilayers and nanocomposite coating for HSS cutting tools”, Applied Surface Science 351 (2015) 803–810.
11.Shihong Zhang, Weiwei Wu, Wanglin Chen, Shubao Yang, “Structural optimisation and synthesis of multilayers and nanocomposite AlCrTiSiN coatings for excellent machinability”, Surface & Coatings Technology 277 (2015) 23–29.
12.Maria Giulia Faga, Giovanna Gautier, Federico Cartasegna, Paolo C. Priarone, Luca Settineri”, Applied Surface Science 365 (2016) 218–226.
13.H. Fuchs, K. Keutel, H. Mecke, Chr. Edelmann,“Pulsed vacuum arc discharges on steered arc cathodes”, Surface and Coatings Technology 116–119 (1999) 963–968.
14.Paul H. Mayrhofer, Christian Mitterer, Lars Hultman, Helmut Clemens, “Microstructural design of hard coatings”, Progress in Materials Science 51 (2006) 1032–1114.
15.Lepone, H. Kelly, A. Marquez, J. Appl. Phys. 90 (2001) 3174.
16.E. Restrepo-Parra, L.E. Moreno Montoya, P.J. Arango-Arango, Surf. Coat. Technol. 204 (2009) 271.
17.H.D. Steffens, M. Mack, K. Möhwald, K. Reichel, Surf. Coat. Technol. 46 (1991) 65–74.
18.H. Fuchs, H. Mecke, in: Proc. 12th Int. Conf. on Gas Discharges and their Applications, Greifswald (1997) 22–25.
19.K. Keutel, H. Fuchs, H. Mecke, Chr. Edelmann, in: Proc. 18th Int. Symp. on Discharges and Electrical Insulation in Vacuum, Eindhoven (1998) 562–565.
20.H. Fuchs, H. Mecke, M. Ellrodt, Surf. Coat. Technol. 98 (1998) 839–844.
21.H. Fuchs, K. Keutel, H. Mecke, Chr. Edelmann, “Pulsed vacuum arc discharges on steered arc cathodes”, Surface and Coatings Technology 116–119 (1999) 963–968.
22.H. Fuchs, B. Engers, E. Hettkamp, H. Mecke, J. Schultz,“Deposition rate and thickness uniformity of thin films deposited by a pulsed cathodic arc process”, Surface and Coatings Technology 142-144 (2001) 655-660.
23.M. B¨uschel, W. Grimm,“Influence of the pulsing of the current of a vacuum arc on rate and droplets”, Surface and Coatings Technology 142-144 (2001) 665-668.
24.R. Ospina, D. Escobar-Rincón, P.J. Arango, E. Restrepo-Parra, J.F. Jurado, “Structural and chemical composition analysis of WCN produced by pulsed vacuum arc discharge”, Surface & Coatings Technology 232 (2013) 96–100.
25.K. Bobzin, T. Brögelmann, R.H. Brugnara, N.C. Kruppe, “CrN/AlN and CrN/AlN/Al2O3 coatings deposited by pulsed cathodic arc for aluminum die casting applications”, Surface & Coatings Technology 284 (2015) 222–229.
26.Wei-Yu Ho, Po-Yi Tsou, Yen-Shuo Chang, Cheng-Liang Lin, “Corrosion resistance of CrSiN coatings by cathodic arc deposition with different arc currents”, Advanced Materials Research Vols 960-961 (2014) pp 152-156.
27.Verhoeven JD. Fundamentals of physical metallurgy. New York: Wiley; 1975.
28.hih-Kang Tien, Chih-Hsiung Lin, Yan-Zuo Tsai, Jenq-Gong Duh, “Effect of nitrogen flow on the properties of quaternary CrAlSiN coatings at elevated temperatures”, Surface & Coatings Technology 202 (2007) 735–739.
29.L. Hultman, “Thermal stability of nitride thin”, Vacuum 57 (2000) 1~30.
