臺灣博碩士論文加值系統

數位科技爆炸的時代，自動化的數位控制系統也提供了工業界更多發展的可能性，相較於類比控制系統，數位控制系統擁有較佳的精確度、穩定度以及較廣泛、便利的資料蒐集方式。但仍有相當多設備是仰賴類比控制系統控制，用以提供真空鍍膜製程的部分電漿電源供應器也涵蓋其中，本論文是實現數位控制的系統架構設計應用於電漿電源供應器的實作。

本文是設計並製作一數位自動控制系統用以操控類比介面的ADL直流電源供應器以及CESAR的RF電源供應器。此系統之整體架構區分為三大單元，包含數位程式處理單元、數位轉類比信號轉換單元以及電源供應器選擇單元共三大單元。

數位程式處理單元是利用Arduino Uno開發板及其官方軟體將控制程式寫入板中，並利用其官方軟體介面進行操控以及反饋資訊顯示，其中包含數值設定、開關、數值回饋及錯誤資訊等功能。數位類比信號轉換單元是將Arduino開發板送出的信號或是電源供應器回饋的信號加以轉換，當中包含PMW及類比轉換模組、繼電器控制模組以及電壓調變模組等電路。電源供應器選擇單元則是因應雙電源控制器其不同的類比功能腳位定義，而利用繼電器去執行兩個不同電源供應器之間的功能切換。

In the modern age of digital technology explosion, the digital control system of automation provides more possibilities for development of industry. Compared with analog control systems, digital control systems have better accuracy, stability, and more extensive and convenient way to collect data. However, many devices’ controllers still rely on analog control systems. Part of the plasma power supply that is used to provide the vacuum coating process is also included. This thesis is the implementation of digital control system architecture design applied to plasma power supplies.

This paper is regarding to design and make a digital automatic control system to control the analog interface of ADL DC power supply and CESAR RF power supply. The system architecture consists of three main units including a digital program processing unit, a digital-to-analog signal transform unit, and a power supply selection unit.

The digital program processing unit uses the Arduino Uno Development Board and its official software to write the control program to the board, and uses its official software interface to control and display the feedback information, value setting, switching, data feedback, and error information. The digital-to-analog signal transform unit transforms the signals sent by the Arduino Development Board or the signals returned by the power supply. It includes the PMW and analog transform modules, relay control modules, and voltage modulation modules. The power supply selection unit uses relay to perform the function switching between two different power supplies. According to the different pins that the two power controllers are defined by analog function.

中文摘要 iii
Abstract iv
誌謝 vii
目錄 vii
表目錄 viii
圖目錄 ixx
第一章 緒論 1
1.1 前言 1
1.2 研究動機 2
1.3 章節概述 3
第二章 控制系統架構介紹 4
2.1 系統架構 4
2.2 操作說明 5
2.3 電源控制腳位 6
第三章 控制程式介紹 16
3.1 微控制器介紹 16
3.2 開發工具 21
3.3 程式內容 27
第四章 硬體電路組成 43
4.1 硬體規格 43
4.2 輸出電路設計 50
4.3 回授電路設計 52
4.4 雙電源切換模組 55
4.5 LAYOUT介紹 56
第五張 結論 61
參考文獻 62
附錄
A 程式語言內容 64

1.維基百科, Arduino,（February, 26, 2019）[Online Available.]:
https://zh.wikipedia.org/wiki/Arduino
2.Wikipedia, Arduino Software IDE, （September, 25, 2019）[Online Available.]:
https://en.wikipedia.org/wiki/Arduino_IDE
3.Wikipedia. （April, 2011）, Physical vapor deposition, [Online Available.]:
https://en.wikipedia.org/wiki/Physical_vapor_deposition
4.AE ADVANCED ENERGY, RF產生器, 2016. [Online Available.]:
https://www.advanced-energy.com/Contact-Us-TW
5.Analoge & Digitale Leistungselektronik GmbH, DC-Sputtering Power Supplies GSW, 2018. [Online Available.]:
http://www.adl-gmbh.com/en_products_SPS_GSW.html
6.Atmel Corporation, ATMEGA328P Microcontroller, 2015. [Online Available.]:
http://ww1.microchip.com/downloads/en/DeviceDoc/Atmel-7810-Automotive-Microcontrollers-ATmega328P_Datasheet.pdf
7.ADL Analoge & Digitale Leistungselektronik GmbH, GSW Power Supply User manual, 2017.
8.AE ADVANCED ENERGY, CESAR RF 1310 Generator User manual, 2008.
9.維基教科書，Arduino簡介（2015, April, 22.）, [Online Available.]:
https://zh.wikibooks.org/zh-tw/Arduino/%E7%AE%80%E4%BB%8B
10.林信良, Arduino Uno功能簡介, 2016. [Online Available.]:
https://openhome.cc/Gossip/Books/mBlockArduino1-3and1-4.html
11.Arduino Software官方網站, Arduino IDE downloads, [Online Available.]:
https://www.arduino.cc/en/main/software
12.AUTODESK TINKERCAD官方網站, 2019. [Online Available.]:
https://www.tinkercad.com/
13.HK4100F-DC5V-SHG Datasheet – Power PCB Relay, [Online Available.]:
http://www.datasheetcafe.com/hk4100f-dc5v-shg-datasheet-relay/
14.BUY360, QS-1205CME-3A, [Online]. Available:
http://www.buy360.com.tw/product.asp?Gid=6220530
15.德源科技，PWM線性轉換變送器模塊，2010, June, 14. [Online Available.]:
http://twarm.com/commerce/product_info.php?cPath=132_817&products_id=1035&sid=4ce3061f9a0274dc7994a2d50fe268f7.
16.MOTOROLA ANALOG IC DEVICE DATA, LM385, 1996. [Online Available.]:
https://www.alldatasheet.com/datasheet-pdf/pdf/3067/MOTOROLA/LM358.html
17.iCShop, 八路繼電器模組，2017, December,26. [Online Available.]:
https://www.icshop.com.tw/product_info.php/products_id/25936
18.維基百科，電壓分配定則，2018, March,31. [Online Available.]:
https://zh.wikipedia.org/wiki/%E9%9B%BB%E5%A3%93%E5%88%86%E9%85%8D%E5%AE%9A%E5%89%87
19.NI 國家儀器，電壓隨耦器 單位增益緩衝器） 與資料擷取設備的結合應用，2020, February,4. [Online Available.]:
https://www.ni.com/zh-tw/support/documentation/supplemental/12/using-a-unity-gain-buffer--voltage-follower--with-a-daq-device.html