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研究生:楊詩偉
研究生(外文):YANG, SHI-WEI
論文名稱:導模共振之相位影像量測系統研製
論文名稱(外文):Implementation of Guided-Mode Resonance Phase Imaging System
指導教授:郭文凱郭文凱引用關係莊賦祥莊賦祥引用關係
指導教授(外文):KUO, WEN-KNIJUANG, FUH-SHYANG
口試委員:楊宗哲邱銘宏莊賦祥郭文凱
口試委員(外文):YANG, TZONG-JERCHIU, MING-HUNGJUANG, FUH-SHYANGKUO, WEN-KNI
口試日期:2020-07-22
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:光電工程系光電與材料科技碩士班
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2020
畢業學年度:108
語文別:中文
論文頁數:45
中文關鍵詞:導模共振奈米壓印相位式量測
外文關鍵詞:Guide Mode ResonanceNanoimprintPhase measurement
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本論文透過結合導模共振影像系統與五步相位演算法,觀察共振基板表面因折射率差異造成的相位變化的影像,使用針尖將二種不同比例調製的佈聚二甲基矽氧烷(Polydimethylsiloxane, PDMS)沾至導模共振元件表面上,利用此方法模擬元件表面小範圍的折射率變化,量測系統則利用偏振光打入導模共振元件中,且藉由旋轉平台改變入射角,當入射光角度滿足導模共振條件時,會使特定波長的穿透光強度下降,造成共振影像有亮暗之差,進而判別折射率差別。而將導模共振影像結合液晶後由強度式量測轉為相位式量測,已提高靈敏度與降低量測雜訊,相位式量測系統誤差為1°~1.5°左右。最後計算後可知強度式量測靈敏度為25 Gray/RIU,相位式量測為200°/RIU。
In this paper, by combining a guided-mode resonance (GMR) imaging system and a
five-step phase algorithm to observe the image of the phase change caused by the difference in refractive index on the surface of the GMR sensor, two different polydimethylsiloxanes(PDMS), is used to as the analyte refractive index change on the surface of the GMR device. When the incident angle satisfies the GMR condition, the intensity of the transmitted light at a specific wavelength will be reduced, causing different gray values in the image. Two liquid crystal retardation plates are used to convert from intensity measurement to phase measurement, which has improved sensitivity and reduced noise. The error of our phase measurement system is about 1°~1.5°, and the intensity measurement sensitivity is 25 Gray/RIU while the phase measurement sensitiv ity is 200°/RIU.
摘要.......................................................i
Abstract...................................................ii
誌謝.......................................................iii
目錄.......................................................iv
表目錄......................................................vi
圖目錄......................................................vii
第一章 緒論.................................................1
1.1 研究動機................................................1
1.2 研究方法................................................1
1.3 論文架構................................................1
第二章 文獻回顧與原理........................................2
2.1 文獻回顧................................................2
2.2 導模共振原理............................................6
2.2.1 波導理論..............................................6
2.3 相移干涉原理[13]........................................7
2.3.1 五步相移演算法[14]....................................8
第三章 導模共振元件模擬與製作................................10
3.1 導模共振元件模擬........................................10
3.2 元件架構模擬............................................11
3.3 導模共振元件製作........................................13
3.3.1 製程材料介紹..........................................13
3.3.2 聚二甲基矽氧烷(PDMS)模仁製作...........................13
3.3.3 奈米壓印機............................................14
3.3.4 導模共振元件製作.......................................15
3.4 導模共振元件穿透式光功率量測..............................16
3.5 導模共振元件外差干涉量測分析..............................17
第四章 相位式導模共振影像量測系統..............................19
4.1 相位式量測系統架設........................................19
4.2 液晶調製器[18-19]........................................19
4.2.1 液晶驅動...............................................20
4.2.2 校正液晶相位驅動........................................21
4.3 網路攝影機影像擷取與處理[21]...............................23
4.3.1 系統穩定度測試..........................................25
4.4 相位式導模共振影像分析....................................26
4.5 強度式導模共振影像分析.....................................32
第五章 結論...................................................34
參考文獻......................................................35
Extended Abstract............................................37


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