30.Wei-Yu Ho, Mu-Hsuan Chan, Kao-Shan Yao, Chi-Lung Chang, Da-Yung Wang, Cheng-Hsun Hsu, “Characteristics of Chromium-doped Titanium Oxide Coatings Synthesized by Cathodic Arc Deposition”, Thin Solid Films 516 (2008) 8530-8536.
31.J.J. Jeong, C.M. Lee, “Effects of post-deposition annealing on the mechanical and chemical properties of the Si3N4/NbN multilayer coatings”, Applied Surface Science 214 (2003) 11–19.
32.Saleh B. Abusuilik, “Pre-, intermediate, and post-treatment of hard coatings to improve their performance for forming and cutting tools”, Surface & Coatings Technology 284 (2015) 384–395.
33.Mohan Chen, Fei Cai,Wanglin Chen, Qimin Wang, Shihong Zhang, “Influence of vacuum annealing on structures and properties of Al-Ti-Si-N coatings with corrosion resistance”, Surface & Coatings Technology 312 (2017) 25–31.
34.V.V. Uglov, V.M. Anishchik, S.V. Zlotski, I.D. Feranchuk, T.A. Alexeeva, A. Ulyanenkov, J. Brechbuehl, A.P. Lazar, “Composition and phase stability upon annealing of gradient nitride coatings”, Surface & Coatings Technology 202 (2008) 2389–2393.
35.Yu-Sen Yang, Ting-Pin Cho, Cheng-Feng Huang, “Annealing effect on the hydrophobic property of Cr2N coatings”, Surface & Coatings Technology 231 (2013) 107–111.
36.J.L. Endrino, G.S. Fox-Rabinovich, C. Gey, “Hard AlTiN, AlCrN PVD coatings for machining of austenitic stainless steel”, Surface & Coatings Technology 200 (2006) 6840–6845.
37.J.L. Mo, M.H. Zhu, A. Leyland, A. Matthews, “Impact wear and abrasion resistance of CrN, AlCrN and AlTiN PVD coatings”, Surface & Coatings Technology 215 (2013) 170–177.
38.D. Rafaja, M. Dopita, M. Růžička, V. Klemm, D. Heger, G. Schreiber, M. Šíma, “Microstructure development in Cr–Al–Si–N nanocomposites deposited by cathodic arc evaporation”, Surface & Coatings Technology 201 (2006) 2835–2843.
39.In-Wook Park, Dong Shik Kang, John J. Moore, Sik Chol Kwon, Jong Joo Rha, “Microstructures, mechanical properties, and tribological behaviors of Cr–Al–N, Cr–Si–N, and Cr–Al–Si–N coatings by a hybrid coating system”, Surface & Coatings Technology 201 (2007) 5223–5227.
40.David Rafaja, Christina Wüstefeld, Milan Dopita, Milan Růžička, Volker Klemm, Gerhard Schreiber, Dietrich Heger, Michal Šíma, “Internal structure of clusters of partially coherent nanocrystallites in Cr–Al–N and Cr–Al–Si–N coatings”, Surface & Coatings Technology 201 (2007) 9476–9484.
41.Shih-Kang Tien, Chih-Hsiung Lin, Yan-Zuo Tsai, Jenq-Gong Duh, “Effect of nitrogen flow on the properties of quaternary CrAlSiN coatings at elevated temperatures”, Surface & Coatings Technology 202 (2007) 735–739.
42.M. Dopita, D. Rafaja, Ch. Wüstefeld, M. Růžička, V. Klemm, D. Heger, G. Schreiber, M. Šíma, “Interplay of microstructural features in Cr1−xAlxN and Cr1−x−yAlxSiyN nanocomposite coatings deposited by cathodic arc evaporation”, Surface & Coatings Technology 202 (2008) 3199–3207.
43.Sun Kyu Kim, Vinh Van Le, Pham Van Vinh, Jae Wook Lee, “Effect of cathode arc current and bias voltage on the mechanical properties of CrAlSiN thin films”, Surface &CoatingsTechnology202(2008)5400–5404.
