本論文研究內容分為三個部分，第一部分，基於雷射雕刻製程，對RO3003基板以及Mg2SnO4基板獲得其最佳製程參數。RO3003基板之最佳製程參數，重複次數為3 次，功率為2.0 W。Mg2SnO4基板之最佳製程參數，重複次數為4 次，功率為3.2 W。第二部分，透過平面式共平面波導饋入微帶線的設計與實現，分別萃取RO3003基板以及Mg2SnO4基板之電氣特性參數。RO3003基板於30 GHz時，有效介電常數為2.44；介電常數為2.87；損失因數為1.67 × 10-2。Mg2SnO4基板於29.5 GHz時，有效介電常數為3.06；介電常數為3.97；損失因數為5.42 × 10-2。第三部分，將RO3003基板以及Mg2SnO4基板，分別做為收發天線與感測天線，以實現無源天線溫度感測器。無源天線溫度感測器以正交極化之方式量測感測天線之反射訊號，靈敏度為-1.210 MHz/℃；線性度為0.06 %；最大工作溫度為225 ℃。

In this thesis, the researches are divided into three parts. In the first part, based laser ablation determine the best process parameters on RO3003 substrate and Mg2SnO4 ceramic substrate. The repetition 3 times and 2.0 W power is the best process parameters for RO3003 substrate. The repetition 4 times and 3.2 W power is the best process parameters for Mg2SnO4 ceramic substrate. In the second part, obtain the millimeter wave dielectric properties of RO3003 substrate and Mg2SnO4 ceramic substrate, by microstrip line of coplanar waveguide feeding. When the frequency is 30 GHz, the effective dielectric constant , dielectric constant and loss factor of the RO3003 substrate are 2.44, 2.87 and 1.67 × 10-2, respectively. When the frequency is 29.5 GHz, the effective dielectric constant , dielectric constant and loss factor of the Mg2SnO4 ceramic substrate are3.06, 3.97 and 5.42 × 10-2, respectively. In the third part, manufacture antenna transceiver and antenna sensor with RO3003 substrate and Mg2SnO4 ceramic substrate. The antenna transceiver uses orthogonal polarization technology to measure the backscattered signal of the antenna sensor. The results are measured at the 25 ℃ to 225 ℃. The sensitivity and linearity are -1.210 MHz/℃, 0.06 %, respectively.

摘要 i
ABSTRACT ii
誌謝 iv
目錄 v
表目錄 ix
圖目錄 x
第一章 緒論 1
1.1 前言 1
1.2 研究目的 3
第二章 原理 6
2.1 介電原理 6
2.1.1 微波介電特性 6
2.1.1.1 介電常數(Dielectric Constant : εr) 6
2.1.1.2 品質因數（Quality Factor : Q） 7
2.1.1.3 諧振頻率溫度係數（Temperature Coefficient of Resonate Frequency：τf） 10
2.1.2 介電原理 12
2.2 平面式傳輸線原理 15
2.2.1 平面式共平面波導饋入結構 15
2.2.2 微帶線原理 16
2.2.2.1 微帶線原理及結構 16
2.2.2.2 微帶線傳播模態 17
2.2.3 微帶線公式分析及考量 18
2.2.3.1 有效介電常數及特性阻抗 18
2.2.3.2 微帶線公式分析 18
2.2.3.3 微帶線各項參數 20
2.2.3.4 微帶線的損失 21
2.3 天線原理 22
2.3.1 天線功能與參數 22
2.3.1.1 輸入阻抗（Input Impedance） 23
2.3.1.2 諧振頻率（Resonant Frequency） 24
2.3.1.3 頻寬（Bandwidth） 25
2.3.1.4 輻射場型（Radiation Pattern） 25
2.3.1.5 極化（Polarization） 28
2.3.1.6 輻射效率（Radiation Efficiency） 31
2.3.1.7 指向性（Directional） 31
2.3.1.8 增益（Gain） 33
2.3.2 微帶天線原理 33
2.3.2.1 微帶天線概述 33
2.3.2.2 空腔模型理論 34
2.3.2.3 微帶平面天線結構 36
2.3.2.4 微帶平面天線設計方式 37
第三章 實驗方法 42
3.1 陶瓷基板的製備步驟 42
3.1.1 粉末的配置與球磨 42
3.1.2 粉末的煆燒與二次球磨 42
3.1.3 加入黏著劑、過篩及壓模 43
3.1.4 去除黏著劑與燒結 43
3.1.5 研磨、拋光與銀膠塗佈 44
3.2 毫米波線路之結構化 45
3.2.1 雷射雕刻燒蝕製程 45
3.2.2 切片分析 49
3.3 平面式共平面波導饋入微帶線設計及量測 50
3.4 基板電氣特性參數萃取 53
3.4.1 有效介電常數萃取 54
3.4.2 損失因數萃取 54
3.5 無源天線溫度感測器的量測 56
第四章 結果與討論 59
4.1 雷射雕刻製程參數最佳化 59
4.1.1 RO3003基板 59
4.1.2 Mg2SnO4基板 65
4.2 平面式共平面波導饋入微帶線 70
4.2.1 平面式共平面波導饋入微帶線設計於RO3003基板 70
4.2.1.1 模擬及量測結果 74
4.2.1.2 基板電氣特性參數萃取結果 76
4.2.2 平面式共平面波導饋入微帶線設計於Mg2SnO4基板 84
4.2.2.1 模擬及量測結果 88
4.2.2.2 基板電氣特性參數萃取結果 90
4.3 無源天線溫度感測器 99
4.3.1 感測天線設計於Mg2SnO4基板 99
4.3.1.1 感測天線雛形設計及模擬結果 99
4.3.1.2 平面式共平面波導饋入感測天線雛形設計及模擬與量測結果 103
4.3.1.3 感測天線結構設計及模擬結果 106
4.3.2 收發天線設計於RO3003基板 110
4.3.2.1 模擬與量測結果 112
4.3.3 無源天線溫度感測器 116
4.3.3.1 無源天線溫度感測器設計模擬及量測結果 116
第五章 結論 120
參考文獻 122

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