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研究生:林逸展
研究生(外文):Yi-Chan Lin
論文名稱:製備超奈米晶鑽石電極/氮化物發光二極體與其特性研究
論文名稱(外文):Growth and characterizations of ultrananocrystalline diamond electrode/gallium nitride-based light-emitting diode
指導教授:柯文政
指導教授(外文):Wen-Cheng Ke
口試委員:郭東昊陳衛國
口試委員(外文):Dong-Hau KuoWei-Kuo Chen
口試日期:2019-12-31
學位類別:碩士
校院名稱:國立臺灣科技大學
系所名稱:材料科學與工程系
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2020
畢業學年度:108
語文別:中文
論文頁數:100
中文關鍵詞:鑽石薄膜微波電漿化學氣相沉積系統LED導電層
外文關鍵詞:Diamond thin filmMicrowave plasma chemical vapor deposition systemLED conducting layer
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第一章 緒論.................................................................................................................. 1
1.1 前言................................................................................................................ 1
1.2 研究動機........................................................................................................ 2
第二章 文獻回顧.......................................................................................................... 3
2.1 鑽石基本性質:............................................................................................ 3
2.2 人造鑽石的發展............................................................................................ 6
2.2.1 化學氣相沉積法簡介................................................................................ 6
2.2.2 熱燈絲化學氣相沉積................................................................................ 9
2.2.3 微波電漿化學氣相沉積.......................................................................... 10
2.2.4 化學氣相沉積法的比較.......................................................................... 11
2.3 MPCVD電漿系統比較 .............................................................................. 12
2.3.1 氫氣電漿系統介紹.................................................................................. 12
2.3.2 氬氣電漿系統介紹.................................................................................. 13
2.4 鑽石薄膜晶粒尺寸分析比較...................................................................... 14
2.4.1 CVD鑽石薄膜種類 ................................................................................ 15
2.4.2 碳類薄膜的其他分類.............................................................................. 16
2.5 鑽石薄膜的成核與成長機制...................................................................... 17
2.5.1 成長機制分類.......................................................................................... 19
2.5.2 強化鑽石成核技術.................................................................................. 21
2.6 鑽石薄膜導電特性 ........................................................................................... 25
VI
2.6.1 P-doped鑽石薄膜 ................................................................................... 25
2.6.2 N-doped 鑽石薄膜.................................................................................. 26
2.6.3 鑽石薄膜應用於LED電極 .................................................................... 27
2.7 近年鑽石薄膜元件應用研究 ........................................................................... 28
第三章 實驗方法........................................................................................................ 29
3.1 實驗步驟...................................................................................................... 29
3.1.1 基板表面奈米圖案化處理...................................................................... 29
3.1.2 超音波震盪基板前處理.......................................................................... 30
3.1.3 CH4/Ar/N2電漿系統沉積UNCD薄膜 .................................................. 31
3.2 微波電漿化學氣相沉積系統 (MPCVD) ................................................... 32
3.3 分析儀器...................................................................................................... 38
3.3.1 拉曼光譜儀 (Raman Spectroscopy) ....................................................... 38
3.3.2 掃描式電子顯微鏡 (Scanning Electron Microscope, SEM) ................. 39
3.3.3 四點探針量測系統(Four point probe meter) .......................................... 40
3.3.4 紫外光-可見光/近紅外光分析儀 ........................................................... 40
3.3.5 電致發光光譜儀(Electroluminescene spectroscopy, EL)....................... 41
第四章 結果與討論.................................................................................................... 42
4.1 在圖案化藍寶石基板上成長n-UNCD薄膜 ............................................. 42
4.1.1 CH4/Ar/N2電漿OES光譜圖 .................................................................. 43
4.1.2 n-UNCD成核密度優化系列 .................................................................. 44
4.1.3 n-UNCD成核密度與基板密度之關係 .................................................. 48
VII
4.2 n-UNCD成長時間與電阻優化系列 .......................................................... 50
4.2.1 n-UNCD薄膜成長速率 .......................................................................... 50
4.2.2 n-UNCD薄膜電阻優化 .......................................................................... 64
4.2.3 n-UNCD薄膜光穿透率分析 .................................................................. 66
4.3 於圖案化LED基板上成長n-UNCD薄膜 ............................................... 68
4.3.1 薄膜型態分析.......................................................................................... 68
4.3.2 薄膜結晶與元素分析.............................................................................. 73
4.3.3 n-UNCD LED光電特性分析與比較 ..................................................... 77
第五章 結論................................................................................................................ 81 參考文獻...................................................................................................................... 83
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