# 臺灣博碩士論文加值系統

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 摘要 iAbstract ii目錄 iv圖目錄 viii表目錄 xv符號說明 xvi一、 緒論 11.1 研究背景 11.2 文獻回顧 31.3 研究動機與目的 91.4 論文架構 10二、 理論基礎 112.1 微致動器 112.2 V型結構致動理論 172.3 挫曲理論 19三、 研究方法 223.1 研究架構 223.2 模擬分析 233.2.1 結構選擇 243.2.2 模型設定 263.2.3 網格收斂分析 293.2.4 形變量與軌跡分析 343.3 實驗製備 353.3.1 材料選擇與製作 373.3.2 結構形狀定義 373.3.3 結構釋放 403.4 實驗量測 433.4.1 實驗架設 443.4.2 量測方法 46四、 結果與討論 494.1 模擬結果 494.1.1 理論與模擬比較 494.1.2 幾何結構與形變量之關係 524.1.3 V型樑與Z型樑之角度關係 744.1.4 耦合樑之水平高低差現象 774.2 微熱致動器製備 844.2.1 結構圖形 844.2.2 結構圖形定義 874.2.3 結構釋放 904.3 量測結果 944.3.1 角度與形變量之關係 954.3.2 深寬比與形變量之關係 1004.3.3 V型樑與Z型樑之等效關係 1054.3.4 實驗結果探討 110五、 結論與未來工作 116參考文獻 118
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