臺灣博碩士論文加值系統

本實驗使用兩種電極及三種共振腔，運用在製作於相同的氧化鋅奈米柱基板的水聽器，量測何種架構的水聽器對於接收聲音的效率比較好。電極部分，一種是使用指叉電極，另一種則不使用指叉電極，直接用基板與最上層的材料做接點量測；三種共振腔分別是載玻片、直徑14mm與曲率6.5mm-1的曲面玻璃和直徑9.8mm與曲率5.7mm-1的曲面玻璃；氧化鋅基板則是用導電膜玻璃(Indium Tin Oxide, ITO)作為底層基板，在上面濺鍍一層氧化鋅後，將它浸泡於硝酸鋅(Zn(NO3)2)與環六亞甲基四胺(C6H12N4)溶液中，使表面形成氧化鋅奈米柱；再用電極的光罩壓在基板上，濺鍍電極，另一片則不使用電極光罩濺鍍，並將這兩種熱壓共振腔後用環氧樹脂封裝，最後放置於水中量測。

In this study, the hydrophone with two types of electrode structures and three types of resonance cavities were proposed, and the zinc oxide nanocolumn substrate was used in all samples to measure and obtain the optimizing hydrophone in efficiency of receiving sound. The design of electrode is including an interdigitated electrode or without interdigitated electrode. While measuring the hydrophone without interdigitated electrode, the measurement probes are directly contacted on the substrate and on the top layer of the material. Concerning the resonant cavity in hydrophone, three different sizes of curved glass were used including the glass slide, the curved glass with a diameter of 14mm and a curvature of 6.5mm-1 , and the curved glass with diameter of 9.8mm and a curvature of 5.7mm-1. The zinc oxide substrate was made on conductive film glass (Indium Tin Oxide,ITO) as a buffer substrate of hydrophone. After sputtering a zinc oxide buffer substrate on the ITO substrate, the ZnO sample was immersed in a solution of zinc nitrate(Zn(NO3)2) and Methenamine(C6H12N4 ) to construct the nanometer ZnO surface. The electrode mask was then adhered on the nanometer ZnO surface to complete the electrodes of designed resonant cavity. Finally, the resonant cavity was encapsulated using epoxy resin, and then the sound receiving performance of the hydrophone was evaluated in the water.

摘 要 i
Adstract ii
誌 謝 iii
目 錄 iv
圖 目 錄 vii
表 目 錄 xi
第一章 緒論 1
1-1 前言 1
1-2 研究動機與目的 2
1-3 研究方式 2
1-4 論文架構 3
第二章 基礎理論 4
2-1 壓電材料理論 4
2-1-1 壓電效應 4
2-1-2 壓電材料種類 5
2-2 氧化鋅(ZnO) 5
2-2-1 基本特性 5
2-2-2 濺鍍壓電層 6
2-2-3 成長奈米柱層 6
2-2-4 氧化鋅(ZnO)與鈦酸鉛鋯(PZT)的比較 6
2-3 電極 7
2-4 共振腔 8
第三章 實驗方法 9
3-1 設計架構 9
3-2 實驗用品 10
3-2-1 實驗溶液 10
3-2-2 實驗氣體 10
3-2-3 實驗靶材 11
3-2-4 實驗藥品 11
3-2-5 實驗設備 11
3-3 實驗流程 12
3-3-1 濺鍍前基板清潔 12
3-3-2 濺鍍晶種層 13
3-3-3 熱退火 13
3-3-4 以水熱法生長奈米柱 13
3-3-5 濺鍍電極與保護層 13
3-3-6 熱壓共振腔 14
3-3-7 焊上接腳 14
3-3-8 封裝 14
第四章 實驗結果與討論 15
4-1 材料分析 15
4-1-1 X光繞射儀分析晶格結構 15
4-1-2 場發射型掃描式電子顯微鏡分析奈米柱 17
4-2 訊號分析-頻譜分析儀 18
4-2-1 5kHz訊號量測 19
4-2-2 10kHz訊號量測 23
4-2-3 20kHz訊號量測 27
4-2-4 40kHz訊號量測 31
4-2-5 37.5kHz訊號量測 35
4-2-6 量測結果總表 39
第五章 結論與未來展望 40
5-1 結論 40
5-2 未來展望 40
參考文獻 41

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