臺灣博碩士論文加值系統

目錄
中文摘要 Ⅰ
英文摘要 III
致謝 Ⅴ
目錄 ⅤⅠ
圖目錄 XⅠ
表目錄 XⅤ

第一章 緒論 1
1.1 前言 1
1.2 研究動機 3

第二章 文獻回顧 4
2.1鑽石薄膜的特性簡介 4
2.1.1 鑽石薄膜基本性質及結構 4
2.1.2超奈米鑽石成長機制 5
2.1.3奈米結晶鑽石 6
2.2 奈米碳管之特性簡介 8
2.2.1 奈米碳管特性 8
2.2.2 奈米碳管合成方法 11
2.2.3奈米碳管成長機制 16
2.3 石墨烯特性簡介 18
2.3.1 石墨烯的基本性質與結構 18
2.3.2 石墨烯成長機制與製備方法 21
2.3.3 石墨烯的特性 25
2.4 還原氧化石墨烯的特性簡介 26
2.4.1 還原氧化石墨烯還原方法 26
2.5 氣體感測器機制與種類 28
2.5.1電化學型氣體感測器 30
2.5.2紅外線感測型氣體感測器 30
2.5.3觸媒燃燒型氣體感測器 31
2.5.4金屬氧化物半導體型氣體感測器 ….32

第三章 實驗方法 34
3.1 實驗設計與流程 34
3.2 製備之材料介紹 38
3.3 基板清洗 39
3.4 微波電漿化學氣相沉積法成長摻氮-超奈米鑽石結晶 40
3.5 化學氣相沉積法成長高穩定性奈米碳管 42
3.6 製作還原氧化石墨烯 44
3.7 石墨烯轉移 45
3.8 儀器設備與材料分析方法 50
3.7.1 場發射掃描式電子顯微鏡(FE-SEM) 50
3.8.2 能量分散光譜儀(Energy Dispersive Spectrometer，EDS) 51
3.8.3 拉曼光譜儀(Raman spectrum) 51
3.8.4 霍爾量測儀(Hall measurement ) 52
3.8.5 光激發螢光光譜儀(Photoluminescence，PL) 53
3.8.6 場發射槍穿透式電子顯微鏡(FEG-TEM) 54
3.8.7 原子力顯微鏡(Atomic Force Microscpoic，AFM) 55
3.8.8 紫外光/可見光光譜儀分析(UV-Vis Spectrometers) 56
3.8.9氣體感測器(Gas sensor) 57
第四章 奈米碳管-超奈米鑽石複合結構分析與氫氣感測特性 58
4.1超奈米鑽石特性分析 58
4.1.1 表面型態分析 58
4.1.2 拉曼光譜儀分析 62
4.1.3光激發螢光光譜儀分析 63
4.1.4超奈米鑽石氫氣感測分析 66
4.2 超奈米鑽石誘導成長奈米碳管特性分析 72
4.2.1 表面型態分析 72
4.2.2 場發射槍穿透式電子顯微鏡分析 74
4.2.3 拉曼光譜儀分析 76
4.2.4 光激發螢光光譜儀分析 76
4.2.5 超奈米鑽石濺鍍不同時間催化劑成長奈米碳管氫氣感測分析 79
4.3超奈米鑽石藉由催化劑誘導成長不同時間奈米碳管氣體感測特性 84
4.3.1 表面型態分析 85
4.3.2 拉曼光譜儀分析 86
4.3.3 超奈米鑽石誘導成長不同時間奈米碳管氫氣感測分析 88
4.4 超奈米鑽石誘導成長奈米碳管氫氣感測之穩定性與重複性分析 93
4.4.1 重複性分析 93
4.4.2 穩定性分析 95
4.4.3 穩定性比較 96
4.5 不同光源(LED)照射奈米碳管-超奈米鑽石複合結構氫氣感測分析 98
4.5.1 紫外光-可見光光譜分析 98
4.5.2 發光二極體照射奈米碳管-超奈米鑽石複合結構氫氣感測分析 99
4.6 參考文獻比較 100

第五章 石墨烯/奈米碳管-超奈米鑽石複合結構之氫氣感測特性 101
5.1奈米碳管-超奈米鑽石複合結構加入還原氧化石墨烯氫氣感測特性分析 101
5.1.1 表面型態分析 102
5.1.2 拉曼光譜儀分析 103
5.1.3 光激發螢光光譜儀分析 104
5.1.4 還原氧化石墨烯/奈米碳管-超奈米鑽石複合結構氫氣感測分析 105
5.2還原氧化石墨烯/奈米碳管-超奈米鑽石複合結構穩定性與重複性分析 110
5.2.1 還原氧化石墨烯/奈米碳管-超奈米鑽石複合結構重複性分析 110
5.2.2 還原氧化石墨烯/奈米碳管-超奈米鑽石複合結構穩定性分析 112
5.3奈米碳管-超奈米鑽石複合結構轉移不同層數石墨烯氫氣感測特性分析 113
5.3.1 表面型態分析 114
5.3.2 拉曼光譜儀分析 115
5.3.3 光激發螢光頻譜儀分析 117
5.3.4 石墨烯/奈米碳管-超奈米鑽石複合結構氫氣感測分析 118
5.3.5 氫電漿後處理雙層石墨稀/奈米碳管-超奈米鑽石超複合結構氣體感測特性 122
5.4 石墨烯/奈米碳管-超奈米鑽石複合結構氫氣感測重複性與穩定性分析 126
5.4.1石墨烯-奈米碳管-超奈米鑽石複合結構重複性分析 126
5.4.2石墨烯-奈米碳管-超奈米鑽石複合結構穩定性分析 128
5.4.3重複性比較 130
