本實驗研究藉由場發射兩端點圖形的不對稱特性，造成發射端點電場與發射電子數量的不一致，形成二極體的特性曲線。由於製作的元件，其場發射陰極陽極間距離只有40~50奈米，小於電子於大氣中的平均自由路徑( 200 nm)，因此理論上可以大幅減少粒子散射的機率，可以在常壓下操作。本研究同時比較一般固態二極體差異，並以有限元素分析元件的粒子拋射與特性。

This thesis fabricated and measured nanoscale field emission diode by utilizing an asymmetry anode-cathode patterns to create asymmetric electric field and field emission current between the forward and reverse directions. The micrograph of the anode-cathode transport distance is about 40-50 nanometers, which is far less than the mean free path of electrons in the atmospheric pressure (~200 nm). This property enables the current devices to operate under atmospheric pressure. The study also compared the electrical characteristics with a solid-state diode. A particle trajectory model by finite element analysis is to analyze the asymmetric field emission current.

論文審定書i
誌謝ii
摘要iii
ABSTRACTiv
目錄v
圖目錄vii
表目錄viii
第一章 緒論1
1-1 研究背景與動機1
1-2 文獻探討3
1-3 真空管介紹4
1-4 固態元件發展6
1-5 論文架構8
第二章 電子元件發展與基礎理論9
2-1 真空通道電晶體介紹9
2-2 奈米大氣通道電晶體介紹9
2-3 發射電子理論10
2-3-1 空間電荷限制電流 Child–Langmuir law 11
2-3-2 蕭特基發射 Schottky Emission12
2-3-3傅勒-諾德海姆穿隧 F-N Tunneling13
2-3-4普爾-法蘭克發射(Poole-Frenkel Emission)15
第三章 實驗設計模擬與實驗儀器17
3-1 元件設計17
3-2 有限元素 COMSOL 模擬元件22
3-3奈米大氣通道元件製造流程23
3-4 實驗儀器26
3-4-1 Keithley 2400 Source Meter26
3-4-2 光學顯微鏡及探針平台26
3-5 實驗軟體26
第四章 實驗結果30
4-1 有限元素模擬分析結果30
4-2元件實際拍攝33
4-3 元件量測數據之結果36
4-3-1 非對稱型電極二極體量測結果與P-N二極體之比較36
4-3-2 對稱型電極二極體量測結果及比較37
4-3-3 奈米大氣通道元件之F-N plot37
第5章 結論43
5-1 結論43
5-2 未來展望44
參考文獻 45

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