中文摘要 i
英文摘要 ii
致謝 iii
目錄 iv
圖目錄 vi
表目錄 x
第一章 緒論 1
1.1研究動機 1
1.2文獻回顧及探討 4
1.2.2 高頻探針接觸式量測發展 4
1.2.1近場量測的技術與應用 9
1.2.3 De-embedded的技術 14
1.3章節介紹 17
第二章 非接觸式饋入介面 18
2.1 目前近場量測於電路特性檢測之應用 20
2.1.1頻域近場量測架構 20
2.1.2 時域近場量測架構 21
2.1.3 靜電放電消散路徑時域近場量測架構 23
2.2非接觸訊號饋入引出之量測探頭選用 26
2.2.1基於頻域近場量測非接觸式訊號饋入量測架構 26
2.2.2基於時域近場量測非接觸式訊號饋入量測架構 29
2.2.3非接觸式訊號饋入架構建立 31
第三章 非接觸式訊號介面等效模型建立 34
3.1 訊號饋入探頭改善與模型建立 34
3.1.1 電場探頭設計與改善 34
3.1.2場探頭模型建立 39
3.2 非接觸式饋入量測架構模型建立 43
3.2.1待測物模型建立 43
3.2.2 量測架構模型建立 46
第四章 非接觸式量測系統電路訊號檢測方法驗證 51
4.1傳輸線De-embedding驗證 51
4.1.1 De-embedding還原待測物特性 52
4.1.2 探頭耦合與待測物特性驗證 54
4.2 濾波器De-embedding驗證 58
4.2.1 濾波器樣品設計與特性 58
4.2.2 探頭耦合與待測物特性驗證 61
4.3 De-embedding問題分析與探討 63
第五章 結論與未來展望 68
參考文獻 69

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