5.4.4穩定性比較 131
5.5 參考文獻比較 132


第六章 結論與未來展望 133
6.1 結論 133
6.2 未來展望 137
參考文獻 138

參考文獻
[1]. Xueying Kou, Ning Xie, Fang Chen, Tianshuang Wang, Lanlan Guo, Chong Wang, Qingji Wang, Jian Ma, Yanfeng Sun, Hong Zhang, Geyu Lu, “ Superior acetone gas sensor based on electrospun SnO2 nanofibers by Rh doping”, Sensors and Actuators B 256 (2018) 861–869.
[2]. R. Sankar Ganesha,b, M. Navaneethanb,c, V.L. Patil d, S. Ponnusamy b, C. Muthamizhchelvanb, S. Kawasaki e, P.S. Patil d, Y. Hayakawaa,c, “ Sensitivity enhancement of ammonia gas sensor based on Ag/ZnO flower and nanoellipsoids at low temperature ”, Sensors and Actuators B 255 (2018) 672–683.
[3]. C.W. Zou, J. Wang, W. Xie, “ Synthesis and enhanced NO2 gas sensing properties of ZnO nanorods/ TiO2 nanoparticles heterojunction composites ”, Journal of Colloid and Interface Science 478 (2016) 22–28.
[4]. H. W. Kroto , J. R. Heath, S. C. O'Brien, R. F. Curl and R. E. Smalley, “ C60: Buckminsterfullerene ”, Nature, 318(No.6042), 162-163,(1985).
[5]. Sariciftci NS, Smilowitz L, Heeger AJ, Wudl F., “ Photoinduced electron transfer from a conducting polymer to buckminsterfullerene ”, Science. Nov 27 ; 258 (5087) : 1474-6 (1992).
[6]. Ayrat M. Dimiev and James M. Tour. “ Mechanism if Graphene Oxide Formation.
[7]. S.Matusumoto, Y.Sato, M.Kamo, and N.Setaka, “ Vapor Depositiion of Diamond Particles from Methane ” Japanese J.Appl. Phys. (1992) 1562.
[8]. Lin, C. R., et al. “ Development of high-performance UV detector using nanocrystalline diamond thin film ” International Journal of Photoenergy (2014)
[9]. Suneet Arora, V.D. Vankar, “ Field emission characteristics of microcrystalline diamond films:Effect of surface coverage and thickness ” Thin Solid Films (2006) 1963.
[10]. S.J. Kim, B.K Jul, Y.H. Lee, B.S. Park IEEE (1996) 526.
[11]. 曾永華、陳柏穎、鄭宇明、游銘永，“人造鑽石的合成及應用”，科學發展497期，一百零三年五月。
[12]. S.Iijima, “ Helical microtubles of graphitic carbon ” Nature,345(1991),56
[13]. R.Saito, G.Dresselhaus, M.S.G.Dresselhaus, “ Physical Properties of Carbon Nanotubes ”,Imperial College Press,London,1998.
