臺灣博碩士論文加值系統

第一章 前言 1
1-1 研究動機 1
1-1-1 低頻喚醒接收器模組 1
1-1-2 微機電低功耗無線接收器前端 2
1-2 文獻回顧 6
1-2-1 微機電共振式開關 6
1-2-2 開關鍵控/頻移鍵控(OOK/FSK)無線接收器模組 8
第二章 元件結構及後端電路設計 11
2-1 微機電摺疊樑梳狀共振式開關之設計與運作原理 11
2-2 共振式開關數學模型建立 12
2-3 熱切換(Hot Switching)輸出訊號之後端解調電路設計 26
第三章 元件製程步驟與結果 34
3-1 CMOS-MEMS 0.35 μm標準製程 34
3-2 元件濕蝕刻後製程 35
第四章 量測結果與討論 36
4-1 頻率響應與熱切換輸出訊號量測 37
4-2 開關鍵控/頻移鍵控(OOK/FSK)訊號解調量測 40
4-3 共振開關功耗及可靠度量測 45
第五章 結論與未來展望 48
5-1 共振開關可靠度之提升 48
5-2 OOK/FSK 接收器的性能及穩定度 49
參考文獻 50

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