本研究欲開發具多向性之可撓壓阻式應變規微感測器，並附著至螺絲上再配合後端電路來達到量測鎖螺絲時所產生的力量的效果，以及固定螺絲後監控是否有鬆脫現象。

基板是利用聚醯亞胺薄膜(Polymide Film)所製作，感測材料是利用鈦鉻鈦之複合金屬，其厚度皆為100 nm，而保護層則是使用氧化物(oxide)，整體尺寸為3 mm × 13.5 mm，線寬間距皆為100 μm，實驗前先利用ANSYS軟體進行應力與應變之模擬分析來決定壓克力拉伸試片之尺寸規格，最後將應變規微感測器黏貼至壓克力拉伸試片，再利用拉伸試驗機去定義力量與形變量，並利用多功能電源電錶來量測應變規微感測器之電阻值變化。

從實驗結果得知，當施加15N之力量於應變規微感測器上，其形變量約為0.15 mm，應變值為0.0034，電阻值變化為25Ω，其電阻值與應變值呈正比狀態，也發現此應變規微感測器有遲滯現象產生。

This research is to develop a multi-directional flexible piezoresistive strain gauge micro-sensor, attach it to the screw and cooperate with the back-end circuit to achieve the effect of measuring the force generated when locking the screw, and monitoring after fixing the screw Is there any looseness?
The substrate is made of polyimide film (Polymide Film), the sensing material is titanium-chromium-titanium composite metal, the thickness of which is 100 nm, and the protective layer is made of oxide, the overall size is 3 mm × 13.5 mm, the line width interval is 100 μm. Before the experiment, use ANSYS software to simulate the stress and strain to determine the size of the acrylic tensile test piece. Finally, stick the strain gauge micro sensor to the pressure Acrylic tensile test piece, then use the tensile test machine to define the strength and deformation, and use a multi-function power meter to measure the resistance value of the micro-sensor of the strain gauge.
It is known from the experimental results that when a force of 15N is applied to the strain gauge micro-sensor, the deformation value is about 0.15 mm, the strain value is 0.0034, and the resistance value is changed to 25Ω. It is found that the strain gage micro sensor has hysteresis.

摘要
ABSTRACT
致謝
目錄
表目錄
圖目錄
第一章 緒論
1.1前言
1.2研究動機
1.3文獻回顧
1.3.1 噴墨打印技術用於應變測量
1.3.2 INK智能印刷應變規
1.3.3可植入人體之碳薄膜應變規感測器
1.3.4 感測器之比較
第二章 理論基礎
2.1 理論基礎
2.2 應變定義
2.3 量測應變原理與模型
第三章 元件設計與製程
3.1 實驗設備
3.2 感測器結構設計概念
3.3 應變規之電極製作流程
3.4 拉伸試片之分析設計
第四章 實驗架構與量測系統
4.1實驗設備
4.2實驗架構
4.3實驗參數
第五章 實驗結果與討論
5.1 感測器之分析結果
5.2拉伸試驗之結果
5.2.1 純鈦(150 nm)之結果
5.2.2 鈦鉻一(50-50-50 nm)之結果
5.2.3 鈦鉻二(40-70-40 nm)之結果
5.2.4 鈦鉻三(60-30-60 nm)之結果
5.3回歸曲線之結果
5.3.1 純鈦(150 nm)之結果
5.3.2 鈦鉻一(50-50-50 nm)之結果
5.3.3 鈦鉻二(40-70-40 nm)之結果
5.3.4 鈦鉻三(60-30-60 nm)之結果
5.4往復測試之結果
5.4.1 純鈦(150 nm)之結果
5.4.2 鈦鉻一(50-50-50 nm)之結果
5.4.3 鈦鉻二(40-70-40 nm)之結果
5.4.4 鈦鉻三(60-30-60 nm)之結果
5.5穩定性測試之結果
5.5.1 純鈦(150 nm)之結果
5.5.2 鈦鉻一(50-50-50 nm)之結果
5.5.3 鈦鉻二(40-70-40 nm)之結果
5.5.4 鈦鉻三(40-70-40 nm)之結果
第六章 結論與未來展望
6.1結論
6.2未來展望
6.2.1 智慧鎖固系統之介紹
6.2.2 智慧螺絲之內部構造介紹
參考文獻

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