[14]. N.Hamada, S.Sawda, A.Oshiyama, “ New one-dimensional conductors: Graphitic microtubules ” Phys.Rev.Lett.,68,1581,1992
[15]. R.Saito , M.Fujita, G.Dresselhaus, M.S.G.Dresselhaus, “ Electronic structure of chiral graphene tubules ” Appl. Phys. Lett., 60, 2204,1992
[16]. J. Justin Gooding, “ Nanostructuring electrodes with carbon nanotubes: A review on electrochemistry and applications for sensing”, Electrochimica Acta 50 (2005) 3049–3060.
[17]. J. Lu, “ Carnon Nanotubes - “ The Material for the new Millennium, in The International Conference on Novel Formation Mechanisms and Physical Properties ”.
[18]. Yahachi Saito, Sashiro Uemura , Carbon 38(2000), 169.
[19]. Wang, M., Zhao, X.,Ohkohchi, M.,Ando,Y., “ Carbon nanotubes grown on the surface of cathode deposit by arc discharge”, Fullerence Sciense and Technology, Vol.4, No.5,pp. 1027-1039(1996)
[20]. Ando, Y., Zhao, X., Sugai, T., Kumar, M., “ Growing carbon nanotubes ” , Materials Today, Vol. 7, No.9, pp. 22-29(2004)
[21]. Cuo, T., Nikolaev, P., Thess, A. Colbert, D.T., Smalley, R.E., “ Catalytic growth of single-walled nanotubes by laser vaporization ”, Chemical Physics Letters, Vol.243, No.1-2,PP.49-54(1995)
[22]. Pan, Z.W., Xie, S.S., Chang, B.H., Sun, L.F., Zhou, W.Y., Wang, G., “ Direct growth of aligned open carbon nanotubes by chemical vapor deposition ”, Chemical Physics Letters, Vol. 299, No. 1, pp. 97-102(1999).
[23]. S.Fan, M.G. Chapline, N.R. Franklin, T. W. Tomlber and H.Dai, “ Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties ”, Science283 (1999)512.
[24]. Mukul Kumar and Yoshinori Ando, “ Chemical Vapor Deposition of Carbon Nanotubes: A Review on Growth Mechanism and Mass Production ” J. Nanosci. Nanotechnol. 2010, Vol. 10, No. 6.
[25]. K.S. Novoselov,A.K Geim. “ Electric Field Effect in Atomically Thin Carbon Film ” Science. 306.666,(2004)
[26]. K .I .Bolotin, K.J Sikes, “ Ultrahigh electron moblilty in suspended graphene ” Solid State Commun. 146.135(2008)
[27]. Wiki/Graphene.
[28]. 石墨烯的結構、性質與應用https://read01.com/J6PLkB.html#.WwKyCEiFNPY
[29]. 石墨烯與二維材料-微奈米科技研究中心-林志堅 http://cmnst.ncku.edu.tw/ezfiles/23/1023/img/2601/435955689.pdf
[30]. Mark Wilson. “ Electrons in atomically thin carbon sheets behave like massless particles”, Phy.Today, 59.21,(2006)
[31]. K.S. Novoselov,A.K Geim. “ Electric Field Effect in Atomically Thin Carbon Film” Science. 306.666,(2004)
[32]. R. R. Nair, P. Blake, A. N. Grigorenko, K. S. Novoselov, T. J. Booth, T. Stauber, N. M. R. Peres, A. K. Geim,“ Fine Structure Constant Defines Visual Transparency of Graphene”, Science,: Vol. 320 no. 5881 p. 1308,( 2008)
[33]. B. C. Brodie et al., Philos. Trans. R. Soc. London, “On the atomic weight of graphite”, Journal Article 149 (1959) 249.
[34]. Y. Xu et al., J. Am. Chem. Soc., “ Flexible graphene films via the filtration of water-soluble noncovalent functionalized graphene sheets”, ACS Publications 130 (2008) 5856.J. William et al., J. Am. Chem. Soc., 80, 1339 (1958).
[35]. X. Li, G. Zhang, X. Bai, X. Sun, X. Wang, E. Wang, H. Dai. “ Highly conducting graphene sheets and Langmuir-Blodgett films ”. Nature Nanotech 3 (2008) 538-542.
[36]. A. A. Balandin, S. Ghosh, W. Bao, I. Calizo, D. Teweldebrhan, F. Miao, C. N. Lau Superior thermal; “ Conductivity of single-layer graphene ”, Nano Lett, 8,902-907(2008).
[37]. A. A. Balandin, S. Ghosh, W. Bao, I. Calizo, D. Teweldebrhan, F. Miao, C. N. Lau Superior thermal; “ Conductivity of single-layer graphene ”, Nano Lett, 8,902-907(2008).