44.Wei-Yu Ho, Cheng-Hsun Hsu, Chi-Wei Chen, Da-Yung Wang, “Characteristics of PVD-CrAlSiN films after post-coat heat treatments in nitrogen atmosphere”, Applied Surface Science 257 (2011) 3770–3775.
45.Sun Kyu Kim, Vuong-Hung Pham, Chong-Hyun Kim, “Cell adhesion to cathodic arc plasma deposited CrAlSiN thin films”, Applied Surface Science 258 (2012) 7202– 7206.
46.Yu Xi Wang, Sam Zhang, Jyh-Wei Lee, Wen Siang Lew, Bo Li, “Toughening effect of Ni on nc-CrAlN/a-SiNx hard nanocomposite”, Applied Surface Science 265 (2013) 418– 423.
47.Krzysztof Lukaszkowicz, Jozef Sondor, Katarzyna Balin, Jerzy Kubacki, “Characteristics of CrAlSiN + DLC coating deposited by lateral rotating cathode arc PVD and PACVD process”, Applied Surface Science 312 (2014) 126–133.
48.Yin-Yu Chang, Chi-Pang Chang, Da-Yung Wang, Sheng-Min Yang, Weite Wu”High temperature oxidation resistance of CrAlSiN coatings synthesized by a cathodic arc deposition process” Journal of Alloys and Compounds 461 (2008) 336–341.
49.Yun Chen, Hao Du, Ming Chen, Jun Yang, Ji Xiong, Haibo Zhao, “Structure and wear behavior of AlCrSiN-based coatings”, Applied Surface Science 370 (2016) 176–183.
50.Dong Bok Lee, Thuan Dinh Nguyen, Sun Kyu Kim, “Air-oxidation of nano-multilayered CrAlSiN thin films between 800 and 1000 °C”, Surface & Coatings Technology 203 (2009) 1199–1204.
51.Thuan Dinh Nguyen, Sun Kyu Kim, Dong Bok Lee, “High-temperature oxidation of nano-multilayered TiAlCrSiN thin films in air”, Surface & Coatings Technology 204 (2009) 697–704.
52.Hsien-Wei Chen, Yu-Chen Chan, Jyh-Wei Lee, Jenq-Gong Duh,“Oxidation behavior of Si-doped nanocomposite CrAlSiN coatings”, Surface & Coatings Technology 205 (2010) 1189–1194.
53.Hsien-Wei Chen, Yu-Chen Chan, Jyh-Wei Lee, Jenq-Gong Duh,“Oxidation resistance of nanocomposite CrAlSiN under long-time heat treatment”, Surface & Coatings Technology 206 (2011) 1571–1576.
54.Tomas Polcar, Albano Cavaleiro, “High-temperature tribological properties of CrAlN, CrAlSiN and AlCrSiN coatings”, Surface & Coatings Technology 206 (2011) 1244–1251.
55.Yin-Yu Chang, Chih-Ming Cheng, Yau-Yi Liou, Wolfgang Tillmann, Fabian Hoffmann, Tobias Sprute, “High temperature wettability of multicomponent CrAlSiN and TiAlSiN coatings by molten glass”, Surface & Coatings Technology 231 (2013) 24–28.
56.Shihong Zhang, Lei Wang, Qimin Wang, Mingxi Li, “A superhard CrAlSiN superlattice coating deposited by a multi-arc ion plating: II. Thermal stability and oxidation resistance”, Surface & Coatings Technology 214 (2013) 153–159.
57.Yin-Yu Chang, Hsing-Ming Lai, Ho-Yi Kao, “High temperature wettability of ion implanted multicomponent CrAlSiN films by molten glass”, Surface & Coatings Technology 237 (2013) 164–169.
58.Chun-Chi Chang, Hsien-Wei Chen, Jyh-Wei Lee, Jenq-Gong Duh, “Development of Si-modified CrAlSiN nanocomposite coating for anti-wear application in extreme environment”, Surface & Coatings Technology 284 (2015) 273–280.
