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研究生:張家睿
研究生(外文):Chang, Chia-Jui
論文名稱:發展氮化鎵系列發光二極體深度解析光學量測之研究
論文名稱(外文):Development of depth-resolved optical characterization of GaN-based LED
指導教授:盧廷昌盧廷昌引用關係
指導教授(外文):Lu, Tien-Chang
口試委員:李柏璁陳國平林資榕林佳鋒
口試委員(外文):Li, Po-TsungChen,Guo-PingLin,Zih-RongLin,Jia-Fong
口試日期:2019-06-27
學位類別:碩士
校院名稱:國立交通大學
系所名稱:光電工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2019
畢業學年度:108
語文別:中文
論文頁數:28
中文關鍵詞:氮化鎵發光二極體應變應力拉曼
外文關鍵詞:GaNLEDstrainstressRaman
相關次數:
  • 被引用被引用:0
  • 點閱點閱:129
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  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
中文摘要 i
英文摘要 ii
目錄 iii
圖表目錄 v
第一章 緒論 1
1.1前言 1
1.2氮基發光二極體的效率問題 2
1.3三五族氮化物的極化效應 5
1.4研究動機與目的 7
第二章 應力量測與分析 9
2.1 量測方法 9
2.2 成長到不同階段氮基發光二極體應變分析 16
2.3 氮化鎵磊晶層厚度對應變的影響 18
2.4 結論 20
第三章 電性改善及發光特性分析 21
3.1 以高摻雜n-AlGaN改善發光二極體電性 21
3.2拉曼分析與光致發光比較 22
3.3 結論 25
第四章 總結與未來展望 26
參考文獻 27
[1] Dandan ZhuColin J. Humphreys. “Solid-State Lighting Based on Light Emitting Diode Technology”. Optics in Our Time. pp 87-118
[2] Meng Zhang. “InGaN/GaN self-organized quantum dot green light emitting diodes with reduced efficiency droop”. Applied Physics Letters 97(1):011103-011103-3 (2010)
[3] William A.Melton. “GaN growth on sapphire”. Journal of Crystal Growth Volume 178, Issues 1–2, 2 June 1997, Pages 168-173
[4] D. Cherns and S. J. Henley. “Edge and screw dislocations as nonradiative centers in InGaN/GaN quantum well luminescence”. Appl. Phys. Lett. 78, 2691 (2001)
[5] Chris G. Van de Walle. “Interactions of hydrogen with native defects in GaN”. Phys. Rev. B 56, R10020(R)(1997)
[6] H. Amano.” Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer”. Appl. Phys. Lett. APLCLASS2019, 353 (2019)
[7] Hiroshi Amano. ” P-Type Conduction in Mg-Doped GaN Treated with Low-Energy Electron Beam Irradiation (LEEBI)”. Japanese Journal of Applied Physics, Volume 28, Part 2, Number 12
[8] Shuji Nakamura. ” Novel metalorganic chemical vapor deposition system for GaN growth”. Appl. Phys. Lett. 58, 2021 (1991)
[9] Chiao-Yun Chang. Tien-Chang Lu. “Manipulation of nanoscale V-pits to optimize internal quantum efficiency of InGaN multiple quantum wells”. Appl. Phys. Lett. 106, 091104 (2015)
[10] Narihito Okada. “Controlling potential barrier height by changing V-shaped pit size and the effect on optical and electrical properties for InGaN/GaN based light-emitting diodes”. Journal of Applied Physics 117, 025708 (2015)
[11] Seung-Jae Lee. “High-Brightness GaN-Based Light-Emitting Diodes on Si Using Wafer Bonding Technology”. Applied Physics Express, Volume 4, Number 6
[12] Ying-Chung Lu. “Investigation of Efficiency Droop on Blue InGaN
Light-Emitting Diodes Using Varied Barrier Thicknesses”. Thesis (2009)
[13] Giovanni Verzellesi, Enrico Zanoni. “Efficiency droop in InGaN/GaN blue lightemitting diodes: Physical mechanisms and remedies”. J. Appl. Phys. 114, 071101 (2013)
[14] O. Ambacher. “Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures”. Journal of Applied Physics 85, 3222 (1999)
[15] Hiroshi Harima. “Properties of GaN and related compounds studied by means of Raman scattering”. Journal of Physics: Condensed Matter, Volume 14, Number 38
[16] Seung-Young Lim. “Depth dependent strain analysis in GaN-based light emitting diodes using surface-plasmon enhanced Raman spectroscopy”. Phys. Status Solidi A 214, No. 8, 1600805 (2017)
[17] Li, H. et al. “Three dimensional characterization of GaN-based light emitting diode grown on patterned sapphire substrate by confocal Raman and photoluminescence spectromicroscopy”. Sci. Rep. 7, 45519; doi: 10.1038/srep45519 (2017).
[18] M. Pophristic. “Raman microscopy of lateral epitaxial overgrowth of GaN on sapphire”. Appl. Phys. Lett. 74, 3519 (1999)
[19] Kunie Ishioka, Hrvoje Petek. “The effect of n- and p-type doping on
coherent phonons in GaN”. J. Phys.: Condens. Matter 25 (2013) 205404
[20] Meng Qi, Huili Grace Xing. “Debdeep Jena. Dual optical marker Raman characterization of strained GaN-channels on AlN usingAlN/GaN/AlN quantum wells and 15N isotopes”. APL. 106, 041906 (2015); doi: 10.1063/1.4906900
[21] Wei-Liang Chen, Tien-Chang Lu, and Yu-Ming Chang. “Depth-resolved confocal micro-Raman spectroscopy for characterizing GaN-based light emitting diode structures” Rev. Sci. Instrum. 84, 113108 (2013)
[22] NEIL J. EVERALL. “Modeling and Measuring the Effect of Refraction on the Depth Resolution of Confocal Raman Microscopy”. APPLIED SPECTROSCOPY. Volume 54, Number 6 (2000)
[23] Chris G, Van de Walle. “Effects of impurities on the lattice parameters of GaN”. PHYSICAL REVIEW B 68, 165209 (2003)
[24] L. T. Romano.” Effect of Si doping on strain, cracking, and microstructure in GaN thin films grown by metalorganic chemical vapor deposition”. JOURNAL OF APPLIED PHYSICS. VOLUME 87, NUMBER 11(2000)
[25] W. D. Nix and B. M. Clemens, J. Mater. Res. 14, 3467 (1999)
[26] S. Fritze, A. Rohrbeck et al. “High Si and Ge n-type doping of GaN doping - Limits and impact on stress”. Appl. Phys. Lett. 100, 122104 (2012)
[27] S. Pereira, C. J. Deatcher. “Strain and composition distributions in
wurtzite InGaN/GaN layers extracted from xray reciprocal space mapping”. Appl. Phys. Lett. 80, 3913 (2002)
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