[38]. Keun Soo Kim, Yue Zhao, Houk Jang, Sang Yoon Lee, Jong Min Kim, Kwang S. Kim, Jong-Hyun Ahn, Philip Kim, Jae-Young Choi & Byung Hee Hong, “ Large-scale pattern growth of graphene films for stretchable transparent electrodes”, Nature 457, 706-710, (2009)
[39]. R. R. Nair, P. Blake, A. N. Grigorenko, K. S. Novoselov, T. J. Booth, T. Stauber, N. M. R. Peres, A. K. Geim,“ Fine Structure Constant Defines Visual Transparency of Graphene”, Science,: Vol. 320 no. 5881 p. 1308,( 2008)
[40]. Galina V. Dubacheva. Functional “ Monolayers from carbon nanostructures-fullerenes, carbon nanotubes, and graphene – as novel materials for solar energy conversion ” Coordination Chemistry Reviews 256 (2012) 2628–2639.
[41]. Brodie, B. Note sur un Nouveau “ Procede pour la Purification et la Pesagregation du Graphite ”. Ann. Chim. Phys.1855, 45, 351–353.
[42]. B. C. Brodie et al., Philos. Trans. R. Soc. London, 149, 249 (1959).
[43]. J. William et al., J. Am. Chem. Soc., 80, 1339 (1958).
[44]. Y. Xu , H. Bai, G. Lu, “ Flexible Graphene Films via the Filtration of Water-Soluble Noncovalent Functionalized Graphene Sheets ” J. Am. Chem. Soc.,130, 5856 (2008).
[45]. H. He, J. Klinowski, M. Forster and A. Lerf, “ A new structural model for graphite oxide” Chemical Physics Letters 287 (1–2), 53-56 (1998).
[46]. K. P. Loh, Q.Bao, G. Eda and M.Chhowalla, “ Graphene oxide as a chemically tunable platform for optical applications ” Nature Chemistry 2(12),1015-1024(2010)
[47]. S. Maruyama, R. Kojima, Y. Miyauchi, S. Chiashi, M. Kohno, “Low-temperature synthesis of high-purity single-walled carbon nanotubes from alcohol”. Chemical Physics Letters 360, 229–234 (2002).
[48]. C. Y. Su, Y. Xu, W. Zhang, J. Zhao, A. Liu, X. Tang, C. H. Tsai, Y. Huang, L. J. Li, “Highly Efficient Restoration of Graphitic Structure in Graphene Oxide Using Alcohol Vapors”, ACS Nano 4, 9, 5285–5292 (2010).
[49]. D. R. Dreyer, S. Murali, Y. Zhu, R. S. Ruoffb, C. W. Bielawski, “Reduction of graphite oxide using alcohols”, J. Mater. Chem. 21, 3443–3447 (2011).
[50]. S. Liua, Ke Chena, Y. Fua, S. Yua, Z. Baoa, “Reduced graphene oxide paper by supercritical ethanol treatment and its electrochemical properties”, Applied Surface Science 258, 5299–5303 (2012).
[51]. Z, G, Wang, P. J. Li, Y. F. Chen, J. R. He, B. J. Zheng, J. B. Liu, F. Qi, “The green synthesis of reduced graphene oxide by the ethanol-thermal reaction and its electrical properties”, Materials Letters 116, 416–419 (2014).
[52]. 陳一誠, “金屬氧化物半導體行氣體感測器”, 材料與社會, 68, pp. 62-66, 1992.
[53]. http://highscope.ch.ntu.edu.tw/wordpress/?p=40839
[54]. https://kknews.cc/zh-tw/science/qyeb6qr.html
[55]. http://www.sanlien.com/ad/san_tech.nsf/foundationview/836522106181709A482577A5002C8968/$FILE/77-25-31.pdf.
[56]. 陳一誠, “金屬氧化物半導體行氣體感測器”, 材料與社會, 68, pp. 62-66, 1992.
[57]. N. Yamazoe, J. Fuchigami, M. Kishikawa, and T. Seiyama, Surf. Sci. 86, 335 (1979).
[58]. http://www.ctld.nfu.edu.tw/server/BT/content1/files/C06/c3.pdf
[59]. http://ezphysics.nchu.edu.tw/prophys/basicexp/expnote/hall/hall_920703.pdf
[60]. Sankaran, Kamatchi Jothiramalingam, “ Enhancement of electron field emission properties of ultrananocrystalline diamond films via hydrogen post-treatment ” ACS applied materials & interfaces 6 16(2014) 14543-14551
[61]. Zaitsev, “ Optical properties of diamond: a data handbook, Berlin”, 2000.