59.Yin-Yu Chang,Wen-Tung Chiu, Jui-Pin Hung,“Mechanical properties and high temperature oxidation of CrAlSiN/TiVN hard coatings synthesized by cathodic arc evaporation”, Surface & Coatings Technology 303 (2016) 18–24.
60.Yin-Yu Chang, Hsing-Ming Lai, “Wear behavior and cutting performance of CrAlSiN and TiAlSiN hard coatings on cemented carbide cutting tools for Ti alloys”, Surface & Coatings Technology 259 (2014) 152–158.
61.C. Lin, J. Duh, Electrochemical impedance spectroscopy (EIS) study on corrosion performance of CrAlSiN coated steels in 3.5 wt.% NaCl solution, Surf. Coat. Technol. 204 (2009) 784–787.
62.Mohan Chen,Wanglin Chen, Fei Cai, Shihong Zhang, QiminWang, “Structural evolution and electrochemical behaviors of multilayer Al-Cr-Si-N coatings”, Surface & Coatings Technology 296 (2016) 33–39.
63.S. Veprěk, S. Reiprich, Thin Solid Films 268 (1995) 64.
64.A. Niederhofer, P. Nesladek, H.D. Mannling, K. Moto, S. Veprˇek, M. Jilek, Surf. Coat. Technol. 120–121 (1999) 173.
65.H.D. Mannling, D.S. Patil, K. Moto, M. Jilek, S. Veprˇek, Surf. Coat. Technol. 146–147 (2001) 263.
66.P. Zhang, Z.H. Cai, W.Q. Xiong, Surf. Coat. Technol. 201 (2007) 6819–6823.
67.V. Chawla, R. Jayaganthan, R. Chandra, Surf. Coat. Technol. 204 (2010) 1582–1589.
68.S. Veprek, M.G.J. Veprek-Heijman, P. Karvankova, J. Prochazka, Thin Solid Films 476 (2005) 1.
69.R.F. Zhang, S. Veprek, Thin Solid Films 516 (2008) 2264–2275.
70.S. Veprek, R.F. Zhang, M.G.J. Veprek-Heijman, S.H. Sheng, A.S. Argon, Surf. Coat. Technol. 204 (2010) 1898–1906.
71.S. Veprek, S. Reiprich, L. Shizhi, Appl. Phys. Lett. 66 (1995) 2640.
72.F. Vaz, L. Rebouta, P. Goudeau, T. Girardeau, J. Pacaud, J.-P. Riviere, A. Traverse, Surf. Coat. Technol. 146 (2001) 274.
73.A. Schuler, P. Oelhafen, Appl. Phys. A 73 (2001) 237.
74.J. Patscheider, T. Zehnder, M. Diserens, Surf. Coat. Technol. 146 (2001) 201.
75.J. Musil, Surf. Coat. Technol. 125 (2000) 322.
76.L.I. Zhuguo, M.I.Y.A.K.E. Shoji, W.U. Yixiong, Jpn. J. Appl. Phys. 45 (2006) 7866–7870.
77.A. Flink, T. Larsson, J. Sjolen, L. Karlsson, L. Hultman, Surf. Coat. Technol. 200 (2005) 1535.
78.A. Bendavid, P.J. Martin, H. Takikawa, Thin Solid Films 420 (2003) 241.
79.Chi-Lung Chang, Jun-Han Chen, Pi-Chuen Tsai, Wei-Yu Ho, Da-Yung Wang,“ Synthesis and characterization of nano-composite Ti–Si–N hard coating by filtered cathodic arc deposition“, Surface & Coatings Technology 203 (2008) 619–623.
80.A. Bendavid, P.J. Martin, E.W. Preston, J. Cairney, Z.H. Xie, M. Hoffman, Surf. Coat. Technol. 201 (2006) 4139–4144.
81.C.T. Guo, D. Lee, P.C. Chen, “Deposition of TiSiN coatings by arc ion plating process”, Applied Surface Science 254 (2008) 3130–3136.
82.P.J. Martin, A. Bendavid, Surf. Coat. Technol. 163 (2003) 245.
