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研究生:蔡德良
研究生(外文):TSAI, TE-LIANG
論文名稱:碳協助高品質二硫化鎢製程
論文名稱(外文):Salt-assisted high quality WS2 synthesis
指導教授:謝雅萍謝雅萍引用關係丁初稷
指導教授(外文):HSIEH, YA-PINGTING, CHU-CHI
口試委員:謝雅萍丁初稷謝馬利歐藍彥文
口試委員(外文):HSIEH, YA-PINGTING, CHU-CHIMARIO HOFMANNLAN, YANN-WEN
口試日期:2020-07-23
學位類別:碩士
校院名稱:國立中正大學
系所名稱:光機電整合工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2020
畢業學年度:108
語文別:中文
論文頁數:41
中文關鍵詞:二硫化鎢覆蓋率碳協助化學氣象沉積
外文關鍵詞:tungsten disulfidechemical vapor depositioncarbon-assistedcoverage
相關次數:
  • 被引用被引用:0
  • 點閱點閱:178
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
目錄
誌謝 I
中文摘要 II
English Abstract III
目錄 V
圖表目錄 VII
第一章 介紹與文獻回顧 1
1.1 二維材料 1
1.2 二硫化鎢 2
1.3 研究動機 4
第二章 實驗製程與設備 5
2.1 實驗器材與分析方法 5
2.1.1 化學氣相沉積系統 (Chemical Vapor Deposition) 5
2.1.2 電子束蒸鍍機 (Electron-beam Evaporator) 6
2.1.3 拉曼光譜與光致發光光譜系統 7
2.1.4 原子力顯微鏡 (Atomic Force Microscope) 8
2.1.5 X射線光電子能譜儀 (X-ray photoelectron spectroscopy) 9
2.2 實驗製程 10
2.2.1 實驗流程介紹 10
2.2.2 實驗基板 11
2.2.3 前驅物 12
2.2.4 化學氣象沉積 13
第三章 實驗結果與討論 16
3.1 實驗目的與結果 16
3.1.1 晶粒尺寸 17
3.1.2 材料覆蓋率 19
3.1.3 材料生長厚度 20
3.2 生長結果量測 22
3.3 氯化鈉影響 25
3.4 機制討論 27
第四章 結論 30
參考文獻 33


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