[62]. G. Davies, M. F. Hamer, R. Soc. Lond. A 348, 285–98
[63]. X. F. He, N. B. Manson, Peter T. H. Fisk , “ Paramagnetic resonance of photoexcited N- V defects in diamond. I. Level anticrossing in the A ground state” Phys. Rev. B 47, 8809–8815(1993)
[64]. F. M. Hossain, M. W. Doherty, H. F. Wilson, L. C. L. Hollenberg, “ Ab Initio Electronic and Optical Properties of the N−V− Center in Diamond ” Phys. Rev. Lett. 101, 226403, 2008
[65]. F. Jelezko, T. Gaebel, I. Popa, M. Domhan, A. Gruber, J. Wrachtrup, Phys. Rev. Lett. 93, 7, 2004.
[66]. S. J. Yu, M. W. Kang, H. C. Chang, K. M. Chen, Y. C. Yu , “ Bright Fluorescent Nanodiamonds:  No Photobleaching and Low Cytotoxicity ” J Am Chem Soc, 127, 17604-17605, 2005
[67]. 成會明，奈米碳管，五南圖書出版有限公司，台北，第197頁(2004)
[68]. Adhimoorthy Saravanan, B.R Huang, J.P Chu , “ Interface engineering of ultrananocrystalline diamond/MoS2-ZnOheterostructures and its highly enhanced hydrogen gas sensing properties ” , Sensors & Actuators: B. Chemical 292 (2019) 70–79
[69]. Adhimoorthy Saravanan, B.R Huang, Deepa Kathiravan, “ Hierarchical morphology and hydrogen sensing properties of N2-based nanodiamond materials produced through CH4/H2/Ar plasma treatment ” , Applied Surface Science 457 (2018) 367–375
[70]. J. Suehiro, S. Yamane, K. Imasaka, “ Carbon nanotube-based hydrogen gas sensor electrochemically functionalized with palladium ”, IEEE Sens. (2007) 555.
[71]. S. Dhall, N. Jaggi, R. Nathawat, “Functionalized multiwalled carbon nanotubes based hydrogen gas sensor”, Sens. Actuat. A 201 (2013) 321–327.
[72]. T.C. Lin, B.R. Huang, “Palladium nanoparticles modified carbon nanotube/nickel composite rods (Pd/CNT/Ni) for hydrogen sensing”, Sens. Actuat. B 162 (2012) 108–113.
[73]. Daewoong Jung, Maeum Han, Gil S. Lee “Fast-Response Room Temperature Hydrogen Gas Sensors Using Platinum-Coated Spin-Capable Carbon Nanotubes”, ACS Appl. Mater. Interfaces (2015)7, 3050−3057.
[74]. Keyi Yan, Yuhki Toku, Yang Ju “ Highly sensitive hydrogen sensor based on a new suspended structure of cross-stacked multiwall carbon nanotube sheet ”, International Journal of hydrogen energy 44(2019) 6344-6352
[75]. Rakesh Kumar, Shweta Malik, B.R. Mehta “ Interface induced hydrogen sensing in Pd nanoparticle/graphene composite layers ” , Sensors and Actuators B 209 (2015) 919–926.
[76]. Yusin Pak, Sang-Mook Kim, Huisu Jeong “ Palladium-Decorated Hydrogen-Gas Sensors Using Periodically Aligned Graphene Nanoribbons”, ACS Appl. Mater. Interfaces (2014) 6, 13293−13298.
[77]. A. Esfandiar , S. Ghasemi , A. Irajizad , O. Akhavan , M.R. Gholami “The decoration of TiO2/reduced graphene oxide by Pd and Pt nanoparticles for hydrogen gas sensing” , International journal of hydrogen energy 37 (2012) 15423-15432
[78]. Zhangyuan Zhang, Xuming Zou, Lei Xu, Lei Liao, Wei Liu, “ Hydrogen gas sensor based on metal oxide nanoparticles decorated graphene transistor” The Royal Society of Chemistry (2015) , 7, 10078–10084
[79]. Kanika Ananda, Onkar Singh “ Hydrogen sensor based on graphene/ZnO nanocomposite” Sensors and Actuators B 195 (2014) 409–415