83.Yujuan Zhang, Yingze Yang, Yuhao Zhai, Pingyu Zhang,“Effect of negative substrate bias on the microstructure and mechanical properties of Ti–Si–N films deposited by a hybrid filtered cathodic arc and ion beam sputtering technique“, Applied Surface Science 258 (2012) 6897– 6901.
84.J. Laconte, F. Iker, S. Jorez, N. Andre, J. Proost, T. Pardoen, D. Flandre, J.P. Raskin, Microelectron. Eng. 76 (1–4) (2004) 219. Wei-Yu Ho, Cheng-Hsun Hsu, Chi-Wei Chen, Da-Yung Wang, “Characteristics of PVD-CrAlSiN films after post-coat heat treatments in nitrogen atmosphere”, Applied Surface Science 257 (2011) 3770-3775.
85.Sun Kyu Kim, Vuong-Hung Pham, Chong-Hyun Kim, “Cell adhesion to cathodic arc plasma deposited CrAlSiN thin films”, Applied Surface Science 258 (2012) 7202-7206.
86.Shihong Zhang, Lei Wang, Qimin Wang, Mingxi Li, “A superhard CrAlSiN superlattice coating deposited by multi-arc ion plating: I. Microstructure and mechanical properties”, Surface & Coatings Technology 214 (2013) 160-167.
87.Krzysztof Lukaszkowicz, Jozef Sondor, Katarzyna Balin, Jerzy Kubacki, “Characteristics of CrAlSiN + DLC coating deposited by lateral rotating cathode arc PVD and PACVD process”, Applied Surface Science 312 (2014) 126-133.
88.Chun-Chi Chang, Hsien-Wei Chen, Jyh-Wei Lee, Jenq-Gong Duh, “Development of Si-modified CrAlSiN nanocomposite coating for anti-wear application in extreme environment”, Surface & Coatings Technology 284 (2015) 273-280.
89.B. Engers, H. Fuchs, J. Schultz, E. Hettkamp, H. Mecke,“Comparison of substrate temperature and deposition rate between modified pulsed arc process and d.c. arc process”, Surface and Coatings Technology 133-134(2000)121-125.
90.M. Büschel, W. Grimm,“Influence of the pulsing of the current of a vacuum arc on rate and droplets”, Surface and Coatings Technology 142-144 (2001) 665-668.
91.Andreas N. Panckow, Jörg Steffenhagen, Friedhelm Lierath,“Advanced coating architectures deposited by pulsed and filtered arc ion-plating”, Surface and Coatings Technology 163-164 (2003) 128-134.
92.Alfonso Devia Cubillos, Elisabeth Restrepo Parra, Belarmino Segura Giraldo, Yulieth Cristina Arango, Diego Fernando Arias Mateus, “Study of TiN and Ti/TiN coatings produced by pulsed-arc discharge”, Surface & Coatings Technology 190 (2005) 83- 89.
93.H. Fuchs, B. Engers, E. Hettkamp, H. Mecke, J. Schultz,“Deposition rate and thickness uniformity of thin films deposited by a pulsed cathodic arc process”, Surface and Coatings Technology 142-144 (2001) 655-660.
94.Yawei Hu, Liuhe Li, Hua Dai, Xiaoling Li, Xun Cai, Paul K. Chu, “Effects of pulse parameters on macro-particle production in pulsed cathodic vacuum arc deposition”, Surface & Coatings Technology 201 (2007) 6542-6544.
95.R Core Team (2013). R: A language and environment for statistical computing. R Foundation for Statistical Computing, Vienna, Austria. URL：http://www.R-project.org/.
96.Marco ENEA (2013). speedglm: Fitting Linear and Generalized Linear Models to large data sets.. R package version 0.2. URL：http://CRAN.R-project.org/package=speedglm
97.L. Settineri, M.G. Faga, G. Gautier, M. Perucca”Evaluation of wear resistance of AlSiTiN and AlSiCrN nanocomposite coatings for cutting tools”CIRP Annals - Manufacturing Technology 57 (2008) 575–578.