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研究生:陳冠廷
研究生(外文):Guan-Ting Chen
論文名稱:具二維移動軌跡之V型薄膜微熱致動器設計與製備
論文名稱(外文):Design and fabrication of V-shaped thin-film micro-thermal actuators with two-dimensional trajectory
指導教授:洪銘聰洪銘聰引用關係
指導教授(外文):Ming-Tsung Hung
學位類別:碩士
校院名稱:國立中央大學
系所名稱:機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2020
畢業學年度:108
語文別:英文
論文頁數:143
中文關鍵詞:微機電系統微致動器
相關次數:
  • 被引用被引用:0
  • 點閱點閱:46
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  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
摘要 i
Abstract ii
目錄 iv
圖目錄 viii
表目錄 xv
符號說明 xvi
一、 緒論 1
1.1 研究背景 1
1.2 文獻回顧 3
1.3 研究動機與目的 9
1.4 論文架構 10
二、 理論基礎 11
2.1 微致動器 11
2.2 V型結構致動理論 17
2.3 挫曲理論 19
三、 研究方法 22
3.1 研究架構 22
3.2 模擬分析 23
3.2.1 結構選擇 24
3.2.2 模型設定 26
3.2.3 網格收斂分析 29
3.2.4 形變量與軌跡分析 34
3.3 實驗製備 35
3.3.1 材料選擇與製作 37
3.3.2 結構形狀定義 37
3.3.3 結構釋放 40
3.4 實驗量測 43
3.4.1 實驗架設 44
3.4.2 量測方法 46
四、 結果與討論 49
4.1 模擬結果 49
4.1.1 理論與模擬比較 49
4.1.2 幾何結構與形變量之關係 52
4.1.3 V型樑與Z型樑之角度關係 74
4.1.4 耦合樑之水平高低差現象 77
4.2 微熱致動器製備 84
4.2.1 結構圖形 84
4.2.2 結構圖形定義 87
4.2.3 結構釋放 90
4.3 量測結果 94
4.3.1 角度與形變量之關係 95
4.3.2 深寬比與形變量之關係 100
4.3.3 V型樑與Z型樑之等效關係 105
4.3.4 實驗結果探討 110
五、 結論與未來工作 116
參考文獻 118
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