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論文名稱(外文):Fabrication of Silicon Nanowires to Improve Anti-reflectivity Applied to AZOY/n-Si Solar Cells
指導教授(外文):Mau-Phon HoungNa-Fu Wang
外文關鍵詞:MAC etchingSi nanowiresIBC solar cells
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第一章 緒論 1
1-1 前言 1
1-2 太陽能電池簡介 1
1-3 矽奈米線 7
1-4 研究動機 9
第二章 理論基礎與文獻探討 11
2-1 矽奈米線 11
2-2 AZOY薄膜製備 15
2-3 叉指圖形轉移 20
2-4 半導體物理與元件 22
第三章 實驗方法與儀器介紹 33
3-1 實驗流程 33
3-2 實驗藥品及參數介紹 37
3-3 實驗儀器介紹 41
第四章 結果與討論 50
4-1 實驗架構 50
4-2 矽奈米線調變 51
4-3 叉指圖案轉移 59
4-4 遮罩設計參數調變 63
4-5 矽奈米線叉指式背電極太陽能電池分析 70
第五章 結論 73
第六章 未來展望 77
參考文獻 78
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